MHZ

6 Lever Type C snap ring Heat treated Electroless nickel plated Stainless steel Brass r !7 Guide Exhaust plug Stainless steel Heat treated Polyvinyl formal t !8 Finger Exhaust filter Stainless steel Stainless steel spring wire y !

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

DA H V R T VW PW ! CV !

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

33.3 44.9 45.5 20.1 46.9 19 18.2 24.3 41.9 40.6 35.6 R 3/8 50.4 25.5 36.1 55.6 24 22.3 28.5 50.6 47.4 42.4 R 1/2 Note) Reference dimensions of thread M5, R after installation.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

B Model MHR2-30 MDHR2-30 B 25 25.5 7 7 10 10 12-5-17 18 3 Finger Rotary Actuated Air Gripper Series MHR3/MDHR3 Size: 10, 15 How to Order Connecting port Body side R MHR 3 10 R Without auto switch R: Body side Port With auto switch (Built-in magnet) MDHR 3 10 R M9N S Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

MHZ

6 Lever Type C snap ring Electroless nickel plated Stainless steel Heat treated Brass r !7 Guide Exhaust plug Stainless steel Heat treated Polyvinyl formal t !8 Finger Exhaust filter Stainless steel Stainless steel spring wire y !

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

VT307

Air flow direction: Port P Port A , Port R Block Component Parts Operation principle Spool valve w is pushed upward by the return spring e, port P is closed, and then port A and port R are opened. Air flow direction: Port P Block, A R VT DIN terminal and terminal (with light/surge voltage suppressor) are connected inside as in the figure below.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position) 196 (3 position) 77.5 Bottom ported M12 connector L: Dimensions n: Stations 141.5 L n 1 Formula

Pressure Relief 3 Port Valve With Locking Holes

VH*-OMQ0023-C PRODUCT NAME Pressure Relief 3 Port Valve With Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS30-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS40-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS40-(F,N)06A,B(-B,S)(-K,R,Z) VHS50-(F,N)06~10A,B(-B,S)(-K,R,Z) VHS2510-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS3510-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS4510-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS4510-(

CE

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

VG342

Note 2) Cable (7) external: 6 to 8 mm y t r e How to Calculate the Flow Rate 3.

Vacuum Pad

Applicable pad Applicable pad Applicable pad 015U/02U/035U 04UM/06UM/08UM/04B/06B/08B 10UM/13UM/16UM/10B/13B/16B R R R R R R R 1.4 3.5 1.8 4 R R R R R 1.5 0.8 R 5 3 1.8 6 4 1.8 0.4 1.5 2 Note) R part has to be smooth with no corners.

Vacuum Pad

Applicable pad Applicable pad Applicable pad 015U/02U/035U 04UM/06UM/08UM/04B/06B/08B 10UM/13UM/16UM/10B/13B/16B R R R R R R R 1.4 3.5 1.8 4 R R R R R 1.5 0.8 R 5 3 1.8 6 4 1.8 0.4 1.5 2 Note) R part has to be smooth with no corners.

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Series VCL

R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M

Series VCS

R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

-- NCM seies

-r I tt""d lii9;--1@_*_1aru" l . 6 l y ' | t Fiif_ilri v *r T f l l T r I L---+---J-J--fo O Series NCM Auto Switeh Mounting Position aAuto $vidr Placemer* dr|lsidrs D-85, 86 Type Front Nose Mounting type Auto switch Auta Swifuh Pkrcement Dfinensions 0.97 1.03 1 . 1 2 1.22 1.35 '( ) are for Front Nos Mounting type cylinders.

S

U N N I O N P I N d m t Part No Bore Size D L l .095 0.03 0.018 NCT-P006 6 (1/4) .125 0.81 0.70 .147 0.04 0.029 NCT-P010 10 (3/8) .188 0.94 0.81 .147 0.04 0.029 NCT-P015 15 (5/8) .188 1.25 1.11 S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT REQUEST CATALOG REFERENCE N300 DETAILS OF YOUR LOCAL SALES OFFICE

1.1

[Piping adapter] AP IDF Size Applicable Thermo-cooler Thread type and port size Symbol Material Quantity per set Female side B Male side A HRG001HRG002HRG005HRG010HRG015NPT 1/2 R 1/2 601 Copper alloy 2 HRG010HRG015603 NPT 3/4 R 3/4 Note) Refer to page 33 for dimensions.