IDX-OM-W014

(Ex.) 1. 2. 3. 4. 14-2 IDU3E/4E/6E-23-V IDF-S0198 1.6MPa AC230V10% (50Hz) ON 0.5 OFF 30 14-1 IDU Series 141 IDX-OM-W014 14 V 14-3 1) 2) 3) 4) ON OFF 4 6 2 3 8 4 2 1 10 0.5 5 0.5 ON:SEC OFF:MIN 14-4 1-1 IDU Series 14-3 142 IDX-OM-W014 15 15 15-1 / IDU Series 15-1 15-1 C2021/11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298

IDX-OM-W023

(Ex.) 1. 2. 3. 4. 14-2 IDU8E/11E/15E1-23-V IDF-S0198 1.6MPa AC230V10% (50Hz) ON 0.5sec OFF 30 IDU Series 141 IDX-OM-W023 14 V 14-3 1) 2) 3) 4) ON OFF 4 6 2 3 8 4 2 1 10 0.5 5 0.5 ON:SEC OFF:MIN 14-4 1-1 IDU Series 142 IDX-OM-W023 15 15 15-1 / IDU Series 15-1 A2020/1 B2021/5 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Tel: +81 3 5207

IDX-OM-W029

3. 4. 12-2 IDU22E/37E-23-V IDU55E/75E-23-V IDF-S0198 IDF-S0302 1.6MPa AC230V10% (50Hz) ON 0.5sec 2.0sec OFF 30 IDU Series 121 IDX-OM-W029 12 V 12-3 1) 2) 3) 4) ON OFF 4 6 2 3 2 1 8 4 10 0.5 5 ON:SEC OFF:MIN 0.5 12-4 V 6-4 6-3 T 11-6 11-3 IDU Series 122 IDX-OM-W029 13 13 13-1 / IDU Series 13-1 13-1 B2022 9 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IDX-OM-U010

Description Contents of check Date IDFC60/70/80/90 Series 13.1 Inspection record 13-1 Revision Rev HApr,2023 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2023 SMC Corporation All Rights Reserved

IDX-OM-W095

230V50Hz BU BR YE OR G/Y / IDFC60/70/80/90 Series 11-4 IDX-OM-W095 V 12 V V 12.1 0 () 12.2 ( 10m) (12mm) IDF-S0534 1.6MPa ON 0.510 OFF 0.55 IDFC60/70/80/90 Series 12-1 IDX-OM-W095 V 12.3 TEST TEST OFF ON OFF ON 6 4 3 2 2 1 8 4 0.5 10 5 0.5 min s IDFC60/70/80/90 Series 12-2 IDX-OM-W095 13 13.1 / IDFC60/70/80/90 Series 13-1 A: 2023/4 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IDX-OM-V020

Description Contents of check Date IDFA60/70/80/90 Series 14.1 Inspection record 14-1 Revision Rev FOct,2019 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

IDX-OM-W053

(Ex.) 1. 2. 3. 4. 15 1 15 V 15-2 ON0.5 OFF30 IDF-S0405 1.6MPa ON 0.5 OFF 30 6-3 14-3 15-3 1) 2) 3) 4) ON OFF 4 6 2 3 2 1 8 4 10 0.5 5 ON:SEC OFF:MIN 0.5 15 2 16 16 16-1 / 16 1 A2021/5 B2022/1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without

IDX-OM-W031

Description Maintenance/Service Work Description Date IDFA Series 13-1 Service Record 13 1 Revision Revision ANov.2019 Revision BMay.2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation

IDX-OM-W032

IDX-OM-W032 12 V 12-2 Drain tube (O.D. 10m) (10) IDFA22E,37E,55E,75E-23-V IDF-S0198 1.6MPa AC230V10% (50Hz) ON 0.5sec OFF 30sec IDFA Series 12-2 122 IDX-OM-W032 12 V 12-3 1) 2) 3) 4) ON OFF 4 6 2 3 2 1 8 4 0.5 0.5 5 ON:SEC OFF:MIN 12-4 R 6-4 6-3 T 11-6 11-3 IDFA Series 12-3 123 IDX-OM-W032 13 13 13-1 / IDFA Series 13-1 13-1 D:2021/11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IDX-OM-N030

Description Maintenance/Service Work Description Date 7.1 Service Record 7 1 IDFA100F 150F Revision Rev HNovember,2020 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights

IDX-OM-U022

6.5 IDX-OM-U022 6. 6.6 (1 ) () IDF-FL219 (IDFA100F,125F ) 1 IDF-FL220 (IDFA150F ) 1 ADH-E400 (V ) 1 () 1 B 20,000 (6 ) 1 B 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 2 (IDF150F3) A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 12 /JEMA 300 A B IDFA100F150F 6 9 6.6 IDX-OM-U022 7. 7 7.1 / IDF100150F 7.1 7 1 A2020 11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IDX-OM-V024

Description Contents of check Date IDFB60/70/80/90 Series 13.1 Inspection record 13-1 Revision Rev FOct,2019 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

IDX-OM-W034

Description Maintenance/Service Work Description Date IDFB Series 13-1Service Record 13 1 Revision Revision ANov.2019 Revision BMay.2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation

IDX-OM-W035

IDFB22E-11-V IDFB22E/37E-23-V IDFB55E/75E-23-V IDF-S0199 IDF-S0198 IDF-S0302 240psi (1.6MPa) AC115V10% (60Hz) AC230V10% (60Hz) AC230V10% (60Hz) ON 0.5sec OFF 0.5min 12-3 ON OFF 4 6 2 3 2 8 1 4 10 0.5 5 0.5 ON:SEC OFF:MIN 12-4 V 6-4 6-3 T 11-6 11-4 12-2 IDFB Series 12-2 IDX-OM-W035 13 13 13-1 / IDFB Series 13-1 13-1 A2019/11 B2021/5 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

IDX-OM-W038

TC M C PLC THS M C OLR PTC CM PLC PTC C01 CM IDH6-10 TC IDH6 / IDHA6 TS M C F H SSR FM PRS P FM 1 IDH6/IDHA6 IDH6 / IDHA6 IDH6/IDHA6 IDH6 / IDHA6 CM FM OLR PRS ILS PTC PTC() MC THS TB TC TS SSR H F GFCI PLC 64 IDH Series IDX-OM-W038 . 6.4 6.3 IDH6 / IDHA6 1 65 IDH Series 6.4 IDX-OM-W038 7 7 7-1 / IDH Series 7-17-1 7-1 D2022/7 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

AMX-OM-R001E

Standard Compressed air outlet Applicable tube O.D. 6 Compressed air inlet Applicable tube O.D. 6 Option P Purge air outlet for dehumidification Applicable tube O.D. 6 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

Membrane Air Dryer

B: Correction of specification column 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

Membrane Air Dryer

. -6- Revision history A: Changes to Maintenance and Checks B: Correction of specification column. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All Rights Reserved

AMX-OM-Q015E

Option: S (for IDG3, 3H, 5, 5H) -6- Revision history A: Changes to Maintenance and Checks B: Correction of specification column 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All

AMX-OM-Q018E

Option: S (for IDG3, 3H, 5, 5H) -6- Revision history A: Changes to Maintenance and Checks B: Correction of specification column 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2018 SMC Corporation All