Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Ionizer

How to Order IZS31 CP X13 L (Tolerance 1%) Cable length 60 L: Cable length Symbol 7 01 02 04 05 06 07 08 09 11 12 13 14 15 16 17 18 19 20 1000 mm 2000 mm 4000 mm 5000 mm 6000 mm 7000 mm 8000 mm 9000 mm 11000 mm 12000 mm 13000 mm 14000 mm 15000 mm 16000 mm 17000 mm 18000 mm 19000 mm 20 mm (Red) 1 12 (6.2) 3 Cable Specifications No. of cable wire 12 0.14 mm2 (AWG26) 0.48 mm Nominal cross section

Speed Controller with One-touch Fittings Series AS In-line Type 1

Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Type Metric size Inch size Elbow Universal 2 3 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 23 3.2 4 6 8 10 12 03 05 07 09 11 13 04 06 08 10 12 Control type Meter-out Meter-in 0 1 Use 1/8" tube.

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

VXA31/32

(Example) 7 stations of VXA31, Individual port Rc Blanking plate Common port 1 8 Plug Individual port (Base P/N) VXA311-07 1 pc (Valve P/N) VXA3115-00 6 pcs (Blanking plate P/N) VX011-0041 pc The standard arrangement of manifolds should be placed on an individual port on this side, each solenoid valve from the left side and a blank plate in the right side.

Vacuum Saving Valve

Front matter 1 Vacuum Saving Valve Series ZP2V How to Order ZP2V 03 A5 Connection thread symbol for the pad Fixed orifice size Male thread connection Applicable fixed orifice size Fixed orifice size (mm) Symbol Thread size Symbol 0.5 0.3 0.7 1.0 A5 A8 A01 AG1 AN1 03 05 07 10 0.3 M5 0.5 M8 No.0.8 0.7 R1/8 Male thread 1.0 G1/8 Pad side NPT1/8 Female thread connection Applicable fixed orifice

ZU

Matching the Ejector to the Vacuum Circuit Caution For precautions associated with matching the ejector to the vacuum circuit, refer to the technical data on page 13-1-10 to 13-1-19. 13-6-2 Vacuum Ejector In-line Type Series ZU How to Order ZX ZU 05 S ZR ZU07 ZM Maximum vacuum pressure S 85 kPa ZH L 48 kPa ZU05 ZU Nozzle diameter 05 0.5 mm ZL 07 0.7 mm Circuit diagram ZY EXE ZQ Specifications

Compact and

For vacuum equipment precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www. smcworld.com Nozzle diameter Port size 05 0.5 mm 07 0.7 mm Nil 6 One-touch fitting 01 Rc1/8 female thread Symbol EXH Vacuum pressure reached S 90 kPa L 48 kPa Mounting P V Caution Specifications 1 .

Series: VFA5000, Manifold: P.R Port Size 1/2, Stations: 07, Type: Common Exhaust, Thread: -

Series: VFA5000, Manifold: P.R Port Size 3/8, Stations: 07, Type: Common Exhaust, Thread: -

Series: VFA5000, Manifold: P.R Port Size 3/8, Stations: 07, Type: Common Exhaust, Thread: NPT

Series: VFA1000, Manifold: VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4, Stations: 07, Type: Common Exhaust, Thread: NPT

Series: VFA5000, Stations: 07, Thread: NPTF

Model: Side-Ported, Serial Interface, SI Unit Specification: w/o SI Unit, SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 07 Stations, P, E Port Location: Both Sides, SUP/EXH Block: Internal Pilot, A, B Port Size: ø1/4" One-touch Fitting, Mounting: -, DIN Rail Option: -

Model: Side-Ported, Serial Interface, SI Unit Specification: PROFIBUS DP - 16 Outputs - Connector M12, SI Unit Output Polarity: PNP, Valve Stations: 07 Stations, P, E Port Location: D Side, SUP/EXH Block: Internal Pilot, A, B Port Size: ø1/4" One-touch Fitting, Mounting: -, DIN Rail Option: -

Model: Side-Ported, Serial Interface, SI Unit Specification: PROFIBUS DP - 32 Outputs - Connector D-sub, SI Unit Output Polarity: PNP, Valve Stations: 07 Stations, P, E Port Location: Both Sides, SUP/EXH Block: Internal Pilot, A, B Port Size: ø1/4" One-touch Fitting, Mounting: -, DIN Rail Option: -