Lock-Up Valve IL201/211/220 Series

How to Order IL 02 201 Action Suffix 201 Single acting 211 Double acting 220 3 Port Accessories Nil Standard T High temperature (5 to 100C) L Low temperature (30 to 60C) S External parts copper-free Nil None B With bracket Thread type Port size ST External parts copper-free/ High temperature (5 to 100C) Nil Rc N NPT* 02 1/4 IP F G* SL External parts copper-free/ Low temperature (30 to 60C

T/TIA

(mm) 2.5 3 4 4.5 6 7.5 9 13 2.18 3.48 4.57 6.99 9.56 Black (B) Max. operating pressure (MPa) White (W) TIA Series Red (R) Blue (BU) T1613 Yellow (Y) Green (G) T0403 Other metric size Nominal size (inch) 5 32" 5 16" 1 4 3 8 " 3 16" 1 8 " 1 2 " " Nominal size (mm) 0.0 40 20 0 20 40 60 80 100 Specifications 3.2 Operating temperature (C) Fluid Air/Water 20C or less 40C 60C 80C 100C 3.3 2.3 1.65

MHZA2-6/MHZAJ2-6

MHC Symbol Specifications/Description Heat resistance (100C) Fluororubber seal Opening direction spring assist EPDM seal/Fluorine grease Axial ported type Fluorine grease Finger: Side tapped mounting Finger: Through-hole mounting Dust cover adhesion Dust cover adhesion (Finger part only) Dust cover caulking Dust cover caulking (Finger part only) Grease for food -X4 -X5 -X12 -X53 -X56 -X63

MHC2-6/MHCA2-6

MHK Symbol Specifications/Description MHS -X4 -X5 -X53 -X56 -X63 -X64 -X65 -X79 Heat resistance (100C) MHC Fluororubber seal EPDM seal/Fluorine grease MHT Axial piping type Fluorine grease MHY Finger: Side Tapped Mounting Finger: Through-hole mounting MHW Grease for food -X MRHQ MA D623

MHF2

MHC MHT Symbol Specifications/Description Heat resistance (100C) Fluororubber seal Without magnet EPDM seal/Fluorine grease Fluorine grease Grease for food -X4 -X5 -X50 -X53 -X63 -X79 MHY MHW -X MRHQ MA D453

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

IR1000/2000/3000

IR1000/2000/3000 Series How to Order IR 2 0 0 02 0 Precision regulator Thread type Body size Nil N Note 2) Rc NPT Suffix 1 1 2 3 IR1000 series IR2000 series IR3000 series Nil G F For high temp. environments (5 to 100C) For low temp. environments (30 to 60C) T Note 4) Semi-standard Type of setting L Note 5), 6) 0 1 Note 1) Basic type (Knob) Air operated type Suffix 2 Set pressure range

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

t Auto switch type Symbol Temperature Heater Nil 5 to 60C Symbol Model Remarks Nil Without auto switch (without magnet) M9N(M)(L)(Z) D-M9N(M)(L)(Z) Solid state auto switch M9P(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C

Fluoropolymer Piping Equipment

-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51-R1 LQ3T51-R5 LQ3T61-R1 LQ3T61-R5 4 x 3 1/4" x 5/32" 2 1 TL TIL TLM TILM 6 x 4 2 3/8" x 1/4" 3 TD TID 1/4" x 5/32" TH TIH 10 x 8 3 1/2" x 3/8" 4 8 x 6 12 x 10 4 3/8" x 1/4" 19 x 16 5 25 x 22 6 3/4" x 5/8" Note) For details of the applicable tubing sizes, refer to page 945. 5 1/2" x 3/8" 3/8

Air/Manually Operated High Purity Chemical Valve Series LV

Table symbols : Can be used : Depends on conditions X: Cannot be used Compatibility is indicated for fluid temperatures of 100C or less. Consult P/A regarding fluids other than the above. Consult P/A regarding operating conditions. 1.12-6

