AS-FG/ASD-FG

Flow direction symbols on body Meter-out type Meter-in type Flow Rate and Effective Area Symbol JIS symbol ASD230FG ASD330FG ASD430FG ASD530FG ASD630FG 4, 6 Model 6 8 10, 12 10 12 8, 10 6 6, 8 Metric size 1/4" 5/16" 3/8" Tube O.D. 1/8" 5/32" 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size l/min (ANR) Flow rate Controlled (Free) flow 295 350 75 175 500 600 700 1200 1300 4.5 5.3 2.7 1.1 7.6 9.1

AFF

Option J: With drain guide Bracket (Option) 1/4B female thread T: With element service indicator Maintenance space HA Drain AT ID AMG AFF Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5

Rotary Table

Then the piston moves further, and the magnet goes into switch B's operation range to turn on switch B. Mounting of auto switch 56mm 10 (M2.54L) Table 10.

PFxx-OMJ0005CN

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 A B A B C4 4(5/32) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.

-fl Seies

E B ,rt1 0f $ [,r PEEAA P B EAPE +q--dz 3 position Closed centr/Exhaust centet/Presute cenler .1&t*080 PEEA A P B EBPE Main Parts No.

VCW

Base material Seal material NBR FKM EPDM PTFE NBR FKM EPDM PTFE Symbol Nil A B C G H J K VX2 10 10 stations C37 Refer to page 172-58/59 in the L dimension table regarding the maximum number of stations.

AC Servo Motor Driver (MECHATROLINK-III type)

C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

CYV

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60

Steam Valve

121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F VND60D-40F VND70D-50F 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

HRX-OM-W069

output signal 3 B contact (normally closed) By default 2.4.2 Contact output signal 4 to 6 Contact output signal 4 to 6 can be set to "signal type", "contact form".

VXZ

Option Symbol and Composition Option Symbol and Composition Main body, shading coil material Holder material (in core ass'y) Option symbol Seal material Coil insulation type Main body, shading coil material Standard A B D E F G H J L N P T X Option symbol Seal material Coil insulation type NBR FKM Standard A B D E F G H J L N P T X NBR FKM B Polyacetal B FKM EPDM Brass or BC6, Copper FKM

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

Thermo-chiller/Rack Mount Type

HRR050-W-20 30 Facility water flow rate [L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet temperature [C] This is the facility water flow rate at the circulating fluid rated flow and the cooling capacity listed on pages 20 and 21. 24 HRR Series Dimensions Air-cooled Refrigeration HRR010-A-20-m (75 10) 440 (Includes protruding parts) Ventilation air inlet Ventilation air outlet

Transfer

12 15 EB 20 25 31 EC 6.5 8.5 9.5 ED 60 74 94 EY 53.5 67 81.5 FA 46.7 67.3 67.3 FB 33 43 43 FC 13 17 17 FF 6 6 6 FH 12 16 16 TA 7 12 12 TT Max. 16.5 Max. 20 Max. 25 Applicable cylinder ML2B25 ML2B32 ML2B40 D-X 717 ML2B Series Dimensions Side support A MY-SA 2 x G F E 2 x H A B C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

ZB-OM00301

DC+COM A(-) C(+) COM B(-) 1N.C.ON 2 ZNR/ 3AB 23 - No.ZB-OM00301 (10ms ) 1 210ms 2 330m/s 4() A-C ON B-C ON N.C. A-C ON OFF 10msec ON 10 A B OFF 50 A B 10 1 50 3 3 24 - No.ZB-OM00301 ZB / / Assy /HNBR Assy //HNBR 25 - No.ZB-OM00301 2 ()() 5kPa () ZFAZFBZFC ON ZB1-VQ110U N.C (0.3 0.4 0.5 0.6) ZB1-VQ110L (0.30.4) ZB1-VQ120U N.C ZB1-VQ110N.C.

Series 10-, 21- AF-A Air Filter

flats 17 Clearance for maintenance G 1/4 Drain A Metal bowl 10-/21-AF20-A 10-/21-AF30-A to 60-A With bowl guard Metal bowl with level gauge Metal bowl Applicable model Semi-standard specifications Dimensions B B B B Metal bowl with level gauge Bracket mounting size Semi-standard specifications Standard specifications Model B Metal bowl With bowl guard B B V U T R Q N M J G D E C B A P S

VQ

3 SOL. 4 stations 4 SOL. 5 stations 5 SOL. 6 stations 6 SOL. 7 stations 7 SOL. 8 stations 8 SOL. 9 stations 9 A Black White SOL. 10 stations 10 w SOL. 11 stations 11 SOL. 12 stations 12 B SOL. 13 stations 13 q SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 2.9-5 3 Port Solenoid Valve Series

Rodless Cylinder for Vacuum Series CYV ø15, ø32

TB W Counter bore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60