Digital Flow Switches

Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.

0.55

Since voltage drops due to the internal circuit in S, Z, T types (with power saving circuit), the allowable voltage fluctuation should be within the following range. 24 VDC: 7% to +10% 12 VDC: 4% to +10% Made to Order (Refer to page 24 for details.)

Environment

PB H thread depth C Vent hole Note 3) J PC EV Z T M U D K Note 2) L R 4 x O1 thread depth R W A + Stroke B + Stroke S EH M 6 x MO thread depth MR XA H9 depth XA MH Section XX details MA ML + Stroke MC MD Section XX XB XA H9 XA [mm] Incremental encoder Absolute encoder B C D EH EV Without lock With lock Without lock With lock A W Z A W Z A W Z A W Z Size Stroke range [mm] 25 15 to 100 238

Vacuum Module Series ZX

Vacuum switch unit Filter unit Release flow rate adjusting needle Manual operation Vacuum switch Electrical entry Ejector exhaust Electrical entry PV/V port size Pilot valve Components Vacuum switch unit Valve unit N.C. type Ejector unit ZX1 1 10 5 L Z E C K1 L Vacuum switch unit Ejector unit 1 10 L Z E C K3 5 ZX1 Valve unit N.O. type Vacuum switch unit ZX1 1 10 E C Ejector unit CE compliant

Filter Regulator

AW-OMX0057-A PRODUCT NAME Filter Regulator MODEL / Series / Product Number AW20(K)-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AW30(K)-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)06(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW60(K)-(F,N)06(F,N)10(B,C,

0.4

one-touch fitting C10 [3(R) EXH port] (C12 in case of branch type) C10: 10 one-touch fitting (C12: 12 one-touch fitting) R R DIN rail clamp screw 76.5 60 35 25 10 12 3 3 X 49.5 P X B B B B B B B B P12 30 1 1 A A A A A A A A 13.5 C10 [1(P) SUP port] C10: 10 one-touch fitting C10 [1(P) SUP port] (C12 in case of branch type) C4, C6, C8, [4(A), 2(B) port] 25 C10: 10 one-touch fitting (C12: 12

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

D-K39 D-A3m D-A44 D-M9m(V) D-M9mW(V) D-M9mA(V) D-A9m(V) D-F5NTL D-A5m D-A6m D-A59W D-P4DW Bore size A B A B A B A B A B A B A B A B A B 32 14 10.5 10 6.5 10.5 7 15.5 12 4 0 8 4.5 7.5 4 4 0 7 3.5 40 14 14 10 10 10.5 10.5 15.5 15.5 4 4 8 8 7.5 7.5 4 4 7 7 50 15.5 14.5 11.5 10.5 12 11 17 16 5.5 4.5 9.5 8.5 9 8 5.5 4.5 8.5 7.5 63 16.5 15.5 12.5 11.5 13 12 18 17 6.5 5.5 10.5 9.5 10 9 6.5 5.5

Title not found

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Circuit Cable color Shield Vcc GND A A B B Z Z Brown Black Red Black Orange Black Yellow Black Connector B terminal no.

SMC

N 1 x F 2-M3 x 0.5 thread depth 5 2 27 3H9 depth 2.5 +0.025 0 21 M 20 Z ZZ (NN1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN-M4 x 0.7 thread depth 8 B A 3H9 depth 2.5 +0.025 0 3H9 depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2

21

Note 2) D-K39A Note 2) D-M9l D-M9lW D-A9l D-B59W D-H7C D-H7BAL D-H7NF D-G5NTL D-B54 D-B64 D-C73C D-C80C A A B A B B B A B A B A B A B Bore size A 20 25 32 40 10 9 6 5 0.5 0 5.5 3.5 2.5 0 0 5.5 4.5 2 1 6.5 10 10 6 6 0.5 0.5 6.5 3.5 3.5 0 0 5.5 5.5 2 2 6.5 10 10 6 6 0.5 0.5 6.5 3.5 3.5 0 0 5.5 5.5 2 2 6.5 12 12 8 8 2.5 2.5 8.5 5.5 5.5 2 2 7.5 7.5 4 4 8.5 Note 1) Adjust the auto switch after

ISO Standard Hydraulic Cylinder

D-A59W D-Z7/Z80 D-M9/M9W D-M9A Bore size (mm) Bore size (mm) D-Z7/Z80 D-A5/A6 A B A B A B A B A B A B Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs 40 50 63 80 100 40 50 63 80 100 11.5 8.5 8 5 13 10 5 2 27 28.5 27 34 35.5 28.5 29 27 13 8 9.5 4.5 14.5 9.5 6.5 1.5 33 33.5 33 38.5 39.5 34.5 33 33 4.5 0 8.5 3.5 47.5 38.5 14.5 9.5 11 6 16 11 8 3 38.5 38 38.5 43.5 45 38.5 28 37 8.5 3.5 12.5 7.5 54

Precautions 1

Mounting Position (mm) D-C7 D-C80 D-C73C D-C80C A D-H7 D-H7C D-H7W D-H7NF Auto switch model D-A9 D-M9 D-M9W D-B59W D-B5 D-B64 D-G5NTL Bore size (mm) A A B B A B A B A B B A B 20 25 32 40 10.5 9.5 6 4 3 6 5 2.5 1.5 1 0 6.5 5.5 7 10.5 9.5 6 4 3 6 5 2.5 1.5 1 0 6.5 5.5 7 11.5 10.5 7 5 4 7 6 3.5 2.5 2 1 7.5 6.5 8 17.5 15.5 12 10 9 12 11 8.5 7.5 7 6 13.5 11.5 13 Note) Adjust the auto switch after

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

MIST SEPARATOR

Port thread Port thread Rc Rc G G NPT AD38N(-Z)-A NPT AD38N-2(Z)-A AD38-A AD38-2-A Semi-standard B B Part no. Port thread External appearance drawing and part no. Rc G NPT AD38N-6(Z)-A AD38-6-A Applicable tube external DIA. Applicable tube external DIA. 10 NPT3/8" 10 NPT3/8" 10 NPT3/8" Note 2 Option Semi-standard Metal bowl with level gauge Side view Semi-standard Part no.

MICRO MIST SEPARATOR

Port thread Port thread Rc Rc G G NPT AD38N(-Z)-A NPT AD38N-2(Z)-A AD38-A AD38-2-A Semi-standard B B Part no. Port thread External appearance drawing and part no. Rc G NPT AD38N-6(Z)-A AD38-6-A Applicable tube external DIA. Applicable tube external DIA. 10 NPT3/8" 10 NPT3/8" 10 NPT3/8" Note 2 Option Semi-standard Metal bowl with level gauge Side view Semi-standard Part no.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

M 30 NA x M5 x 0.8 thread depth 6.5 KA 21 5.5 10 Bottom view of MXQ16-50 1322K 21 13 35 45 5.5 10 0.3 35.7 5.5 37 Z ZZ G (NN 1) x H H 21 9 21 9 A B 10.5 10.5 5.1 5.1 9.5 24 1 A B NN x M6 x 1 thread depth 12 6 HA 5H9 ( ) depth 5 +0.030 0 5H9 ( ) depth 5 +0.030 0 GA A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3

MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

C85

D-H7C D-H7W D-H7BAL D-H7NF NCM D-A79W 13.3 13.3 10 A B 26 NCA D-J79C Bore 17 Hs D-X B 8 (5) 2 4 (2) 5.5 (3.5) A B 2 2 (2.5) 3 (4) 9 (6) 3 5 (3) 6.5 (4.5) B 3.5 3.5 (4) 4.5 (5.5) A 2 2 (2.5) 3 (4) A 3.5 3.5 (4) 4.5 (5.5) B 4 4 (4.5) 5 (6) 11 (8) 5 7 (5) 8.5 (6.5) B 3 3 (3.5) 4 (4.5) 10 (7) 4 6 (4) 7.5 (5.5) A 4 4 (4.5) 5 (6) A 3 3 (3.5) 4 (4.5) 1 D-F7V D-F7WV D-F7BAVL 8 10 12 7 23 A B 2015

C85

-8 GKM6-12 GKM6-12 GKM8-16 GKM10-20 8 8 12 12 16 20 6 6 8 8 10 12 8 8 12 12 16 20 8 8 10 10 12 18 5 5 6 6 8 10 4 4 6 6 8 10 6.0 8 8 9 9 12 14 7.5 7.5 6.5 6.5 13 13 4 4 6 6 8 10 6.0 6.75 6.75 9 10.5 Floating joint: Series JA In the case of dimension without C M M U U D F G B B E H C E P A (mm) M Max. operating tension and compression power (kN) Maximum screwed depth P Allowable eccentricity

5 Port Solenoid Valve

C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) [Communication connector D-sub] (76.8) (External pilot specification) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [