[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Nil Without port (For manifold) (8A) 1 4 02 Electrical entry Light/Surge voltage suppressor CE-compliant CE-compliant G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire Electrical entry D T C H G Only"D" Symbol Nil S Z C Conduit Note) Note) T Conduit terminal Note) D DIN terminal Symbol S: With surge voltage suppressor Note) Refer to the figure below.

Table of Contents

ES30-8A. Similar updating for other IDF/IDU models is scheduled to follow shortly.

Proposals for Energy Saving

Rc 1/4 (8A) 111g A variety of actuators available Models Basic type Actuator No. of ports Actuator part no.

0.4

SOL.A 1A () (+) 1B () (+) Station 1 SOL.B 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A () (+) 2B () (+) Station 2 SOL.B SOL.A 1.

LEC-OM02904

SSCNET 8A USB USB USB USB 8 15 8 (2) 8E USB ()USB 1. USB USB 12 () 2. () (1) CPU 1. 888 2. CPU 1. 2. 1. 888 2. MR Configurator2 TMMR Configurator2 TM/ 8.3 (E3) 30 (E0) 1(E1) E6E7E9OFF TM MR Configurator2 92 1. 2. 3V() 3 96 1. 2. 8 16 8 9F 3.2V( ) E0 85 1. 2. 3. 4.

HEC-OM-R008

. (+/10%), 50/60Hz Current consumption Max.5A(100V) Max.9A(100V) Max.4A(240V) Max.10A(100V) Max.4A(240V) Max.8A (200V) Max.2.5A(240V) Inrush current 50A or less Over current protection 10A 14A Do not modify or reconstruct the unit.

Compact manifold regulator ARM5 Series

Length 136016-1A 136016-2A 136016-3A 136016-4A 136016-5A 136016-6A 136016-7A 136016-8A 136016-9A 136016-10A 16 14 1 SRH 28 2 42 3 SRP 56 4 70 5 SRF Tie-rod for centralized supply block 84 6 98 7 ITV 112 8 126 9 IC 140 10 For 1 station 14 mm x 1 station = 14 mm Length ITVH For adding a regulator Tie-rod part no.

Compact 5-Port Solenoid Valve

9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A Station 2 Station 3 Station 4 Station 5 10A COM 10B Station 6 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B Station 7 Station 8 If alignment is not specified, the internal wiring will be double wiring (connected to SOL. a and SOL. b) regardless

SZ3000

If 12 VDC specifications are required, enter 12 at the end of the assembly part number. 1 2 1 2 P N SZ3000-42-6A-DSZ3000-42-5A-D For flat ribbon cable 20 pins D side 1 2 1 2 P N SZ3000-42-8A-DSZ3000-42-7A-D For flat ribbon cable 10 pins D side SZ3000-42-10A-D For serial D side Note) Connector block assembly can be shipped as an assembly only in the case of double wiring.

E-MY2B_E_A

Max. voltage (No load) : 30Vrms (42.4V peak) or less Max. current : (1) 8A or less (Including short circuit) (2) When limited by the circuit protector (fuse etc.) with the ratings in the table below. Voltage without load (V peak) Max. current rating (A) 0 to 20[V] 5.0 Over 20[V] up to 30[V] 100/peak voltage 2.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN Rc 1/2, 3/4 Rc 1/4 10 Process Pump Automatically Operated Type with Built-in Pulsation Attenuator (Internal Switching Type) Series PAX1000 How to Order 1 2 PAX1 1 02 Option Body material Nil N Body only With silencer 1 2 ADC12 (aluminum) SCS14 (stainless steel) For AIR EXH: AN200-02 Connection port size 1/4 (8A

E-MY2_E_D

Max. voltage (No load) : 30Vrms (42.4V peak) or less Max. current : (1) 8A or less (Including short circuit) (2) When limited by the circuit protector (fuse etc.) with the ratings in the table below. Voltage without load (V peak) Max. current rating (A) 0 to 20[V] 5.0 Over 20[V] up to 30[V] 100/peak voltage 2.

AC Servo Motor Driver (SSCNET /H Type)

USB communication time-out error 8A.1 USB communication time-out error SD 8E.1 USB communication receive error SD 8E.2 USB communication checksum error SD 8E.3 USB communication character error SD 8E USB communication error 8E.4 USB communication command error SD 8E.5 USB communication data number error SD 888 Watchdog 88._ Watchdog DB Note 1.

45

Connector block assembly (For 9 to 17 stations (T1) terminal block) t-6 SX5000-64-8A SX3000-64-8A M3 x 30 (Matt nickel plated) SX3000-22-2 (M2 x 24) SX5000-57-6 Round head combination screw y Gasket DIN rail SX3000-57-4 VZ1000-11-1u i Refer to page 1-6-77. Note) The numbers t1 to 4 are for 24 VDC. For 12 VDC, suffix -12V to the parts no.

SZ3000

If 12 VDC specifications are required, enter 12 at the end of the assembly part number. 1 2 1 2 P N SZ3000-42-6A-DSZ3000-42-5A-D For flat ribbon cable 20 pins D side 1 2 1 2 P N SZ3000-42-8A-DSZ3000-42-7A-D For flat ribbon cable 10 pins D side SZ3000-42-10A-D For serial D side Note) Connector block assembly can be shipped as an assembly only in the case of double wiring.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN 1/2, 3/4 1/4 10 Series PAX1000 Process Pump Automatically Operated Type with Built-in Pulsation Attenuator (Internal Switching Type) How to Order 1 2 PAX1 1 02 Option Body material Nil N Body only With silencer 1 2 ADC12 (aluminum) SCS14 (stainless steel) For AIR EXH: AN200-02 Connection port size 1/4 (8A

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

45

Connector block assembly (For 9 to 17 stations (T1) terminal block) t-6 SX5000-64-8A SX3000-64-8A M3 x 30 (Matt nickel plated) SX3000-22-2 (M2 x 24) SX5000-57-6 Round head combination screw y Gasket DIN rail SX3000-57-4 VZ1000-11-1u i Refer to page 1-6-77. Note) The numbers t1 to 4 are for 24 VDC. For 12 VDC, suffix -12V to the parts no.

3

VXR Max. operating pressure differential Note 3) (MPa) Flow rate characteristics Max. system pressure Note 3) (MPa) Weight Note 2) (g) AC DC Kv Cv Body material Size Port size (Nominal diameter) Orifice diameter (mm) Model Min. operating pressure differential Note 1) (MPa) VXH 2.1 2.4 3 1/4 (8A) 10 VXS235 600 3/8 (10A) 2.4 2.8 4 1/2 (15A) 15 VXS245 4.6 5.3 720 5 3/4 (20A) 20 VXS255 7.9 9.2

Direct Solenoid

Mo(rntlng Bas MT33&rl 16. 2 Mounlhg 8a Sclws M5x10 DIRECTIOIIAL AIR VALVES DIMENSIONS/PARTS LIST 3125 3145 NVS 31 SEFIES NVS 3115, NVS 3125 FOOT rOUa{T[{c Prlmary mountlng mlhod ls fool mountlng on the nd of th6 body.