Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 3 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF), Control Unit: None, Voltage of Air Release Valve: w/o Air Release Valve, Q: Q (CE Marked)

.· Y24-□01-A, 02-A applicable model: AC20□-A.· Y34-□01-A, 02-A applicable models: AC25□-A, AC30□-A.· Y44-□02-A, 03-A applicable model: AC40□-A.· Y54-□03-A, 04-A applicable model: AC40□-06-A.

2/3 Port Valve for Various

Tightness of Valve (Leak rate) 0" " " $'" ( 2 A NBR, FKM, EPDM )* +, " $ % 1 % 1 $ " /3 $'" ( , " , " # Pilot Pressure 4 " 4 " VXA21 VXA22 4 $ " < . q B 6 "5 !" $6" " 6 " " " w 0C4,D 4 e B 6 !"

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

CM2x-OM0230Q

AF AR 4 - 1) 5 2) 3) 5 4) 1 ISO VG-32 2-2. 1) 2) 3) 4) 5) 6 7) 5 - 8 9) , 10) 11) 3 1) P10 [2-6.] 2) 3) 4) 5) 6) 7) (40) 6 - 2-3. 1) 1 P10 [2-6.] fR Ft N () mm 1. (MPa)=(MPa)+{(kg) 2)} X /(mm ,, 2) 3) 4) 7 - 5) 6) 7) 8) 9) 24. 1) 2) 3) 8 - 1) 2) 1.52 2 2. 2-5. ,AS 9 - 2-6. P7.1. 1.

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Series Appearance Class Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 1" 6 8 10 12 19 1/8" 1/4" 3/16" 3/8" 1/2" 3/4" 1" 25 4 3 1 2 3 Male 4 5 Connector LQ1H P.4 6 1 2 3 Female 4 5 P.5 6 1 2 3 Male 4 5 Elbow LQ1L P.6 6 1 2 3 Female 4 5 P.7 6 1 2 3 Male 4 5 Run tee LQ1R P.8 6 1 2 3 Female 4 5 P.9 6 Note) Basic size With reducer Features 2 Series LQ , LVN, TL/TIL 1 2 Port size Tubing

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

In case of ZQ1000M-E G-00, the overall length is 112. 5 6 5 6 5 6 5 6 Circuit diagram PE PE Left Right PS PV PD PD V V V 5 6 5 6 5 6 E F E F E F V ZQ1000M-K1 ZQ1000M-K2 ZQ1000M-J1 -FZQ1000M-Q1 24 Series ZQ Dimensions Fittings / Fitting type filter dimensions after installation V port Applicable tubing O.D.: 6 Vacuum (V) port Applicable tubing O.D.: 3.2 Vacuum

VXA21/22

/ Material 17-3-101 6 The VX series will be revised shortly. Series VXA31/32 Common (C.O.) Fluid Standard specifications Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x 102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x 10-1 Pa) (V, M) Non-leak (106 Pam3/s or less) (V, M) JIS Symbol A C.O.

C95

switch Grommet Diagnostic indication (2-color) Z76 Z73 Z80 F59 F5P J51 J59 F59W F5PW J59W F5BAL IC IC 3-wire 5 V Yes AC 100 100 V or less 12 V 5 V, 12 V Relay, PLC No PLC 24 V 2-wire Terminal conduit 12 V Yes 100 V, 200 V Relay, PLC DIN terminal 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC 24 V 100 V, 200 V 2-wire 12 V 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC Diagnostic indication (2

How to Order ø 6, ø 8, ø 12, ø 16, ø 20, ø 25 MXQ  A Series Air Slide Table Double-ported Type

12 V 3-wire (PNP) M9PV M9P 2-wire 12 V M9BV M9B 3-wire (NPN) 5 V, 12 V M9NWV M9NW IC circuit 3-wire (PNP) M9PWV M9PW 2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 IC circuit 3-wire (PNP) M9PAV1 M9PA1 2-wire 12 V M9BAV1 M9BA1 Water resistant (2-color indicator) Grommet Yes 3-wire (Equiv. to NPN) 5 V A96V

Pin Cylinders Series CJP2/CJP

Option Bore size (mm) Description 6 Bore size (mm) Bracket 6 Symbol Specifications 10 16 10 16 XA Change of rod end style XB6 Heat resistant cylinder (150C) Flange CP-F006A CP-F010A CP-F016A Auto switch D-A9(V), D-M9(V), D-M9W(V) XB7 Cold resistant cylinder Foot CP-L006A CP-L010A CP-L016A Single knuckle joint I-P006A I-P010A I-P016A XC22 Fluororubber seals Trunnion (with pin) CP-T006A CP-T010A

Wide Type Parallel Style Air Gripper ø 10, ø 16, ø 20, ø 25 MHL2 Series

V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 2-wire 12 V M9BWV M9BW V V V v v 3-wire (NPN) 5 V, 12 V M9NAV2 M9NA2 v v V v v IC circuit 3-wire (PNP) M9PAV2 M9PA2 v v V v v Water resistant (2-color indicator) 2-wire 12 V M9BAV2 M9BA2 v v V v v 1 Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example

Slider Type Ball Screw Drive/11-LEFS Series

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 * Please consult with SMC for

Actuation: 3A (Air Operated), Thread: 01 (1/8 Port, Rc Thread), Option: B (Foot), Made to Order: X16 (Liquid Contact Seals SF7000)

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: B (Bracket), Specifications: 3 (0.008 to 0.6 MPa Setting)

Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 01 (1/8), Accessory: BE3 (B+E3), Specifications: 1Y (1 + Y)

Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 01 (1/8), Accessory: BG (B+G), Specifications: 1Y (1 + Y)

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: B (Bracket), Specifications: 1 (0.005 to 0.2 MPa Setting)

Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 01 (1/8), Accessory: BE (B+E), Specifications: 3Y (3+Y)

Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 01 (1/8), Accessory: B (Bracket), Specifications: Y (Upward Facing Knob)