Air Volume: Rapid Deionizing Type, 0.66m³/min, Output: P (PNP Output), Power Supply Cable, AC Adapter: Power Supply Cable, 3m, Bracket: B (Bracket)

Size: 20, Sensor: None, AC Adapter: None, Option: P (With Dust Collecting Bag)

Type: Bar Type, Indicator: Not Provided, Additional Function: Error Signal Output, Air Flow/Consumption Amount(m³/min): -, Ion Balance: ±30V, Ion Balance Adjusting Function: Automatic, Operating Pressure Range(MPa): null～0.7, Power Supply: DC24V, Accessories/options: ordered separately: Power supply cable included (3 m) / with bracket, I/O specifications: PNP output, Bar length

Type: Fan Type, Indicator: Error, Additional Function: Air Volume Adjustment / Error Signal Output, Air Flow/Consumption Amount(m³/min): 0.19 to 0.80, Ion Balance: -, Ion Balance Adjusting Function: Manual, Operating Pressure Range(MPa): -, Power Supply: DC24V, Accessories/options: ordered separately: With power supply cable (3 m) / With bracket, I/O specifications: PNP output,

Model: 21 (1.8 m³/min), Input/Output: P (PNP, Input, Output), Power Supply Cable, AC Adapter: w/Power Supply Cable, 3m, Bracket: B (w/Bracket)

Model: 31 (4.4 m³/min), Input/Output: P (PNP, Input, Output), Power Supply Cable, AC Adapter: w/Power Supply Cable, 3m, Bracket: B (w/Bracket)

Model: 1.8 m³/min, Input/Output: PNP, Input, Output, Power Supply Cable, AC Adapter: w/Power Supply Cable, 3m, Bracket: w/Bracket, Automatic Cleaning Unit, Louver: -, Filter: -

Model: 4.4 m³/min, Input/Output: PNP, Input, Output, Power Supply Cable, AC Adapter: w/Power Supply Cable, 3m, Bracket: w/Bracket, Automatic Cleaning Unit, Louver: -, Filter: -

Size: 20, Sensor: None, AC Adapter: None, Option: With Dust Collecting Bag

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

CRB1BW635 0.030 0 5 0.030 25 0 83 60 PORT 4-R7.5 Top ports (port position): CRB1BW63-SE, CRB1BW63-DE 75 0 0.052 28h9 17 0.006 0.017 15g6 5 B port B port 25 45 80 21 When the B port of body (B) is threaded, it is closed with a Rc 1/8 plug. 3 14 3 14 29 22 Body (B) 15 Body (A) 2-Rc 1/8 A port 14 14.9h9 0 0.043 12 15g6 0.006 0.017 28h9 0 0.052 25 A port B port 75 2-Rc 1/8 8 (8) 82 27

LEC-OM005xx

Table b.2 Condition that the file can be loaded The caution screen, when the file cannot be loaded.

70pvvna

B (9.5) B (12.7) B (19.1) B (25.4) B (31.8) B (38.1) B (50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 3 8 1 2 3 4 10A 15A 20A 25A 32A 40A 50A 1 2 VNA01 VNA02 VNA03 VNA1 Port 12 (P1) 1 1 1 2 External pilot External pilot External pilot External pilot External pilot Pilot exhaust Bleed port Bleed port 1 4 1 2 10 (P2) Installing a silencer to the

Magnetic Field Resistant 2-color Indication Type Solid State Auto Switch

B: Addition of D-P3DWA Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved No.D-#S-OML0002-B

Heat Resistant Solid State Auto Switch

No.D-S-OMS0002-B

VFR6000 Series

B side 3 COM (1) Ground Position Model Left Center Right (1) (3) VFR610 A side COM (2) VFR620 A side COM B side 3 VFR640 5 A side COM B side Can be used as either +COM or -COM. Applicable terminal: 1.25-41.25-4M A side terminal block B side terminal block A side B side 8 VFR6000-OMA0001-B VFR6000 Series Specific Product Precautions 2 Be sure to read before handling.

Air Filter

AF-OMX0052-C PRODUCT NAME Air Filter MODEL / Series / Product Number AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D AF50-(F,N)06(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF60-(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2.

Line filter

With drain With drain With drain With drain With drain gauge guide cock guide cock guide B B B B B B B B B AFF20 159. 6 159. 4 146. 1 142. 1 148. 6 AFF30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AFF40 263.3 265.1 265.1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: August 2021 Addition

Micro Mist Separator

With drain With drain With drain With drain With drain gauge guide cock guide cock guide B B B B B B B B B AMD20 159. 6 159. 4 146. 1 142. 1 148. 6 AMD30 219. 8 219. 8 219. 8 186. 6 184. 9 180. 6 185. 1 200. 6 205. 1 AMD40 263. 3 265. 1 265. 1 232 230. 3 225. 9 230. 4 245. 9 250. 4 -31- Revision history Revision A: September 2020 Addition of the Series 20 and 40 Revision B: August 2021 Addition

Mist Separator

AF-OMX0053-B PRODUCT NAME Mist Separator MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

Micro Mist Separator

AF-OMX0054-B PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AFD20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFD30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFD40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.