Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Direction, Tube Size 1(φ): 4, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Clean environment, Thread Portion Material: [303/304 Stainless Steel] 303 Stainless Steel, Packing, Material of O-Ring: [NBR] Standard (NBR), Compatible Fluid: Water / Air, Type Of Connection: M, Connection screw: 5×0.8, Number of Connection

Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Direction, Tube Size 1(φ): 6, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Clean environment, Thread Portion Material: [303/304 Stainless Steel] 303 Stainless Steel, Packing, Material of O-Ring: [NBR] Standard (NBR), Compatible Fluid: Water / Air, Type Of Connection: M, Connection screw: 5×0.8, Number of Connection

Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Direction, Tube Size 1(φ): 4, Threaded Adapter Shape: With hex socket and straight, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Clean environment, Thread Portion Material: [303/304 Stainless Steel] 303 Stainless Steel, Packing, Material of O-Ring: [NBR] Standard (NBR), Compatible Fluid: Water / Air, Type Of

Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Direction, Tube Size 1(φ): 6, Threaded Adapter Shape: With hex socket and straight, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Clean environment, Thread Portion Material: [303/304 Stainless Steel] 303 Stainless Steel, Packing, Material of O-Ring: [NBR] Standard (NBR), Compatible Fluid: Water / Air, Type Of

Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Direction, Tube Size 1(φ): 6, Threaded Adapter Shape: [Elbows] Elbow, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Clean environment, Thread Portion Material: [303/304 Stainless Steel] 303 Stainless Steel, Packing, Material of O-Ring: [NBR] Standard (NBR), Threaded Adapter Elbow Shape: [Universal Elbows] Triple

Type: [Fitting] One-Touch / Screw, Fitting Type: Screw Mount Branch, Tube Size 1(φ): 4, Body Material: [303/304 Stainless Steel] SUS304+PBT, Application: Clean environment, Thread Portion Material: [303/304 Stainless Steel] 303 Stainless Steel, Packing, Material of O-Ring: [NBR] Standard (NBR), Threaded Adapter to Tubes Shape: [Tee] Double Port Tee Union, Compatible Fluid: Water / Air, Type

AHC System Series MA

diameter Air gripper for AHC Positioning 1 2 Ball coupling Curved coupling Air connection size Operation M5 M5 x 0.8 0 1 Single acting Double acting Electric specifications AHC unit No electric specifications D-sub connector Symbol N A B C (Without connector) (With connector) (With 3 m cable) Tool adapter Air gripper for AHC <10/15> 3 A M5 MA A310 MHR2 10 10 Cylinder bore For MA3 With adapter

CRB1/Size: 10, 15, 20, 30

0 0.043 43 8 50 16 40 13 22 5 2 8 12 1.0 M5 1.1-10

Low Profile Slide Table Series MXF

to use as operating port 2 x M5 x 0.8 Note) 25 4 N x M3 x 0.5 thread depth 5.5 3H9 +0.025 0 depth 3 (Insert) 8.5 6.5 A 58 6 10.5 45 16 23 16 35 24.5 20 3H9 depth 3 +0.025 0 68 20 10 4 x 3.2 4 x 6.5 5.5 6.5 2 x M3 x 0.5 thread depth 6 25 H 9.8 4 x M4 x 0.7 A Section AA M 10 Operating port 2 x M5 x 0.8 (Table length) 23 0.3 17 N 2 ( 1): The number of pitches 18.5 5.5 J I Z 3 ZZ Max. 10.5

MXF

A2 10 11 12 17 Model A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 Graph (2) Allowable Moment Coefficient: Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Allowable Moment Coefficient: Note) 16 mm for MXF8-10 only. 0.7 Stroke (mm) Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model 10 0.56 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98

Vacuum Pad

x 0.8, M12 x 1.75 G1/8, G1/4, G3/8 With Adapter 3 Female thread M5 x 0.8 M8 x 1.25 With Buffer Female thread Vacuum inlet: M5 x 0.8, Rc1/8 Mounting: M10 x 1, M14 x 1 10 mm/20 mm 6 I N D E X Vacuum Pad 20, 25, 35, 50 M Pad Unit How to Order p. 2 Dimensions p. 2 M Vertical Vacuum Inlet, With Adapter How to Order p. 3 Dimensions p. 3 M Vertical Vacuum Inlet, With Buffer How to Order p. 6

2-Color Display High Precision

None Nil M5 x 0.8 NPT1/8 (With M5 female thread) N01 Bracket A Rc1/8, G1/8 A W1 Rc1/8 WF1 G1/8 Rc1/8, G1/8 Bracket B B M5 M5 x 0.8 (Female thread) M5 x 0.8 Bracket D C4 4 one-touch fitting D C6 6 one-touch fitting 4, 6 one-touch fitting Made to Order Panel mount adapter Combination of piping specifications with option 1 and part numbers of options 01 N01 W1 WF1 M5 C4 C6 Option 1 Description

9.8

(Refer to Copy function on page 8.) 3 Series ZSE10(F)/ISE10 Dimensions ZSE10(F)/ISE10 M5 6.4 (7.7) (30) 2 x 3.3 M5 x 0.8 (12) 1.2 25 13 3.5 9.8 51.8 4.2 ZSE10(F)/ISE10 M5R 1.2 6.4 25 51.8 4.2 9.8 4.5 M5 x 0.8 4 Digital Pressure Switch Series ZSE10(F)/ISE10 ZSE10(F)/ISE10 01 6.4 2 x 3.3 1.2 Width across flats 10 Width across flats 12 11 13 13 25 3.5 8 R1/8 9.8 12.5 51.8 4.2 ZSE10(F)/ISE10

PSxx-OMM0006CN

(M8(3 )11 ) 01 X M ISE40A 2 K ISE40A -0.11.000 MPa ZSE40A 0.0-101.3 kPa ZSE40AF -100.0100 kPa 1 01 R1/8 (M5) A A N01 NPT1/8 (M5) W1 Rc1/8 B B WF1 G1/81 D D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D

KB

Style Tube size/ Connecting female thread size Body size KBV1-M5 KBV1-M6 KBV2-M5 M5 X 0.8 M6 X 1 M5 X 0.8 M6 X 1 KBV1-04 KBV1-06 KBV2-06 4 6 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 KBV2-08 KBV3-08 8 Branch elbow module: KBZ 1 8 Rc(PT) KBV3-10 10 KBV3-12 12 KBV4-12 KBV4-16 Tube O.D. Part No.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Page Series Guide type Motor type Model Mounting orientation Ground ball screw Rolled ball screw 6 10 20 10 20 6 10 20 10 20 LTF6 LTF8 LTF6 LTF8 Page 60 to Horizontal 10 10 Page 68 to Standard Frame-type LTF motor linear guide 6 6 Page 76 to Vertical 10 10 Page 84 to Construction Page 92 Mounting Page 93

High Vacuum L Type Valve

3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0016 6.

High Vacuum L Type Valve

3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0019 6.

Flow Sensor Series PFMV

(mm) Type Port size Model Type Port size Model KQ2H04-M5 KJH04-M5 Male connector Male connector 4 M5 x 0.8 KQ2S04-M5 4 M5 x 0.8 KJS04-M5 Hex. socket head male connector Hex. socket head male connector KQ2L04-M5 KJL04-M5 Male elbow Male elbow Miniature Fitting/Series M Tubing O.D.

Stations: 10, Port: M5 (M5 x 0.8)