ITV

, Hyteresis Repeatability With 50% of signal input 1 0.8 1 Output deviation factor (% F .S.)

Step Motor Controller (Servo / 24 VDC)

Completed to move to 10mm away. 44 - 9.2 Pushing operation Example) Move the electric actuator from the origin to 100mm point with 100mm/s. (Using Step No.1) From the 100mm point, the electric actuator starts the pushing operation of 10mm/s speed and 50% or less force (the pushing distance is up to 5mm).

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

HRL

After the machine has stopped, make sure to turn off the breaker of the users equipment (on the upstream side). 2 h 1 h 30 min 20 min 14 min 10 min 6 min 4 min 2 min 1 min Operating time 30 s 20 s Max. 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 135 200 300 400 500 600 700 1000 1500 2000 3000 4000 Current (% for chiller main breaker volume) 341 HRL Series Specific Product

Lightweight and Compact

20 s Max.

Compact manifold regulator ARM5 Series

X 5.5 L3=50+R+V L4=50+T+X 50 SMC H H L L S S O O U U C C P P K K R 8 S U 57 (at knob locked) DIN rail part no.

Micro Mechanical Valve Series VM1000

VHS 2317 Series VZM400 How to Order 0 VZM45 01 01 S Made to Order (Refer to pages 2342 to 2345 for details.)

RSQ

4-O counterbore 2-N through MK(2) X F Stroke Q 2-P Y RS Q G RS H A G D T RZQ U W V L M MI W S 10 (11) 20 (22) H + Stroke B + Stroke A + 2 stroke Workpiece transfer direction CEP1 CE1 32 40 50 RSQB -R Bore size: 32, 40, 50 CE2 Stroke Q F Z 2-P X ML2B S J I C J G5-S W E D T G CV U L V MVGQ 10 (11) 20 (22) M 0.2 E B + Stroke H + Stroke 4-N through 8-O counterbore CC A + 2 stroke RB Built-in

Digital Flow Switch (Integrated display type) ( compatible)

Digital filter 6 Select from 0.5 s/1.0 s/2.0 s/5.0 s/10.0 s/15.0 s/20.0 s/30.0 s Enclosure IP65 Operating temperature range 0 to 50 oC (No freezing and condensation) Environment Operating humidity range Operation, Storage: 35 to 85%R.H. (No condensation) Withstand voltage 7 1000 VAC, for 1 minute between the terminals and housing Insulation resistance 50 M min.

Digital Flow Switch (Integrated display type) ( compatible)

Digital filter 6 Select from 0.5 s/1.0 s/2.0 s/5.0 s/10.0 s/15.0 s/20.0 s/30.0 s Enclosure IP65 Operating temperature range 0 to 50 oC (No freezing and condensation) Environment Operating humidity range Operation, Storage: 35 to 85%R.H. (No condensation) Withstand voltage 7 1000 VAC, for 1 minute between the terminals and housing Insulation resistance 50 M min.

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

ITV_P-E

ZERO CLEAR" (refer to P14) (displayed alternately) Press S-key To "INITIALIZE" (refer to P14 In state of , press S-key for 2seconds or more.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

"#$ S Q J K E B ! "#$ A !

Low Friction Cylinders Series MQ

hole H10 CI 10 -0.1 -0.2 14 H 30 S + Stroke Z + Stroke 9 ZZ + Stroke (mm) Bore size (mm) S CI Z H ZZ 20 24 97.5 168 40.5 177 25 30 102.5 177 44.5 186 1186 Lateral Load Resisting Low Friction Cylinder Metal Seal Series MQM Refer to the basic type on page 1184 for other dimensions.

Plate Cylinder

M Z MU B 25 10 S S Z M M9BW MDU With auto switch With auto switch (Built-in magnet) Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

T) LVQ LQ (mm) Dimensions PB LVN T U Model LVD2-S LVD3-S LVD4-S LVD5-S PA 28 9.6 TI/ TIL 34 17.5 A B 35 20 U PA 57 25 PAX With flow rate adjustment & by-pass PB (Max. S) (Max.

asilltr

Female lhread length {"1') is shonerfor the lollowing . 2o0 (2') 1/g & 1A st. 1/s & 1/a st. r/s & 1/a st. l=o.44 25O (2112')' I/s st. r/s st. '/s stl=0.44 300 (3") ]/s & 1/a st. 1/e &r/l st. 1/e & 1A st. 400 (4) 1/s &1/a st. r/s & 1/a st. 1/e &14 st. Series NCQT Dimensions Spring Extend NCQTBO-OT T Type Bore,, 9t4,F' I 60re ,b,:!

Air Catch Sensor Series ISA

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 3 0 3 0 3 0 Regulator 3 0 3 0 3 0 Supply port P P P T T T U U U E E E L L L Supply port S S S L L L P P P T T T U U U E E E L L L S S S L L L 6 9 6 9 6

Guide Cylinder Series MGG

50 to 1000 mm/s Rubber bumper Basic cylinder MGQ Cushion Built-in shock absorbers (2 pcs.)

DOC1020530

After 1.6 s Blinking After 0.2 s When an alarm or warning also occurs during the test operation, the decimal point on the first digit will blink as follows. After 0.8 s After 0.8 s Blinking Blinking After 0.2 s (4) Start operation with the PC. -21- 5.2 JOG Mode JOG operation can be executed without host command.