101 kPa1 to 10% of the set pressure (Changeable)?1% full span or less?3% full span or less12 to 24 VDC (Ripple ?10% or less )PNP open collector 80 mA1 pointLights up when ON (Red)200 degrees17 mA or less (When 24 VDC is ON)--0.2 MPa

101 kPa1 to 10% of the set pressure (Changeable)?1% full span or less?3% full span or less12 to 24 VDC (Ripple ?10% or less )NPN open collector 30 V, Max. 80 mA1 pointLights up when ON3 rotations17 mA or less (When 24 VDC is ON)--0.2 MPa

101 kPa1 to 10% of the set pressure (Changeable)?1% full span or less?3% full span or less12 to 24 VDC (Ripple ?10% or less )PNP open collector 80 mA1 pointLights up when ON (Red)200 degrees17 mA or less (When 24 VDC is ON)--0.2 MPa

101 kPa500 kPaAir/Non-corrosive, non-flammable gas12 to 24 VDC ?10%, Ripple (P-P) 10% or less (With power supply polarity protection)17 mA or less at 24 VDC5 ms or less?1% F.S. or lessEnclosureOperating temperature rangeOperating humidity rangeVibration resistanceImpact resistance?3% F.S. or less1000 VAC for 1 min.

101 kPa?1.3 to ?80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

Basic Type: 101 (Inch, Release Button: Orange), IN/OUT Applicable Tubing O.D.: 07 (1/4")

Basic Type: 101 (Inch, Release Button: Orange), IN/OUT Applicable Tubing O.D.: 05 (3/16")

AC Servo Motor Driver (Pulse input type)

./2017 6th printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved 69 -

AC Servo Motor Driver (SSCNET /H Type)

./2017 5th printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved -75-

AC Servo Motor Driver (MECHATROLINK-II type)

./2017 4th printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2014-2018 SMC Corporation All Rights Reserved 43 -

AC Servo Motor Driver (MECHATROLINK-III type)

./2017 4th printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2014-2017 SMC Corporation All Rights Reserved 42 -

JXCx-OMU0024

JXC-OMU0024 First edition: July 2017 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved

JXCx-OMU0022

. -6- Revision history First edition: February 2017 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved

SFOD-OMT0012

SFOD-OMT0012 First edition: September 2015 A: Contents revised in several places: March 2016 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2016 SMC Corporation All Rights Reserved No.SFOD-OMT0012

SFOD-OMT0011CN

SFOD-OMT0011 2015 7 2016 3 A 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015-2016 SMC Corporation All Rights Reserved No.SFOD-OMT0011CN-A

SFOD-OMT0008

SFOD-OMT0008 First edition: June 2015 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved No.SFOD-OMT0008

Controller setting Software (ACT Controller)

. -29JXC-OMU0010-A Revision history : First edition [Oct 2016] A : Contets revised in sevrral places [Mar 2020] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2016-2020 SMC Corporation All Rights Reserved

Controller setting kit Software (ACT Controller) version upgrade procedure

Confirm that Version 1.2.0.0 is displayed. 11 - Revision history No.LEC-OM04901 April/2012 1st printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved 12 -

AC Servo Motor Driver (Parameter Configuration using Setup software (MR Configurator2 TM ))

./2015 2nd printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved 13 -

AC Servo Motor Driver (Parameter Configuration using Setup software (SigmaWin+ TM ))

For the saving parameters from SigmaWin+ to file destination, refer to Section 4.4. 4 6 5 7 19 - Revision history No.LEC-OM09601 Sep/2015 1st printing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.