Available protocols include DeviceNet, and CC-Link., EX300, VALVE, EX300 SERIAL INTERFACE UNIT, 22, EX300, 0.42982 lb
Please contact us for the latest version.sales@ocaire.com, SUBPLATE, ISO, VALVE, VFR4000 SOL VALVE 4/5 PORT, 22, VFR4000, .22000 lb, ModelPipingPort size P, A, BR1, R2VS7-1-A02Side1/43/8
Please contact us for the latest version.sales@ocaire.com, SUBPLATE, ISO, VALVE, VFR2000 SOL VALVE 4/5 PORT, 22, VFR2000, .81400 lb, ModelPipingPort size P, A, BR1, R2VS7-1-A03Side3/83/8
Please contact us for the latest version.sales@ocaire.com, WELD PACKAGE (70 DAY LEADTIME), VALVE, VSS/R8-10 SOL VALVE 4/5 PORT, 22, VSS/R8-10 NO SIZE RATING, 25.65200 lb
Please contact us for the latest version.sales@ocaire.com, STEP MOTOR DRIVER, ACTUATOR, ELECTRIC ACTUATOR, 22, LE ELECTRIC ACTUATOR, .00000 lb, ModelBoltMax. tightening torque (N m)L (mm)LESH8R/LM3 x 0.50.6325.5
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 4 (Cassette Type Full MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM)
Size: 22 (Base Mounted), Operation: 1 (External Pilot Solenoid), Port Size: 02 (1/4), Thread: Rc(PT), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z [Light & Surge Voltage Suppressor (Except Grommet)], Option: N (Silencer)
Size: 22 (Base Mounted), Operation: 1 (External Pilot Solenoid), Port Size: 02 (1/4), Thread: Rc(PT), Voltage: 5 (24VDC), Lead Wire: MO (M Plug w/o Connector), Surge Suppressor: Z [Light & Surge Voltage Suppressor (Except Grommet)]
Magnet: D (Built-in), Mounting: B (Basic), Cushion: N (Rubber Bumper), Bore Size: 40 (1 1/2"), Stroke: 2200 (22"), Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: L (3m)
Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 40 (1 1/2"), Stroke: 2200 (22"), Auto Switch: M9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)
Size: 15 [71scfm, 120m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: 10mm (Size 3 to 15, Rc; Size 22 to 75, R; 10mm Drain Tube), Option: T (Terminal Block for Run & Alarm Signal)
Size: 55 [226scfm, 384m³/hr (ANR)], Voltage: 46 (Three-phase, 460VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: LRT (L+R+T)
Size: 11 [59scfm, 100m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: 10mm (Size 3 to 15, Rc; Size 22 to 75, R; 10mm Drain Tube), Option: T (Terminal Block for Run & Alarm Signal)
Size: 8 [41scfm, 70m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: ARV (A+R+V)
Size: 55 [226scfm, 384m³/hr (ANR)], Voltage: 46 (Three-phase, 460VAC, 60Hz), Connection Port Thread: 10mm (Size 3 to 15, Rc; Size 22 to 75, R; 10mm Drain Tube), Option: T (Terminal Block for Run & Alarm Signal)
Size: 4 [15scfm, 25m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: RTV (R+T+V)
Size: 8 [41scfm, 70m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: RTV (R+T+V)
Size: 6 [25scfm, 43m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: N (Size 3 to 15, NPT Female; Size 22 to 75, NPT Male; 3/8" Drain Tube), Option: KRT (K+R+T)
Size: 4 [15scfm, 25m³/hr (ANR)], Voltage: 11 (Single-phase, 115VAC, 60Hz), Connection Port Thread: 10mm (Size 3 to 15, Rc; Size 22 to 75, R; 10mm Drain Tube), Option: T (Terminal Block for Run & Alarm Signal)