20 1 MXS 20 16 16 0.1 0.01 MXQ 10 10 6 6 MXF 0.01 0.001 0.1 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 MXW Overhang L (mm) Overhang L (mm) Overhang L (mm) MXJ Graph (5) Load Eccentricity 100 mm Graph (8) Load Eccentricity 100 mm Graph (11) Load Eccentricity 100 mm MXP 1 10 10 MXY Mass m (kg) 0.1 MTS 1 Mass m (kg) Mass m (kg) 20 16 10 6 1 20 20 16 10 16 0.01 0.1 10 6 6 0.001 0.1
Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.
35 54 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 75, 100 125, 150 200, 250 300 120 14 16 10 100 35 6 35 135 20 80 118 6.6 40 73 80 106 35 60 M10 x 1.5 depth 18 M6 x 1 depth 12 11 depth 8 140 17 19 10 120 40 9 45 170 20 100 150 9 50 93 95 134 50 75 M8 x 1.25 depth 16 14 depth 10 M12 x 1.75 depth 21 170 23 21 10 150 45 9 50 194 25 120 170 11 55 103 115 152 56 90 M10 x 1.5 depth 20 M14 x
10 stations 02 2 stations (2) Manifold base (5 stations) Available up to 20 solenoids.
/ Complex exhaust) 40 40 100 Vacuum pressure [kPa] 30 30 80 Air consumption 60 20 20 40 High-noise reduction silencer exhaust 10 10 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 30 40 50 60 Supply pressure [MPa] Suction flow [L/min (ANR)] 19 Vacuum Unit ZK2mA Series The flow rate characteristics correspond to the standard supply pressure.
Outlet air atmospheric pressure dew point C P1 = 0.5MPa P1 = 0.5MPa 10 10 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 0 40 80 120 160 20 40 60 80 0 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG20 IDG30 P1 = 0.3MPa P1 = 0.3MPa 0 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C P1 = 0.5MPa 10 P1 = 0.5MPa 10 P1 = 0.7MPa 20 20 P1
Work load [kg] Work load [kg] 40 30 Lead 8: LEY32DB Lead 10: LEY32B 30 20 24 19 Lead 16: LEY32DA 20 Lead 20: LEY32A 10 12 9 10 0 200 400 600 800 1000 1400 1200 0 0 200 400 600 800 1000 1200 0 Speed [mm/s] Speed [mm/s] LEY63 (Motor mounting position: Top/Parallel, In-line) 120 Lead 2.86: LEY63L (Top/Parallel type only) 100 Lead 5: LEY63C Work load [kg] 80 Area where the regeneration option
Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.
20 20 E-MY2HT16 10 10 10 E-MY2HT16 E-MY2HT16 8 8 8 5 5 5 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Load Mass: E-MY2HT (Double Axis) E-MY2HT/m1 E-MY2HT/m2 E-MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) E-MY2HT25 E-MY2HT25 E-MY2HT25 10 10
Insulation resistance MW/km, 20C 5 or more 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 Note) The minimum bending radius for D-sub connector cables is 20 mm.
-Am-20 (CH1) HRL100-Am-20 (CH1) 0.6 0.6 60 60 0.5 0.5 50 50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump
10 M10 x 1.25 24 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 35.5 1/8 to 300 40 10 M14 x 1.5 24 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 44 1/8 to 500 50 14 M18 x 1.5 40 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 55 1/4 to 600 63 14 M18 x 1.5 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 69 1/4 to 600 80 22 M22 x 1.5 60 40 37 32 50 75 25 28 20
Stations Stations 3 2 1 02 2 stations 20 20 stations 53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)
M8 x 1.25 18 15.5 13 9 10 8 20 13 10 41 5 33.5 5 30 20 30 Up to 700 25 M10 x 1.25 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 34.5 Up to 700 32 M10 x 1.25 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 42.5 Up to 1000 40 M14 x 1.5 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 51 Up to 1000 NN P RR S U Z ZZ Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 9 146 14 217 226 25 M26
ZY 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.
: 45 oC 12 12 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 9-5 Cooling capacity(HRS090-A-20/40/46) 9.4.2 HRS090-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 12 14 12 10 10 Cooling capacity [kW] Cooling capacity
[mm] Weight [g] X Y Nylon Urethane L1 M M L1 3.2 1/8 KQ2T23-01mS1 10 7.1 6.7 9.5 10 14.5 16.6 17.1 13.3 3.4 2.9 2.5 5.2 1/4 KQ2T23-02mS1 14 7.1 6.7 9.5 10 14.5 21.1 20 13.3 3.4 2.9 2.5 14.7 A L2 4 1/8 KQ2T04-01mS1 10 8.2 7.7 10 10 14.8 16.2 17.2 13.3 6 4.1 3 5.5 1/4 KQ2T04-02mS1 14 8.2 7.7 10 10 14.8 21.7 21.1 13.3 6 4.1 3 15 D2 D1 6 1/8 KQ2T06-01mS1 10 10.4 9.7 12 10 15.5 17.3 19.4 13.3
10 15 15 20 MS4-10 MS5-10 MS6-15 MS6-15 MS8-20 Left Right Left Right Operating direction of the housing Operating direction of the housing Manufactured by Misumi Trading Ltd.
10 15 15 20 MS4-10 MS5-10 MS6-15 MS6-15 MS8-20 Left Right Left Right Operating direction of the housing Operating direction of the housing Manufactured by Misumi Trading Ltd.
L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20