Cooling capacities: 8kW; Circulating Fluid: 60% ethylene glycol aqueous solution; Temperature range setting: -20 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 2 kW, 8 kW, 15 kW, 30 kW ; Temperature range setting: 20 to 90°C ; Temperature stability: ±0.3°C ; Power supply requirement: 3-phase 200 VAC / 50Hz or 3-phase 200~208 VAC / 60Hz ; Circulating fluid: Clear or deionized water, fluorinated liquid, or 60% ethylene glycol solution ; Standards: UL, CE, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95)

LVM20/200 is a compact direct operated 2/3 port solenoid valve for chemicals. LVM's unique internal chamber design reduces the swept volume to a minimum and can mean zero dead volume and carry over.  Operating pressure ranges from -75 kPa to 0.30 MPa. LVM20/200 is available as body ported, direct tube connection or base mounted.

Fluid fill and drain ports (800W, 1kW) on the front; Mechanical sealless magnet pump eliminates shaft seal leaks; Cooling/Heating capacities: 200W/600W, 400W/1kW, 510W/1.2kW, 800W/1.4kW, 1kW/2kW; Temperture stability: ±0.03°C or Better depending on load stability; Power supply requirement: 100 ~ 240 VAC (200-800W) or 200~240 VAC (1kW) (50/60Hz); Circulating Fluid: water or 20% ethylene glycol

Cooling capacities: 8kW; Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility); Temperature range setting: -20 to 40°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

The valve is rated at 70 million cycles for the rubber seal and 200 million cycles for the metal seal. Side, top and bottom port/pipe directions are available to allow flexible installation.

Compatible motors (W): 100/200/400; Power supply voltage (VAC, 50/60Hz); 200~230; STO (Safe Torque Off) safety function available; Display and settings buttons for direct input and status monitoring; Compliant with SEMI F47 Standard; SigmaWin+ Configuration software required (download available separately)

Cooling capacities: 2kW, 4kW, 8kW, 10kW; Circulating Fluid: tap water or DI water; Temperature range setting: 10 to 60°C; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 10 kW or 15 kW ; Temperature range setting: 5 to 35°C ; Temperture stability: ±1.0°C ; Power supply requirement: 3-phase 200 VAC 50 Hz or 200~230 VAC 60 Hz ; Waterproof specification: IPX4 ; Circulating fluid: Tap or deionized water, or 15% ethylene glycol solution

Cooling capacities: 10.5 kW, 15.7 kW, 20.5 kW, 25 kW, 28 Kw ; Temperature range setting: 5 to 35°C ; Temperature stability: ±0.1°C ; Power supply requirement: 3-phase 200 VAC, 50Hz or 3-phase 200 ~ 230 VAC, 60Hz ; Waterproof specification: IPX4 ; Circulating fluid: Tap or deionized water, or 15% ethylene glycol solution

This model is compatible with 200 VAC power.

Fluid fill, drain port, and filter access on the front; Color LCD screen with control pad for settings and diagnostics; RS-232C / RS-485 Communication functions; Cooling/Heating capacities (W): 1100/200, 1200/500, 1800/500, 2400/700, 3000/700, 5900/1200; Temperature stability: ±0.1°C; Power supply requirement: 200~230 VAC, 50/60Hz; Circulating Fluid: water or 15% ethylene glycol; Standards

This model is compatible with single phase 200 VAC 50/60Hz power. Air cooled only, without heating feature ; Cooling capacities: 1.2 kW, 1.6 kW, 2.2 kW (at 60Hz) ; Temperature range setting: 10 to 30°C ; Temperature stability: ±2°C ; Power supply requirement: single phase 200 VAC, 50/60Hz ; Standards: RoHS ; Circulating fluid: Tap water or 15% ethylene glycol solution

Cooling capacities: 11.5 kW, 15.7 kW, 20.6 kW, 24 kW ; Temperature range setting: 5 to 35°C ; Temperature stability: ±0.1°C ; Power supply requirement: 3-phase 200 VAC, 50Hz or 3-phase 200 ~ 230 VAC, 60Hz ; Waterproof specification: IPX4 ; Circulating fluid: Tap or deionized water, or 15% ethylene glycol solution

Cooling capacities: 2kW, 4kW, 8kW, 10kW; Circulating Fluid: 60% ethylene glycol aqueous solution; Temperature range setting: -10 to 90°C (2kW), -20 to 90°C (4, 8, 10kW); Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8, F47

Cooling capacities: 2kW, 4kW, 8kW, 10kW; Circulating Fluid: Fluorinert™ or GALDEN® (see catalog for compatibility); Temperature range setting: -10 to 90°C (2kW), -20 to 90°C (4, 8, 10kW); Note: Temperature range depends on fluorinated fluid choice; Temperature stability: ±0.1°C; Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz; Standards: CE, UL, RoHS, SEMI S2, S8

Positioning table available on LECSA (7 points) and LECSC (255 points); Compatible motors: 100/200/400W servo motors for 200~230 VAC; Display and settings buttons for direct input and status monitoring; Configuration software required (sold separately)

Positioning table points: 255; Compatible motors (W): 100/200/400; Power supply voltage (VAC, 50/60Hz): 200~230; Display and setting buttons for direct input and status monitoring; LEC-MRC2 Configuration software required (sold separately); C-UL-US listed (LECSC2-T only)

EtherNet/IP™: AOI available for Studio 5000 Logix Designer; EtherCAT®: IEC61158 Type 12 CAN application protocol over EtherCAT® (CoE) and IEC61800-7CiA402 drive profile; PROFINET: includes PROFINET IO Real Time (RT); Compatible motors (W): 100/200/400/750; Power supply voltage (VAC, 50/60Hz): 200~240; Display and settings buttons for direct input and status monitoring; LEC-MRC2 Configuration

Double acting, single rod; Bore size (mm): 125, 140, 160, 180, 200, 250, 320; Available port threads: Rc, NPT, G; Optional rod boots; Auto switch capable