Read carefully the Chapter 6 Troubleshooting before taking actions. Do not start the product in any trouble.
(H) < In Caee ot B:lT) 0 18 (4.5) Oia 6 6 i=o.ar (ro.5i0a5(115) TUpe 532,r Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NVVsJ3-532staiions -M5, B3T \ | s l ATTI T \i.1 J_ 19 1 e : 9 6 t ' ' i 5 _ 3 ^i :n l ' g r018 (4 5) oLa 11.81 {300) Stationsn) 2 3 5 6 7 a 9 1 0 l1 12 13 a4 '15 16 17 1a 't9 20 L1 1.63 2.05 (41.5) (b2) 2.45 (62.5) 2.47 (731 3.29 3.70 (835) (s4) (104 5)
(mm) 6 tube M14 x 1 20 to 50 8 tube Ball joint rotation 15 Buffer Type Pad dia.
(H) < In Caee ot B:lT) 0 18 (4.5) Oia 6 6 i=o.ar (ro.5i0a5(115) TUpe 532,r Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NVVsJ3-532staiions -M5, B3T \ | s l ATTI T \i.1 J_ 19 1 e : 9 6 t ' ' i 5 _ 3 ^i :n l ' g r018 (4 5) oLa 11.81 {300) Stationsn) 2 3 5 6 7 a 9 1 0 l1 12 13 a4 '15 16 17 1a 't9 20 L1 1.63 2.05 (41.5) (b2) 2.45 (62.5) 2.47 (731 3.29 3.70 (835) (s4) (104 5)
(H) < In Caee ot B:lT) 0 18 (4.5) Oia 6 6 i=o.ar (ro.5i0a5(115) TUpe 532,r Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NVVsJ3-532staiions -M5, B3T \ | s l ATTI T \i.1 J_ 19 1 e : 9 6 t ' ' i 5 _ 3 ^i :n l ' g r018 (4 5) oLa 11.81 {300) Stationsn) 2 3 5 6 7 a 9 1 0 l1 12 13 a4 '15 16 17 1a 't9 20 L1 1.63 2.05 (41.5) (b2) 2.45 (62.5) 2.47 (731 3.29 3.70 (835) (s4) (104 5)
VSS8-6 Double Solenoid DOUBLE SOLENOID VSS8-6 VSS8-6 3-POSITION 3-position VSS8-6 VSS8-6 PART LIST Single solenoid Double solenoid 3 position Double solenoid 3-position Single solenoid VSS8-6 VSS8-8 VSS8-10 VSS8-6 VSS8-8 VSS8-10 VSS8-6 VSS8-8 VSS8-10 Description Description VSS8-10 VSS8-8 VSS8-8 VSS8-10 VSS8-6 VSS8-6 VSS8-10 VSS8-8 VSS8-6 1.
(mm) Model 4 6 8 10 12 KQGH04-00 KQGH06-00 KQGH08-00 KQGH10-00 KQGH12-00 4 6 8 10 12 KQGU04-00 KQGU06-00 KQGU08-00 KQGU10-00 KQGU12-00 Male Elbow Male Elbow Bulkhead Union Bulkhead Union Applicable tubing O.D. (mm) Connection thread Model Applicable tubing O.D.
Valve model Port size VCL2l VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included
CE*OMI0064-C CEU5 1 . 1 2 . 4 2-1 . 4 2-2 . 4 3 . 5 4 . 7 5 . 9 6 . 10 6-1 . 10 6-2 . 10 6-3 . 11 6-4 . 11 6-5 RS-232C . 11 6-6 . 12 7 . 13 7-1 . 13 7-1-1 . 13 7-1-2 . 13 7-1-3 . 14 7-1-4 . 15 7-2 . 16 7-3 . 20 7-3-1 . 20 7-3-2 . 20 7-3-3 . 20 7-3-4 No. . 20 7-3-5 . 21 7-3-6 . 22 7-3-7 . 23 7-4 (E2ROM) . 25 8 RS-232C . 26 8-1 . 26 8-2 . 26 9 BCD .
-V5 LECYU2-V5 V6 AC servo motor 100 16 L Left side parallel V7 200 25 LECYM2-V7 LECYU2-V7 (Absolute encoder) (6)Motor option (5)Storke [mm] (4)Lead [mm] Size Size Nil Without option 16 25 16 25 * B With lock 50 12 16 (20) 100 6 8 (10) 150 *The values shown in ( ) are the lead for size 25 parallel mounting types.
1 1.5m B A-2 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 S 9 B A-6 8 3 14.2 2 1 (8) 14 18 B1 A1 17.7 5 6 2 1 A6 B6 15 16 11 30.7 112 [820m] A B-1 2 A A-1 1 L B B-2 6 8 8m B A-2 5 COM-A/COM B-3 3 A 10m COM-B/ A-3 4 B 15m Shield C 20m Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 14.2 2 1 (
plating) M-01H-6, M-5H-6 M-5HL-6, M-5HLH-6 7.
System diagnostic status1 7 6 5 4 3 2 1 0 Byte 1 Bit No.
Note 6) Only when the motor option, "with lock", is selected.
6 Pilot valve assembly !
VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2
(mm) DQ HQ HP Model Applicable pad model ZX 10 13 16 20 25 32 40 50 10 16 25 40 10 13 16 20 25 32 40 50 4 6 8 6 8 2. 6 4. 8 7 9 7 9 ZPT-B4 ZC(D)UKC10 ZC(D)UKQ10 19. 5 19. 5 19. 5 19. 5 20. 5 20. 5 ZR 36. 5 36. 5 36. 5 36. 5 37. 5 37. 5 DQ HQ HP 2. 6 4. 8 7 9 12 21 44 15 21 42 18 12 24 45 18 25 46 7 9 12 25 46 15 18 29 50 ZM ZPT-B5 ZC(D)UKC16 ZC(D)UKQ16 19. 5 19. 5 19. 5 19. 5 21. 5 20. 5
(4) 2.9 14.5 psi (0.1 MPa) (20) 0.07 (2) 0 0 0 0.07 (2) 0.14 (4) 0.21 (6) 0.28 (8) 0 4 2 8 6 10 Suction flow SCFM (L/min (ANR)) Needle opening [rotations] The actual suction flow at the point of suction varies depending on the vacuum pumps piping conditions.
AC10 AC20 AC25, AC30 AC40 AC40-06 AC50, AC55, AC60, AC50A, AC60A, AC50B, AC55B, AC60B Y100T Y200T Y300T Y400T Y500T AL AW Y600T 6 120 70 31 60 20 112 50 11 11 6.4 AG Part no.