VZ100/300/500

8 F G 20 20 stations A port M5 x 0.8, 1/8 N NPT Z NPTE Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port. 40-1 How to Order Applicable solenoid valve VZ314VZ314MVZ324VZ324MApplicable blanking plate assembly DXT200-8-3A VV3Z3 40 05 1 C6 R port P/R port Thread type Stations A port side P port M5 01 C4 C6 B3 B7 2 stations 02 M5 x 0.8

125

(Station n) (Station 1) VVEX4-1 (Internal pilot) 83.3 A A 62.8 47.5 P R 13.5 38.5 P=46 n x Port 2(A): 1/4, 3/8 L Dimensions L1=46n+31, L2=46n+15 n: Stations Station L dimension 2 3 4 5 6 L1 123 169 215 261 307 L2 107 153 199 245 291 1736 VEX3 Series Specific Product Precautions 1 Be sure to read this before handling the products.

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'i,-.1-)^' l z N F Noz l!

MK

N I M O R S T U X 0.1 0.2 0.1 0.2 0.1 0.2 0.1 0.2 1 8 1 8 1 4 1 4 0 0.062 0 0.062 0 0.062 0 0.062 MK2B32 MK2B40 MK2B50 MK2B63 54 61 73 86 34 40 50 60 60 69 86 103 12 12 15 15 45 52 64 77 5.5 5.5 6.6 9 31.5 35 41 47.5 9 depth 7 9 depth 7 11 depth 8 Rc / Rc / Rc / Rc / 30 30 37 48 14 14 17 17 20 24 30 35 7 7 8 9 4.5 5 7 7 6.5 6.5 7.5 7.5 14 14 19 19 16 16 20 20 3 3 3.5 3.5 M10 x 1.5 M10 x 1.5

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

Basic Type/Direct Mount Type

) CY3R10 CY3R40 500 Allowable driving force Fn (N) Allowable driving force Fn (N) 300 50 200 40 30 20 100 20 30 40 50 10 Usable range 5 10 Usable range 5 1 0 1 2 3 4 5 6 1 7 8 9 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R15 CY3R50 H 1000 Allowable driving force Fn (N) Allowable driving force Fn (N) 50 500

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1 !2 !3 !4 !5 !6 !7 !8 !

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 24 or more Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less Multiple (2 pcs. or more) secure mounting Panel fitting dimensions (Bottom ported) Individual mounting 36 x n pcs. + 4 x (n pcs. 1) 360.3 360.3 360.3 4 x R3 or less 4 x R3 or less 33 ZSE20(F)/ISE20 Series Function Details

Modular Type Regulator Series AR

Note 2) Mounting thread for pressure gauge: 1/8 for AR20 to 30; 1/4 for AR40 to 60 Optional specifications Symbol 1 Note 3) N R Y Z Note 4) Description 0.02 to 0.2MPa setting Non-relieving type Flow direction: Right to left Upward handle Applicable model AR25 to 60 AR25 to 60 AR25 to 60 AR25 to 60 AR25 to 60 Optional specifications Symbol N R Y Z Note 3) Description Non-relieving Flow direction

Modular F.R.L. Unit

(PSI, F) -Z Attachments Port size Function M5 x 0.8 1/8, 1/4, 3/8, 1/2, 3/4, 1 Piping adapter Allows installation/removal of the component without removing the piping.

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

n + 29 L2 = 46 x n + 14 2 121 106 3 167 152 4 213 198 5 259 244 6 305 290 7 351 336 8 397 382 9 443 428 10 489 474 L L1 L2 With mounting adaptor: VV317-02-1-02-A 4 x 7 mounting hole Manual override (Non-locking) (Station 1) (Station n) VV061 VV100 DIN terminal facing upward 141.6 V100 S070 VQD n x 1/4 4 x 3/8 VQD-V Applicable cable O.D. 6 to 12 VK VT VT L Dimension n: Stations Stations Formula

25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon or carbon dioxide. 2-color display flow switch., Sensor and monitor separation, which allows remote monitors' centralization., Integrated flow adjustment valve as an option, reducing piping and saving space (unique feature in the market)., Operation indication also on the sensor., Fast response: either 50 ms, 0.5s, 1,

High Vacuum Angle Valve, XL Series

1 2 S 5 G Normally closed high vacuum straight solenoid valve Spacer Nil A None With spacer Solenoid size 1 2 No.1 No.2 Refer to Table 3 below in case spacers only are required separately. 3 No.3 Electrical options Orifice symbol Nil S None With surge voltage suppressor L With light 1 2 2 3 3 4.5 Z With light/Surge voltage suppressor 4 6 Refer to Table 2 below for applications.

MLGP

"n" pcs.

MLGP

"n" pcs.

ZP

Form w 1 Material 12 N S U F GN GS 02 2 2.6 1.2 0.5 04 4 4.8 1.6 0.8 06 6 7 2.5 08 8 9 1 ZP U Y C 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber A B Construction p. 115 Mounting Bracket Assembly From p. 121 Single unit 10 to 50 w q ZP 10 U N D Model A B C D E Y q Pad dia.

CNG

Thread type S 1 pc. Mounting style Nil Rc n n pcs. TN NPT B Basic style Auto switch L Axial foot style Nil Without auto switch F Rod side flange style For the applicable auto switch model, refer to the table below.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

2 pcs. 1 pc. n pcs.

CJ5-S

Without auto switch CG5 L N 25 S R 100 CDG5 L N 25 S 100 G5BAL R With auto switch Built-in magnet Number of auto switches 2 pcs. 1 pc. n pcs.

CJ5-S

pc. n pcs.