SFOD-OMT0011CN

SFOD-OMT0011 2015 7 2016 3 A 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2016 SMC Corporation All Rights Reserved No.SFOD-OMT0011CN-A

SFOD-OMT0008

SFOD-OMT0008 First edition: June 2015 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved No.SFOD-OMT0008

Controller setting Software (ACT Controller)

. -29JXC-OMU0010-A Revision history : First edition [Oct 2016] A : Contets revised in sevrral places [Mar 2020] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2016-2020 SMC Corporation All Rights Reserved

Controller setting kit Software (ACT Controller) version upgrade procedure

Confirm that Version 1.2.0.0 is displayed. 11 - Revision history No.LEC-OM04901 April/2012 1st printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved 12 -

AC Servo Motor Driver (Parameter Configuration using Setup software (MR Configurator2 TM ))

./2015 2nd printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved 13 -

AC Servo Motor Driver (Parameter Configuration using Setup software (SigmaWin+ TM ))

For the saving parameters from SigmaWin+ to file destination, refer to Section 4.4. 4 6 5 7 19 - Revision history No.LEC-OM09601 Sep/2015 1st printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

LA-OMT0056

Otherwise, it may lead to a Return to Origin error. 20 - Revision history 1st printing: Revised in November 2015 A: Revised in November 2019 B: Revised in June 2020 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the

OMR0031

connected to the Select the COM port to which the communication COM port which has been communication cable is connected using the configuration software. cable is connected selected in the configuration is wrong. software. 95 - Revision history A: Revised in November 2015 B: Revised in November 2019 C: Revised in June 2020 D: Revised in January 2022 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Card Motor Controller Controller Setting Software for LATCA （ For Windows®7 ）

Refer to SMC website for version update information. https://www.smcworld.com/ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Card Motor Controller Controller Setting Software for LATCA (For Windows®8.1)

Refer to SMC website for version update information. https://www.smcworld.com/ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Card Motor Controller Controller Setting Software for LATCA （ For Window ®10 ）

Refer to SMC website for version update information. https://www.smcworld.com/ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Vacuum Manifold for fieldbus system

ZKJ-OM00201-D Revision history A: Added contents[April 2022] B: Added UKCA marked[July 2022] C: Added specifications[September 2022] D: Added specifications[February 2023] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part

SI Unit for Vacuum Manifold

. -40No.EX-OMZ0018 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved. No.EX-OMZ0018

ZK2-C

500 kPa 0.1 kPa DC24 V 10(p-p)10() 40 mA NPN PNP OUT1OUT2 80 mA DC26.4 V 2 V (80 mA ) 2.5 ms (20,100,500,1000,2000 ms ) 0.2F.S. 1 digit 1 0 3 1/2 7 LED 2% F.S.1 digit(253 ) ON OUT1 OUT2 IP40 550 AC1000 V 1 50M (DC500 V ) 2F.S.550 25 5 3.52 m 0.15 mm2(AWG26) 1.0 mm CE RoHS 1 -52NO.ZK2-OM00801-B Revision history A: OUT2 B: 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

ZL3-OM00801

No 1 2)3) 4) 5)6) 6) 5)6) 7) O 8) 9) 10) 11) 12) 13) 1 2)3) 4) 14) 15) 10) 11)16) 28 No.ZL3-OM00801-A No 1 ON 10 2) 3) 4) 5) 6) 7) 8) O O 9) 10) 11) 12) 13) 14) 15) ON/OFF 16) 29 No.ZL3-OM00801-A Revision history AUKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com

Digital pressure switch for energy-saving control ejector

3.5, 2 m Lead wire Sectional area of conductor: 0.15 mm2 (AWG26) Outside diameter of insulator: 1.0 mm Standard CE/UKCA marking, RoHS A 1: If the applied pressure fluctuates around the set value, the hysteresis must be set to a value more than the amount of fluctuation or chattering will occur -54NO.ZL3-OM00701-A Revision history A UKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Digital pressure switch for energy-saving control ejector

B: UKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2022 SMC Corporation All Rights Reserved No.TQ0010298-OM003-B

Digital pressure switch for energy-saving control ejector

ZQ-OM01501 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

ZQ-OM01601

-100.0 kPa 105.0-105.0 kPa 500 kPa 0.1 kPa DC24 V 10(p-p)10() 40 mA NPN PNP OUT1OUT2 80 mA DC26.4 V 2 V (80 mA ) 2.5 ms (20,100,500,1000,2000 ms ) 0.2F.S.1 digit 1 0 3 1/2 7 LED () 2% F.S.1 digit(253 ) ON OUT1 OUT2 IP40 550 AC1000 V 1 50 M(DC500 V ) 2FS 55025 5 3.52 m 2(AWG26) 0.15 mm 1.0 mm CE RoHS 1 51 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

MHx-OMY0001

. -18- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved 19 -