VCW

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

COQ2BP

[I (mm) c l BonI.1iIi (mm) A L[) R N X Y LG L 0 ~ t::;r H LH L1 . 50s 107 .2 15 39 18 9 5 Ml0Xl.S 14.7 43.5 MSl(l .25 14 M8x 1.25 B 15 46 18 Ml0xl.5 16.2 43.5 Ml0xl .5 18 9 11 5 Ml0Xl.5 63 112.7 M12xl .75 22 M12xt.75 19.5 11 53.5 13 7 MI6X2.0 59 20 21 80 133 .5 Rod Side Flange: COQ2FP 0-0 OM-DO 4-oFO 40 Thread d Ih A SpeCIal cap bolt 4-N . rBote size A L 0 R N FD FT FV FX F2 Ll H C !

VEX1

5.1-24 VEX3 Manifold/VVEX2 VVEX2Applicable valve: VEX3220/3222 1 2 Valve mounting side Internal pilot Common external pilot L: Dimensions n Equation L1=31n+29, L2+31n+14 n: Station 2 91 76 3 122 107 4 153 138 5 184 169 6 215 200 7 246 231 8 277 262 L L1 L2 5.1-25 VEX3 Manifold/VVEX4-1 VVEX4-1 Applicable valve: VEX3420/E3422 VVEX4-2 Applicable valve: VEX3420/E3422 Valve mounting side Internal

CLQ

2".

VP300/500/700

Y: 4.5 to 7 D: 6 to 8 78.3 2(A) 2(A) 63 19 (A port) Rc1/2 Stations L L1 L2 Formula L1 = 41 x n + 33 L2 = 41 x n + 17 9 402 386 10 443 427 2 115 99 3 156 140 4 197 181 5 238 222 6 279 263 7 320 304 8 361 345 : With light/surge voltage suppressor ( ): Dimensions for external pilot 4-8-15

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

) (44) W T R (Y) Z T 25 IN port 2-3/8 l=280 l=300 (V) (X) 2.5 (N) (U) E C D G Q S A C B L1 L2 16 L3 D side U side Stations 1 2 3 4 5 n 21 16 H H P=J (Pitch) OUT port n-1/4 n-1/8 2 5.5 : Thread type L dimensions (mm) n (stations) Model Dimension 4 3 5 9 2 6 10 7 8 138 103.5 172.5 310.5 L1 69 207 345 241.5 276 VV2CW2 150 115.5 184.5 322.5 L2 81 219 357 253.5 288 162 127.5 196.5 334.5 L3 93

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

30 M8 x 1.25 x 6L 6 30 1 Z 2-6.9 through 2-11 counter bore depth 6.3 28 (Hexagon socket head set screw) 1 600.2 600.2 3 5 80 78 64 6.3 5 14 2-M6 x 1 (Through-hole) M6 x 1 x 18.5L and M6 x 1 2-M5 x 0.8 Thread depth 7.5 (Hexagon bolt)(Hexagon nut) M6 x 1 x 14L (Hexagon socket head cap bolt) 2M5 x 0.8 thread depth 4.5 Note) (Opposite side: Same) (Z) 30 8M5 x 0.8 thread depth 7.5 (Opposite side

HRX-OM-X037

(IEC 60417-5032-1) How to see the serial number Z R 001 APR 2021 Z R 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2021 Z Repeated from A to Z in alphabetical order 1 o Repeated from O to Z in alphabetical order, with O for January and Z for December 2022 A 2 P 2023 B 3 Q Fig. 1-1 Position of the product label HRL Series 1.4 Product Label 1-3 HRX-OM-X037 Chapter 1 Safety Instructions

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

How to Order B 32 30 D C CQ2Y Standard B F9BW S 32 30 D C CDQ2Y With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

Micro Mechanical Valve Series VM1000

N F.O.F. 2 x 1 8 3 x 1 4 P.T.