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3T21-R1 LQ3T21-R2 LQ3T21-R5 LQ3T21-R6 LQ3T31-R1 LQ3T31-R2 LQ3T31-R5 LQ3T31-R6 LQ3T32-R1 LQ3T32-R5 LQ3T41-R1 LQ3T41-R5 LQ3T51-R1 LQ3T51-R5 LQ3T61-R1 LQ3T61-R5 LQ3T2A-R1 LQ3T2A-R5 LQ3T3A-R1 LQ3T3A-R2 LQ3T3A-R5 LQ3T3A-R7 LQ3T3A-R9 LQ3T4A-R1 LQ3T4A-R2 LQ3T4A-R5 LQ3T4A-R6 LQ3T4A-R7 LQ3T4A-R8 LQ3T4A-R9 LQ3T5A-R1 LQ3T5A-R2 LQ3T5A-R3 LQ3T5A-R5 LQ3T5A-R6 LQ3T5A-R7 LQ3T5A-R9 LQ3T5A-R10 LQ3T5A-R11

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

180 ° Angular Type Air Gripper Cam Type MHY2 Series ø 10, ø 16, ø 20, ø 25

MHF Symbol Specifications/Description Heat resistance (100C) Fluororubber seal Without magnet EPDM for seals, Fluorine grease Fluorine grease MHL -X4 -X5 -X50 -X53 -X63 -X79 -X79A -X81A Refer to How to Select the Applicable Model on page 700. Refer to pages 700 and 701 for the details on effective holding force and allowable overhanging distance.

HAW

(Example) Inlet air temperature: 100C, Cooling water temperature: 20C, Cooling water flow: 17 l/min Air flow: 2000 l/min (ANR), Air pressure: 0.7 MPa, Model: HAW22-14 Outlet air temperature at above conditions Use outlet air temperature of 37C from outlet air temperature table. At this time correction factor line becomes .

Series HAW Water Cooled Aftercooler 1

(Example) Inlet air temperature: 100C, Cooling water temperature: 20C, Cooling water flow: 17 l/min Air flow: 2000 l/min (ANR), Air pressure: 0.7 MPa, Model: HAW22-14 Outlet air temperature at above conditions Use outlet air temperature of 37C from outlet air temperature table. At this time correction factor line becomes A .

Process Pump <Fluororesin Type> Series PA3000

(with no freezing or heat cycle) Ambient temperature 0 to 100C (with no freezing or heat cycle) Pilot air pressure 0.2 to 0.5MPa Proof pressure 0.75MPa Mounting orientation Horizontal (with mounting hole on the bottom) Weight 2.1kg (without foot) PA: Standard Assembled and packaged in a standard environment Assembling environment PAP: Clean room Assembled and double-packaged in clean-room

S Couplers Series KKA

time Aeration 0.1~0.2 cm3/time Socket valve Plug valve Body size Liquid dripping Aeration Body size Liquid dripping Aeration 0.02 0.04 0.06 0.1 0.1 0.2 KKA3 KKA4 KKA6 Liquid dripping : Leakage of internal liquid at the time of uncoupling Aeration : The amount of entrained air at the time of connection Material : Metal parts 304 stainless steel, Seals FKM Operating temperature range: -5 to 100C

How to Order Series IP8000/8100 Electro-Pneumatic Positioner

to IEC Pub.529) Exterior covering enclosure Material Weight Cable gland with flame proof packing (Option) Aluminum diecast body / epoxy resin Part name Flame proof packing connector unit Part number P368010-32 P368010-33 Suited cable outer diameter 7.0 to 10.0 10.1 to 12.0 With terminal box 2.6kg (None 2.4kg) Note 1) 1/2 Sprit range (Standard) Note 2) Stroke adjustment: 0 to 60C, 0 to 100C

FEP Tubing (Fluoropolymer)

Min. bending radius (mm) 15 Note 3) 20 35 60 95 100 130 Air, Inert gas: -20 to 200C Water: 0 to 100C (No freezing) Operating temperature Material FEP (Fluorinated Ethylene Propylene Resin) Note 1) When using a fluid in liquid form, the surge pressure must not exceed the maximum operating pressure.

MHL2

MHY MHW Symbol Specifications/Description -X4 Heat resistance (100C) -X Precautions -X5 Fluororubber seal -X28 With adjuster bolts for adjusting closing width MRHQ -X50 Without magnet Be sure to read before handling. Refer to front matters 38 and 39 for Safety Instructions and pages 358 to 365 for Air Gripper and Auto Switch Precautions.