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pilot Model Type 21R Type 40R Type 41R For external pilot Single base/B mount Manifold type Common SUP, common EXH P (SUP), R (EXH) 2 to 20 stations Valve stations A port Porting specifications Valve Base Location Bottom Side Top Direction 1/8 1/8 1/8 P, R port M5 x 0.8, 1/8, C4 (One-touch fitting for 4), , C6 (One-touch fitting for 6) M5 x 0.8 1/8 Port size M5 x 0.8 A port M5 x 0.8 X port

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Air consumption Q [Nl/min.] 15 20 30 40 50 15 20 30 40 50 1 1 32 2 0.4 0.5 0.5 20 25 0.4 0.3 160 2 10 10 125 12 0.3 16 1.5 2 3 4 5 1.5 2 3 4 5 9 0.2 0.2 100 8 80 63 50 10 7.5 0.1 10 6 1 1 6 5 40 0.05 4 5 0.6 0.5 0.4 0.3 0.2 0.15 0.1 0.04 32 4 1500 2000 3000 4000 5000 0.03 3 25 20 0.02 2 2.5 16 1.5 1 1000 0.01 1 0.05 0.04 0.03 10 1 150 200 300 400 500 0.5 0.4 0.3 0.005 0.02 0.015 0.01 6 0.2

Approx. 1.1 mm Insulator Colours Brown, blue, black, white Sheath Finish O.D. 4 71 No.PF-OMU0002-D Characteristics data Flow rate/ Analogue output 0 L/min A 2 B 0 L/min C 2 D Voltage output (1 to 5 V) 1 1 V 1.04 V 5 V Voltage output (0 to 10 V) 1, 3 0 V 0.1 V 10 V Current output 1 4 mA 4.16 mA 20 mA Models Minimum value of rated flow range *4 Maximum value of rated flow range PF3A703H 30

Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,

to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1) 2) 3) 1. 2. 3. 4) 1. 2. 3. 4. 2 - No.ZL3-OM00801-A /ZL3ZL6 / 1)1 1.5 *3) 2) 3 3)1 1 () 3 - No.ZL3-OM00801-A () -() 4 No.ZL3-OM00801-A 1.

of equipment to transmission and control systems. *2) JIS B8370 URLhttp://www.smcworld.com/ IDX-OM-W093 1 . 1-1 1.1 . 1-1 1.1.1 . 1-1 1.2 . 1-2 1.2.1 . 1-2 1.2.2 . 1-2 1.2.3 . 1-2 1.2.4 . 1-3 1.2.5 . 1-4 1.2.6 . 1-5 1.3 . 1-6 1.4 / . 1-7 2 . 2-1 2.1 . 2-1 3 . 3-1 3.1 . 3-1 3.2 . 3-2 3.2.1 . 3-2 3.2.2 . 3-2 3.2.3 . 3-3 3.2.4 . 3-4 3.2.5 . 3-5 3.3 . 3-7 4 / . 4-

DXT060-27A Flow Characteristics/Weight Weight (kg) Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Valve model b Cv Grommet Port size b Cv b Cv C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] b Cv 0.63 0.30 0.16 0.59 0.30 0.15 0.59 0.32 0.15 0.65 0.30 0.16 0.11 (With bracket: 0.13) 0.66 0.28 0.16 0.60 0.29 0.15 0.61 0.32 0.15 0.66 0.30 0.16 0.34 0.26 0.084

Also, when sealant tape is used, leave 1 thread ridge exposed at end of the pipe / fitting. B Sealant tape Expose approx. 1 thread Figure-3 3-3.

Panel mount adapter (Part number: ZS-26-B) Front protective cover (Part number: ZS-26-01) *1: The panel mount adapter can be rotated through 90 degrees for mounting. *2: The panel mount adapter should be fixed firmly with screws. Otherwise, fluids such as water may enter After the product makes contact with the panel, the screws should be further tightened 1/4 to 1/2 turn.

Note 3) The handle of the selector (2 position) cannot be removed or replaced alone. 5-6-48 5 Port Mechanical Valve Rubber Seal Series VFM300 How to Order S 01 02 0 VFM35 Option Suffix for actuator F Foot bracket (Only internal pilot) Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push button selector Rc 02 1 4 Roller lever 01 Black NPT N02 1 4 One way roller lever

Rod seal Piston seal Gasket Grease package (mm) 6 CJP2B6-PS 1 1 1 1 10 CJP2B10-PS 1 1 1 1 16 CJP2B16-PS 1 1 1 1 Storage of seal (for extended period) 1) Put the seal into an enclosed package for storage 2) Avoid exposure to direct sunlight, high temp. and humidity.

How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.

SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH. H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

Absorbed Energy Max. absorbed energy (J) Collision speed (m/s) Model 1 2 3 4 5 10 20 30 40 50 60 70 80 Soft type RJ0604 0.05 to 1 0.5 H : 0.05 to 2/L : 0.05 to 1 RJ0806H/L 1 H : 0.05 to 2/L : 0.05 to 1 RJ1007H/L 3 H : 0.05 to 2/L : 0.05 to 1 RJ1412H/L 10 H : 0.05 to 2/L : 0.05 to 1 RJ2015H/L 30 H : 0.05 to 1.5/L : 0.05 to 1 RJ2725H/L 70 Short stroke type RJ0805 0.05 to 1 0.5 RJ1006 0.05 to

2 Port for Steam Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

(B) 2 VP4 Metal 4 VQ 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 Porting specications 2-position double 3-position pressure center (A) 4 (B) 2 Rubber (A) 4 (B) 2 VQ 4/5 Nil Side ported B Bottom ported 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQC 1/2 Manual override 3-position double check (A) 4 (B) 2 Note) 6 VQC 4/5 VQC 4/5 B: Locking type (Tool required) C: Locking type (Manual) Nil:

2 Carbon steel 9 Steel ball 1 Magnetic material 10 Magnet A F D9 type (2) 11 Auto switch 1 NBR 12 Piston gasket 2 NBR 13 Piston seal 1 NBR 14 Rod seal 1 NBR 15 Gasket 3 Free-Mounting Cylinder with Air Cushion Series CU Dimensions 2-cushion needle 2-port 2-P through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (