Compatible with series LEF , Possible to set position, speed and force (64 points) , Screw mounting or DIN rail mounting, CONTROLLER, PNP, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 2.86600 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2

Compatible with series LEF , Possible to set position, speed and force (64 points) , Screw mounting or DIN rail mounting, CONTROLLER, PNP, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 2.86600 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2

Compatible with series LEF , Possible to set position, speed and force (64 points) , Screw mounting or DIN rail mounting, CONTROLLER, PNP, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 2.86600 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2

Compatible with series LEF , Possible to set position, speed and force (64 points) , Screw mounting or DIN rail mounting, CONTROLLER, PNP, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 2.42508 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2

Compatible with series LEF , Possible to set position, speed and force (64 points) , Screw mounting or DIN rail mounting, CONTROLLER, PNP, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, .75587 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2

setting , Possible to set up an electric actuator operating without a PC or teaching box , Step motor (Servo/24VCD), CONTROLLER, STEP NPN, ACTUATOR, ELECTRIC ACTUATOR, IC, 25MM LE ELECTRIC ACTUATOR, 1.76369 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2

Cooling capacities: 8kW; Circulating Fluid: 60% ethylene glycol aqueous solution; Temperature range setting: -20 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 8kW; Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility); Temperature range setting: -20 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 2kW, 4kW, 8kW, 10kW; Circulating Fluid: tap water or DI water; Temperature range setting: 10 to 60°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 2kW, 4kW, 8kW, 10kW; Circulating Fluid: tap water or DI water; Temperature range setting: 10 to 60°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 8kW; Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility); Temperature range setting: -20 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 8kW; Circulating Fluid: 60% ethylene glycol aqueous solution; Temperature range setting: -20 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

10 to 60C (With no condensation and no freezing)Operating/Stored: 35 to 85%RH (With no condensation)10 to 500 Hz at whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, in X, Y, Z directions for 2 hrs. each (De-energized)980 m/s2 in X, Y, Z directions, 3 times each (De-energized)?3% F.S. or less1000 VAC for 1 min.

with series LEF , Possible to set position, speed and force (64 points) , Screw mounting or DIN rail mounting, LE ACTUATOR, NO SIZE RATING, ACTUATOR, ELECTRIC ACTUATOR, 2C, LE ACTUATOR, NO SIZE RATING, 0.5144 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [kg] Note 2)Speed [mm/s] Note 2)Max. acceleration/deceleration [mm/s2

slide bearing and ball bearing, Speed control/positioning: maximum 64 points, RoHS compliant, 16MM LE ELECTRIC ACTUATOR, ACTUATOR, ELECTRIC ACTUATOR, GC, 16MM LE ELECTRIC ACTUATOR, 3.60455 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [lb] Note 2)Pushing force [lbf] Note 3) 4)Speed [mm/s]Max. acceleration/deceleration [mm/s2

slide bearing and ball bearing, Speed control/positioning: maximum 64 points, RoHS compliant, 25MM LE ELECTRIC ACTUATOR, ACTUATOR, ELECTRIC ACTUATOR, IC, 25MM LE ELECTRIC ACTUATOR, 7.49571 lb, ModelActuator specificationsElectric specificationsLock unit specificationsStroke [mm] Note 1)Work load [lb] Note 2)Pushing force [lbf] Note 3) 4)Speed [mm/s]Max. acceleration/deceleration [mm/s2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns470 g3/8, 1/2

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns1,100 g3/4, 1

]Pushing speed [mm/s] Note 5)Positioning repeatability [mm]Screw lead [mm]Impact/Vibration resistance [m/s2] Note 6)Actuation typeGuide typeOperating temp. rangeOperating humidity range [%RH]Motor sizeMotor output [W]Motor typeEncoderRated voltage [V]Power consumption [W] Note 7)Standby power consumption when operating [W] Note 8)Momentary max. power consumption [W] Note 9)Controller weightType

25 to 85C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M or more (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?s, Rise time 1 ns650 g1/2, 3/4