High Power Cylinder Series RHC

Applicable bore size (mm) M22 x 1.5 M8 x 1.25 SOR-20 NT-02 20 20 5 13 8 30 26 15 12.5 26 M24 x 1.5 M10 x 1.25 SOR-25 NT-03 25 25/32 6 17 8 36.9 32 19.6 16.5 32 M30 x 1.5 M14 x 1.5 SOR-32 NT-04 32 40 8 22 9 43.9 38 25.4 21.0 38 M33 x 2.0 M18 x 1.5 SOR-40 NT-05 40 50/63 11 27 11 47.3 41 31 26 41 M22 x 1.5 NT-08 80 13 32 37 31 M26 x 1.5 NT-10 100 16 41 47.3 39 1210 High Power Cylinder Series

High Power Cylinder Series RHC

area So [mm] 10 1/4,3/8 20 2000 6 10 1/4, 3/8 2500 7.5 =0.7 10 1/4, 3/8 0.5 3000 9 10 0.1 0.3 6 1/4,3/8 500 2.5 8 1/4, 3/8 1000 5 0 10 1/4, 3/8 1,000 2,000 3,000 25 1500 7.5 Maximum speed Vmax [mm/s] 10 1/4 2000 10 32 2500 3000 12.5 15 1/4 1/4 30 6 10 1/4, 3/8 =0.7 500 4 20 0.5 0.1 0.3 10 10 1/4, 3/8 32 1000 8 1500 2000 2500 3000 12 16 20 24 1/4,3/8 3/8 3/8 3/8 0 1,000 2,000 3,000 Maximum

Digital Gap Checker ( compatible)

The tightening torque of the mounting screw must be 0.45 Nm 10%. When the product is mounted using the bracket, fix with M5 screws (2 pcs.) or equivalent. The Bracket thickness is approx. 1.6 mm.

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

HRX-OM-Q026

: 32 oC 25 Cooling capacity [kW] 20 Facility water temperature: 40 oC 15 10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-14: Cooling Capacity (HRSH200-W-20/40-) 8.4.9 HRSH250-W-20/4035 Facility water temperature: 32 oC 30 25 Cooling capacity [kW] Facility water temperature: 40 oC 20 15 10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-15: Cooling Capacity

High Power Cylinder:

Composed effective area So (mm2) 6 2000 h=0.7 10 1/4, 3/8 7.5 2500 REC 0.5 10 10 1/4, 3/8 0.1 0.3 9 3000 RHC 6 1/4, 3/8 2.5 500 8 1/4, 3/8 MTS 5 1000 0 1,000 2,000 3,000 25 (1/4) 10 1/4, 3/8 Max. speed Vmax (mm/s) 7.5 1500 CC Graph 3:32 10 1/4 10 2000 12.5 15 2500 3000 30 1/4 1/4 h=0.7 6 10 1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500

Series VCL

20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Air Cylinder NCA1 Series

: 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1

NCA1

: 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Direct Operated 2 Port for

VK3000

Caution Corresponding mark (Concave part) Corresponding mark (Concave part) Mounting Screw Tightening Torques M3: 0.6 Nm 1422 VK3000 Series 5 Port Solenoid Valve Direct Operated Poppet Type Dimensions: Body Ported Grommet: VK3120-G-M5 Port size: M5 DIN terminal: VK3120-D-M5 2 x 3.2 (Manifold mounting hole) 74.1 Max.10 14 9 (Bracket) 5 x M5 x 0.8 (Piping port) 4A 4A 2B 13 4 2B 2 x 3.2 (Lead

VCB

20 19 M5 8 24 76 46 66.5 101 66.5 68 99 VCB31 30 50 86 1/2 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101 71 68 104 22 45 90 1/4, 3/8 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 VCB41 30 50 94 1/2 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 35 60 102 3/4 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 17-2-27

VZS

Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series Average speed (mm/s) 800 700 600 500 400 300 200 100 0 It is when the cylinder is extending that is meter-out controlled by speed controller which

AMPSeries

10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Exhaust Cleaner for Clean Rooms AMP Series

10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

Angle Seat Valve

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

Angle Seat Valve /

/N.O. 1/4 to 50A 10 to 12 N.C.