VK3000

Applicable cable O.D. 3.5 to 7 (Reference) 0.5 mm2 2 core and 3 core wires equivalent to JIS C 3306 24 V No.2() Black() 48 V No.1 Diode DC None Z Coil LED No.2 No.1 S Coil Coil Varistor Varistor 6 V No.2 12 V No.1 DC None Z Coil No.2 Precautions on connection for 24 VDC or more Grommet type should be connected as following; Red lead wire for (+) side, Black lead wire for () side respectively

3 Port Solenoid Valve/

release valve X538 VP 4 1 5 4 R 5 D Z 03 M A Dual residual pressure release valve with soft start-up function X555 VP 4 1 5 4 5 D Z 03 M Throttle Thread Series Nil Variable throttle 10 1 xed orice 15 1.5 xed orice 20 2 xed orice Nil Rc F G N NPT 5 VP500 7 VP700 Body 2 Body ported 4 Base mounted VP700 only Note) X536 only body ported (option2).

Heavy Duty Stopper Cylinder Series RSH/RS1H

metal piping), Max. 100m 4 M5 x 0.5 Tightening nut Washer with teeth E2E-X2D1-N (For RS1H50, 63, 80) 13 7 30 26 Vinyl insulation round cord 3.5 (18/0.12), 2-wire, Standard 2m, Cord extension (Individual metal piping), Max. 200m Indicator light Tightening nut M8 x 1 Washer with teeth 3 Output Circuit E2E-X1C1/3-wire E2E-X2D1-N/2-wire Brown (Red) Brown (White) +V +V Load 100 Load Black (White

VK3000

Make sure not to plug the exhaust port R. 1 8 VK3140 Base mounted 1 8 130 (with sub-plate) VK3140Y (For low wattage 2 W DC) 0.50 0.12 0.11 0.48 0.19 0.12 Plug position B port N. C. A port N. O.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Z (Example) F9BZ D-F9BA is available only as "L". Auto switches marked with a "" symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches. Note 2) Refer to pages 53 through 65 for detailed auto switch specifications. Cylinder Bore Size MHS 2 D 50 32 to 63 Y59A Number of auto switches Nil S 2 pcs. 1 pc.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

MHR3-10R/MDHR3-10 MHR3-10R/MDHR3-10 10 10 Pressure 0.6 MPa Pressure 0.6 MPa 8 8 Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 6 6 0.4 MPa External grip 0.4 MPa 4 4 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 2 2 0 10 20 30 40 50 0 10 20 30 40 50 L Gripping point L (mm) Gripping point L (mm) Internal grip MHR3-15R/MDHR3-15 MHR3-15R/MDHR3-15 20 20 Pressure Pressure 0.6 MPa 0.6 MPa Gripping force

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 4-13-8 9 3 Port Direct Operated Poppet Solenoid Valve Series VKF300 Base mounted Common SUP

VK300

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP VG VP (Pitch) n-Rc 1/8 (R port) S070 VQ L Dimension n: Stations VKF n L 20 399 388 19 380 369 18 361 350 17 342 331 16 323 312 15 304 293 14 285 274 13 266 255 12 247 236 11 228 217 10 209 198 9 190 179 8 171 160 7 152 141 6 133 122 5 114 103 4 95 84 3 76 65 2 57 46 1 38 27 L1 L2 VQZ VZ VS VFN 4

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

OFF n-1 n-2 Real-time flow rate Error correction Window comparator mode H : Hysteresis Note1) "n" LED display Contents Solution H H ON A current of more than 80mA is flowing to OUT1 Check the load and wiring for OUT1 NO OFF n-2 n-1 Real-time flow rate Note1) Output mode is set to inverted output at the factory before shipment. The setting data has changed for whatever reasons.

SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Vertical connector 2: Horizontal connector P: Positive common N: Negative common 1 2 1 2 P N D side SZ3000-40-2A-D For D-sub connector SZ3000-40-1A-D 1 2 1 2 P N D side SZ3000-40-4A-D For flat cable 26 pins SZ3000-40-3A-D Note) The assembly part numbers with power supply terminals are 24VDC specifications