Special Applications: Clean Series, Body Size: 25, Reverse Flow: No, Thread: Rc, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: None
Special Applications: Clean Series, Body Size: 25, Reverse Flow: No, Thread: G, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: None
Special Applications: Clean Series, Body Size: 25, Reverse Flow: No, Thread: G, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: None
Special Applications: 10-AR (Clean Series), Body Size: 25, Reverse Flow: No, Thread: F (G), Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: None
Special Applications: 10-AR (Clean Series), Body Size: 25, Reverse Flow: No, Thread: Rc, Port Size: 03 [3/8 (Size 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: None
Special Applications: 10-AR (Clean Series), Body Size: 25, Reverse Flow: No, Thread: Rc, Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: None
Special Applications: 10-AR (Clean Series), Body Size: 25, Reverse Flow: No, Thread: F (G), Port Size: 02 [1/4 (Size 20, 25, 30, 40)], Accessory, Not Attached: H [Set Nut for Panel Mount (Size 20 to 40)], Option: None
VHS C A 1(P) 2(A) Air Supply Warning B 1 Mount air filter to supply side close to valve. Filtration rating has to be 5m or smaller. 3(R) Model VHS2500 VHS3500 VHS4500 VHS5500 A 60 78 85 136 B 20 29 32 56 C 12.8 12.8 12.6 32 D 40 53 70 90 E 44 53 64 80 F 33 42 49 65 G 28 29 36 54 H 7.5 7.5 10 10 3.6-18
Clevis Y-O5A Y.O5A Y-O8A Y-1OA Fod Clevis Pin CDP.3 CDP-3 CDP-5 CDP-6 Rod Nul NT.05 NT-05 NT.O8 NT-10 Mounlinq Brackel Clevis Pln CDP.3 CDP.4 CDP.6 CDP-7 SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS CPA1 B N vr/o Boot with Boot' BORE B D E K L M MM N s H z.
screw 103.3 (131.5) A 4 SMC 37.6 53.6 B 2 18.5 12 12 e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 10 Lead wire length: L0, 0.6 m L1, 1.5 m L2, 3.0 m For top ported R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62.1 41.7 25.7 39.4 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 20.9 P 1 P=17.5 48.8 30 7.5 One-touch fitting [4(A), 2(B) port] Applicable
C shape 8 for axis C shape 10 for axis C shape 10 for axis NT-02 NT-03 NT-G04 C shape 8 for axis C shape 10 for axis 13 17 19 20 25, 32 40 15.0 19.6 21.9 12.5 16.5 18 M8 X 1.25 M10 X 1.25 M14 X 1.5 5 6 8 IY-G02 0.040 0.076 8 CD-G02 20 21 7.6 16.2 1.5 0.9 0.040 0.076 8 43.4 7.6 38.6 1.5 20 0.9 IY-G03 0.040 0.076 10 CD-G25 0.040 0.076 10 25, 32 25.6 1.55 1.15 9.6 20.2 48 1.55 1.15 9.6 42.6
(Red Green Red) D-B59W D-A79W D-A59W D-H7NW/H7PW/H7BW D-G59W/G5PW/K59W D-F79W/F7PW/J79W D-F7NWV/F7BWV D-F59W/F5PW/J59W D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV D-Y7NW/Y7PW/Y7BW Band Grommet 10-20-23 Solid state switch Reed switch Rail Grommet 10-20-24 Tie-rod Grommet 10-20-25 2-color indication 10-20-42 Band Grommet RE A B 10-20-43 10-20-44 Rail Grommet REC 10-20-45 Tie-rod Grommet 10-20-46
L RR RR CL+ Stroke 10 15 6.5 12 8 6 A + Stroke 16 18 8 16 10 9 20 20 10 20 10 10 25 20 18 36 12 10 28 22 18 36 12 10 10-5-15 15 Series MQQ Accessory Bracket Dimensions Rod end thread adapter Rod end nut d NN rod MM D C C B H E F A B H Applicable bore (mm) Applicable bore (mm) Part no.
adapter and rod end nut, refer to page 10-5-16. 10-5-12 12 Compact Low Friction Cylinder Metal Seal Series MQQ Foot style: MQQTL 10, 16, 20 L Special cap bolt B + Stroke Bore size (mm) Stroke range (mm) A B L LD LG LH LY LH 10 10 to 40 44.3 31.5 8 4.5 2.8 19 4-LD X X LG Y Y RE A B LT 16 10 to 60 51.2 34 10 6.6 4 24 LS + Stroke LX LZ 20 10 to 60 54.7 37.5 10 6.6 4 26 A + Stroke REC 25 10 to
E 3 Auto drain Additional symbol Port size 1 None With auto drain 0 Flow direction: left to right MR unit Flow direction: right to left 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR3l00-02 to 03 AMR4l00-02 to 04 AMR5l00-04 to 06 AMR6l00-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.)
Applicable bore size (mm) B C D d H Dd9 L d Part no. 0.040 0.076 0.040 0.076 0.050 0.093 14 0.050 0.093 0.040 0.076 0.040 0.076 0.040 0.076 CD-G02 CD-G25 CD-G03 CD-G04 NT-02 NT-03 NT-G04 20 25 32 40 20 25, 32 40 21 25.6 41.6 7.6 9.6 9.6 IY-G02 IY-G03 IY-G04 M8 x 1.25 5 6 8 20 25, 32 40 13 17 19 15.0 19.6 21.9 12.5 16.5 18 8 10 12 8 10 10 43.4 48 59.4 71.4 7.6 9.6 11.5 13.4 M10 x 1.25 M14
Outlet: 60 Hz Outlet: 60 Hz 20 20 0.1 0.1 10 10 Outlet: 50 Hz Outlet: 50 Hz Return port Allowable operating range Return port Allowable operating range 0 0 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] 202 Thermo-chiller Basic Type HRSE Series Dimensions HRSE012/018/024-A-10/20/23 Ventilation air outlet Ventilation air inlet
Cylinder Metal Seal Foot type/MQQLL 10, 16, 20 B + Stroke Special cap bolt L (mm) Bore size (mm) Stroke range (mm) A B L LD LG LH LH LY 74.3 61.5 8 4.5 2.8 19 10 10 to 40 87.7 70.5 10 6.6 4 24 16 10 to 60 4-LD X X LG Y Y LT 96.2 79 10 6.6 4 26 20 10 to 60 LS + Stroke LX 103.7 84.5 12 6.6 4 30 25 10 to 50, 75, 100 LZ A + Stroke 123.2 104 12 6.6 4 33 28 10 to 50, 75, 100 25, 28 B + Stroke
Applicable bore size (mm) B C D d H Dd9 L d Part no. 0.040 0.076 0.040 0.076 0.050 0.093 14 0.050 0.093 0.040 0.076 0.040 0.076 0.040 0.076 CD-G02 CD-G25 CD-G03 CD-G04 NT-02 NT-03 NT-G04 20 25 32 40 20 25, 32 40 21 25.6 41.6 7.6 9.6 9.6 IY-G02 IY-G03 IY-G04 M8 x 1.25 5 6 8 20 25, 32 40 13 17 19 15.0 19.6 21.9 12.5 16.5 18 8 10 12 8 10 10 43.4 48 59.4 71.4 7.6 9.6 11.5 13.4 M10 x 1.25 M14
Refer to page 13-2-10 for details. (1) Valve unit (4) Adsorption confirmation switch unit K1 A V ZX1 5 Z B D M L Unit for replacement 15 C 0X B ZSP1 D Piping specifications Applicable nozzle diameter Manifold All ports are equipped with plugs.