Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12 R 1/8 14.3 33.4 18 18 19.4 26.3 12.8 35.6 20 20 21.9 28.5 15.2 37 33 33 18.4 27.8 10.4 18.2 37 33 33 19.4 27.8 12.8 29.8 34.8 35.8 40.8 18.5 17 R 1/4 39.6 35

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

Heat Resistant Reed Switch Series D-B3

35 42 8 8 59 85 1 2 Recommended minimum bending radius for lead wire RT : 25mm or more 120C : 50mm or more Terminal part Dimensions for Cylinder Mounting 59 Hs dimensions (mm) Cylinder model MDB 57.5 63.0 69.5 78.5 89.0 Bore size CDA1 58.5 64.0 71.0 79.5 90.0 40mm 50mm 63mm 80mm 100mm Hs Mounting cylinder part no.

Series LC7R Dedicated Regenerative Absorption Unit

Therefore, never connect it to other equipment as this may cause fire or malfunction. 200 Regenerative Absorption Unit Series LC7R Dimensions 52 97 35 38 Operation window 96 35 Label DIN rail holding plate 22 22 Connector Connection Examples Electrical wire Contact pin number Insertion side Cover O.D.: Max. 3.1mm (AWG18 to 20) [0.5m or less] Cover O.D.: Max. 3.1mm (AWG18 to 24) [1m or

MXH Series Compact Slide

20 20 50 55 25 25 82 6 60 30 92 60 30 6 33 MXH Series Compact Slide Dimensions 10 LT (mm) 11 19 11 LA LB J-M4 x 0.7 Depth 8 3-M5 x 0.8 through Bottom hole dia. 4.3 6-7.5 counter bore depth 4.4 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l 2-M5 x 0.8 Guide rail width 7 4-M4 x 0.7 Depth 7.5 4-M4 x 0.7 Depth 6 23 5 13 8 18 21.5 46 47 20 23 5 20 6.5 6.5 5 NS 12.5 13 11 7.5 35

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Recommended terminals NVFR 2000, 3000: 1.25-3, 1.25-35, '1.25Y-3N, 1.25Y-3S (1.25mm centers) (spade type, size 4, 22-16 AWG). . NVFR4000: 1.25-3.5M. 1.25Y-31. 1.25Y-3M. .

Air Cylinder NCA1 Series

: M14 x 1.5 piston rod diameter) 28 : 3/4-16 61 : M3 x 0.5 89 : M20 x 1.5 01 : 2-56 29 : 7/8-9 62 : M4 x 0.5 90 : M12 x 1.25 02 : 2-64 30 : 7/8-14 63 : M4 x 0.7 91 : M42 x 1.5 03 : 4-40 31 : 1-8 64 : M5 x 0.5 92 : M24 x 3.0 04 : 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35

Compact Cylinder with Air Cushion and Lock Series RLQ

38.5 32.5 31.5 40 37.5 41.5 38.5 42 36 35 50 43.5 47.5 44.5 48 42 41 63 50 54 51 54.5 48.5 47.5 17 Compact Cylinder with Air Cushion and Lock Series RLQ Operationg range Minimum Auto Switch Mounting Stroke (mm) (mm) Auto switch type Bore size 32 40 50 63 D-A7 D-A80 D-A73C D-A80C D-A9V D-A7H D-A80H D-F7 D-J79 D-F9W Number of auto switch D-F7WV D-F9WV D-F7BAVL D-F7V D-J79C D-F9V D-A7, A7H

Sine Rodless Cylinder Series REA

Load platform Load weight (Slider bracket weight + work piece weight) Guide shaft Cushion stroke Model REA25 REA32 REA40 REA50 REA63 Stroke (mm) (in) 30 (1.181) Work piece C 30 (1.181) 35 (1.378) 40 (1.575) Clearance (0.2 to 0.5mm) 40 (1.575) W The clearance C is determined by considering the cylinders self weight deflection and the amount of discrepancy with respect to the other shaft.

