MVGQ

Minimum Stroke for Auto Switch Mounting (mm) Auto switch Applicable auto switch model No. of auto switches mounted D-Z7, D-Z8 D-Y7W, D-Y7WV D-Y59, D-Y69 D-Y7P, D-Y7PV 5 10 5 10 10 15 1 pc. 2 pcs.

100

opening [Number of rotations] 2 4 6 8 10 11 1 3 5 7 9 12 0 * The flow rate is not the flow rate output from the vacuum port.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

0.1 ASS 0.2 10 ASR 0 0 0 0 0 0 10 20 5 10 5 10 ASF Number of needle rotations Number of needle rotations Number of needle rotations 15-9-65 Series AS-FM Construction Component Parts No.

Thermo-con/Rack Mount Type

water 0.14 0.25 0.12 Ethylene glycol 20% Ethylene glycol 20% 0.20 0.10 0.08 0.15 0.06 0.10 0.04 0.05 0.02 0 0 1 2 4 7 6 5 3 0 0 1 2 3 5 4 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] Pressure Loss in Facility Water Circuit HECR008-W HECR012-W 0.10 0.10 0.08 0.08 Pressure loss [MPa] Pressure loss [MPa] 0.06 0.06 0.04 0.04 0.02 0.02 0 0 5 10 15 20 0 0 5 10 15 20

PFxx-OMX0002

The time interval for memorizing can be selected from 2 or 5 minutes. Accumulated-value hold time Outputs a value proportional to the flow rate. When the analogue output is in the range 1 to 5 V, it will vary between 1 to 5 V according to the rate of flow. The same for analogue output of 0 to 10 V or 4 to 20 mA.

HRS100/150

Cooling Capacity HRS100-A-20/40(50 Hz) HRS100-A-20/40(60 Hz) 14 14 12 12 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 40C Ambient temperature 32C Ambient temperature 40C 8 8 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

adjuster at retraction end Stroke adjuster at extension end KA 18.5 8.5 5 K 18.5 8.5 4.75 Vacuum suction port M5 x 0.8 5 NA x M4 x 0.7 thread depth 5 8 10 5 9.5 11 I 5.5 J 8 Maximum 11 (With stroke adjuster at retraction end) 9.5 2 Operating port 2 x M5 x 0.8 4H9 ( ) depth 3.5 +0.030 0 2 x M4 x 0.7 thread depth 5 HA GA 4H9 ( ) depth 3.5 +0.030 0 NN x M5 x 0.8 thread depth 10 B A 5 1 20 9

Compact Vacuum Unit

Supply from one side 8 10 10 M5 x 0.8 Supply from both sides 10 12 12 Note) These values are obtained under the standard supply pressure.

HRX-OM-K003

. 5-5 5.3.7 Setting screen . 5-6 5.3.8 Mode Selection screen . 5-6 5.3.9 Initial Setting screen . 5-7 5.3.10 Maintenance screen . 5-9 5.3.11 Option screen . 5-9 5.3.12 Alarm Display screen . 5-10 5.3.13 Information screen . 5-10 5.4 Examples of System Operation . 5-11 5.4.1 Example 1: Circulating fluid set temperature is changed from 25.0C to 34.1C. . 5-11 5.4.2 Example 2: Communication

0.5

level: 1 Air flow level: 1 10 10 10 10 Air flow level: 10 5 Air flow level: 10 5 Air flow level: 10 Air flow level: 10 5 5 Air flow level: 10 Air flow level: 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

10 20 30 1002 3 4 5 10 20 30 0.5 40 50 100 Load weight (kg) Load weight (kg) 20 Horizontal collision: P = 0.5 MPa 40 Horizontal collision: P = 0.5 MPa 2000 1500 2000 1500 Collision speed (mm/s) Collision speed (mm/s) L unit 1000 1000 Air cushion 500 400 300 500 400 300 L unit Air cushion 200 200 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 Caution Load weight (kg) Load weight (kg) 1.

Electric Actuator / Low profile slider type

LEMH 25 25 LEMHT32 LEMH32 20 20 Workload m[kg] Workload m[kg] 15 15 LEMHT25 LEMH25 10 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 0 200 400 600 800 1000 1200 1400 Support spacing [mm] Support spacing [mm] 6.2 Handling Caution 1.

Compact Cylinder/Guide Rod Type Series CQM

10 5 15 15 5 2 pcs. 10 10 10 15 15 5 32, 40, 50, 63, 80, 100 1 pc. 10 10 5 5 10 5 15 10 5 15 15 20 15 2 pcs. 10 15 10 5 10 10 15 15 5 15 20 20 15 D-P4DWL type is compatible with bore sizes 40 to 100.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

Pilot Operated

Clip 5 Z G VX021N B AZ-T-VX Valve model Name plate Enter by referring to How to Order. Rated voltage 5 6 24 VDC 12 VDC Solenoid coil Clip part no. (For N.C.) For VXD21: VX021N-10 For VXD22: VX022N-10 For VXD23: VX023N-10 Clip part no. (For N.O.) For VXD21: ETW-7 For VXD22: ETW-8 For VXD23: ETW-9 2 Series VXD21/22/23 For Water Model/Valve Specifications Normally closed (N.C.)

Air Cylinder

5 2.5 2.5 4.5 4.5 2 2 5.5 5.5 3 3 10.5 10.5 0 0 1 1 0 0 9.5 8.5 5.5 4.5 3 2 5 4 2.5 1.5 6 5 3.5 2.5 11 10 0 0 1.5 0.5 0 0 12.5 11.5 8.5 7.5 6 5 3 2.5 5.5 4.5 9 8 6.5 5.5 14 13 2.5 1.5 4.5 3.5 3 2 16.5 13.5 12.5 9.5 10 7 7.5 4 9.5 6.5 13 10 10.5 7.5 18 15 6.5 3.5 8.5 5.5 7 4 100 18 16 14 12 11.5 9.5 9 6.5 11 9 14.5 12.5 12 10 19.5 17.5 8 6 10 8 8.5 6.5 Note) Adjust the auto switch after confirming

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 TMH 400 200 06, 07 02 01, 23 ASD 300 50 03, 04 100 200 AS 01, 23 100 AS-FE 0 0 0 KE 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations AS-FG AS-FG Note) -U10/32 has the same specification as M5.

Industrial Filters

0.5, 1, 5, 10 20, 50, 75, 100 EH EB ES Plating fluids, General acids, Alkali fluids, Industrial water, Cooling water Polypropylene 0.5, 1, 5, 10 20, 50, 75, 100 EHM P.41 General acids, High-temperature fluids EHK Glass fiber 1, 5, 10, 20 Paper P.42 Cotton, Phenol impregnated, (Epoxy adhesion) 5, 10, 20 Hydraulic oil, Lubricating oil, Fuel oil EP Micromesh Stainless steel 304 (Epoxy adhesion

EXxx-OMN0029CN

EDS Enable 1 (SC_MonSs) Disable -10..10 V -5..5 V -20..20 mA 0..10 V 2 (Range) -10.. 10 V 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary PLC 3 (D_Format) Sign & Magnitude 2S Complement 2 None 2 2AVG 2 4 (Filter) 4AVG 4 8AVG 8 Enable 0.5 5 (Over_Rng) Disable Enable 0.5 6 (Undr_Rng) Disable 1 Enable (Upr_Lmt) 2 7 Disable 1 Enable (Lwr_Lmt) 2 8 Disable 1 2DeviceNet

VEX1

VVEX4-2-6-A VEX3420 5 pcs. VEX4-5 1 pc.