Vacuum Regulator Series IRV

U C S O H L 1 Series IRV Dimensions IRV1000 IRV2000 53 55 41 30 50 SMC 35 P K U C SMC S O H L P K U C S O H L 40 34 8 x 6.5 15.4 x 5.4 Approx. 106 Approx. 50.6 18 Approx. 79 Atmosphere Atmosphere 45.5 13 SET VAC SET G SET G 30 SET VAC 43 Pad side Vacuum pump side Pad side Vacuum pump side Approx. 43 35 2-Rc 1/8 Connection port 2-Rc 1/8 Vacuum gauge port 2-Rc 1/4 Connection port Approx. 60

LX Series Compact Electric Actuators

Power down inout Connecting method Connector Ambient temoerature 5 to 40'C Ambient humidity 35 to 85% (No dewinq) LXFH5S LXSHsS LXPBSS 'Set by tunciion change switch. Product is sel as shown below when shipped trom factoryCorresponding SCtualOr LXSH25 LXPB2S ON 1. ON: ExcitalionlHalf step 2.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5 36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35

Compact Vacuum Ejector Series ZQ

or condensation) Ambient humidity range 35 to 85 %RH in operation and saving (with no condensation) Withstand voltage 500V AC for 1 min Insulation resistance 50 M or more (between live parts and pressure port at 500V DC) Switch output 1 NPN output and analog output 1 PNP output and analog output 2 NPN outputs 2 PNP outputs Maximum load current 80 mA (per output) Maximum applied voltage 30

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Port size D A C IN OUT SMC G R B Q Set nut (Option) S P T N M Bracket (Option) Panel fitting dimension K J IN OUT L H P K U C S O H L to Plate thickness ARG20K to 40K: Max. 3.5 Standard specifications Accessory specifications Panel mount Bracket mount A Model Port size B C D E F G H J K L M N P Q R S T ARG20K ARG30K ARG40K 28 40 114 26.5 57 45 47 38 52.5 39.5 19.5 6 48 65 10.4 5.4 60 2.3 35

High Purity Chemical Valve

S) LLA3A 90 127 164 201 118 155 192 229 94 141 188 235 LLA4A 112 159 206 253 144 191 238 285 118 177 236 295 LLA5A 140 199 258 317 178 237 296 355 (mm) Dimensions A B C E G H K M U N P Q R V W Y Model LLA2A LLA3A LLA4A LLA5A M5 x 0.8 M3 x 0.5 50 31 68 20.5 41.5 13 18 4.5 34 35 Rc 1/4, NPT 1/4 19 M4 5.5 47 37 88.5 25.5 52.5 17.5 39 5.5 42.5 51.5 Rc 3/8, NPT 3/8 23.5 M5 6.5 Rc 1/8 NPT 1/8 Rc

CV/MVGQ

A B C D F H HX MM NA NB ND S Z 90 [91] NN Bore size (mm) 10 8 0 0.022 10 0 0.022 15 12 14 4 8 28 35 M4 x 0.7 12.5 9.5 46 M8 x 1 91 [92] 16 15 18 20 5 8 28 41 M5 x 0.8 12.5 9.5 47 M10 x 1 10-15-7 Series CVJ5 Axial Foot Style (L) CVJ5L M5 x 0.8 M5 x 0.8 53.5 [54.5] 28 [34.5] M5 x 0.8 Manual override Width across flats B1 16 [17] S + Stroke Z + Stroke Mounting hole Rod End Nut H1 B1 Bore

IZx-OMV0005

load current: 40 mA Residual voltage: 1 V or less (Load current at 40 mA) Maximum applied voltage: 26.4 VDC Maximum load current: 40 mA Residual voltage: 1V or less (Load current at 40 mA) Output signal Error signal Maintenance signal Effective static neutralization distance 20 mm to 500 mm Ambient temperature During operation/storage 0 to 55 oC Ambient humidity During operation/storage 35

OML0002-C

Where ambient humidity exceeds 35 to 65% RH. c. Where dew condensation is generated due to sudden temperature change. d. Where there is corrosive gas, inflammable gas, or where volatile inflammable substances are stored. e.

MICRO MIST SEPARATOR

DIMENSIONS (Accessory) (Port size) Maintenance space Drain Dimensions Model Standard specifications 1/81/4 1/43/8 1/43/81/2 , AFD20-A 40 87.6 9.8 20 45 AFD30-A 53 115.1 14 26.7 30 50 AFD40-A 70 147.1 18 35.5 38.4 75 AFD40-06-A 75 149.1 20 35.5 38.4 75 3/4 Model Bracket mount dimensions AFD20-A 30 27 22 5.4 8.4 40 2.3 28 AFD30-A 41 35 23 6.5 13 53 2.3 30 AFD40-A 50 52 26 8.5 12.5 70 2.3