ITV_P-E

Power cable 1 Brown Power supply Vcc 2 White NC 3 Blue GND 4 Black Monitor output Signal cable 1 Brown Input signal 1 2 White Input signal 2 3 Blue Input signal 3 4 Black Input signal 4 5 Gray Common Common is no polarity.

VCHR

operated regulator (Air operated type) IN 2 22.0 MPa 2 port air operated valve Best Pneumatics No. 7 637 636

Manifold Regulator Modular Type ARM2500/3000 Series

x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3 JIS B 2401 P5 Hex. socket head cap screw 2 KA00299 KA00961 O-ring NBR 8 How to order (1) When adding n stations to ARM Regulator n pcs.

Digital Flow Switch (Remote type sensor unit)

The warranty period of the product is 1 year in service or 1.5 years after the product is delivered, whichever is first.2) Also, the product may have specified durability, running distance or replacement parts. Please consult your nearest sales branch. 2.

Precision Regulator

Note*) The bracket for IR1000 series is not compatibile with IR1000-A series Note 2) See pressure unit table below.

Slit Valve

2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

FGE-C

2 FGES L A FGES L B FGES L C 1) () (R) 12 (MPa) 0.7 () 80(60) 4 4 2)8 4 2)12 (mm) 6570250 6570500 (8 6570250) 6570750 (12 6570250) (MPa) 0.1 SUS304 SUS304 O FGESNBR FGELFKM SS400 (kg) 10 13 18 (L) 14 21 29 1) 2) 3) 3 1) (P5) ( ) 1 (2 ) /4 (1 ) () 2-1 2/12.5Nm / 2- 9/12 FGX-OM-L009-B 2) IN/OUT IN/OUT V P36 4 1) () 2) 0.1MPa() P910 5.

Membrane Air Dryer

Plug * Please do not remove Body Holder Air inlet port * Outlet port in case of Option R Purge air outlet port Case Front Back Fig 2.1 Names of parts (Example: IDG30A) -3- 2. Installations and Operations 2. Installations and Operations: Piping Air Supply Warning a.

TCU

-1-N-X6 TCU1065l-2-N-X6 L X 3.8 + 200 L X 5 + 200 6 4 N X 12 2 3 to 66 1 3 to 35 37 67 N X 12 TCU0604l -2-N-X6 TCU1208l-1-N-X6 12 8 L X 2.5 + 200 L X 3 + 200 37 N X 18 3 3 to 44 67 N X 24 2 3 to 30 TCU0604l -3-N-X6 TCU1208l-2-N-X6 B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Clear), YR (Orange) l 2.4-5

ALB900

1 1 1 1 1 2 2 2 1 Relay valve Pressure gauge Diaphragm assembly Valve assembly NLP seal PNY seal Wear ring O-ring NBR NBR Cloth-inserted phenol aldehyde resin NBR Glass fiber-inserted epoxy resin !2 1 Bowl assembly 126059-4A 126060 NBR !3 2 Seal Zinc die-casted !4 Lubrication plug assembly 1 126115AP NBR AF11-2 11307 !5 !

ZISE10.eng

(Model: ZS-39-R) Take care not to bend the claws of the DIN rail adapter when mounting. Engage the pressure switch with claw 2 of the DIN rail adapter, then press down horizontally on to claw 1 until it clicks.

Pilot Operated Regulator AR425 to 935 Series

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Semi-standard Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30

EX250-SEN_eng

Communicated at 100 Mbps 1 1 Communicated at half duplex 1 0 1 Communication method 1 White/Orange 2 Orange 3 White/Green 4 5 6 Green 7 8 1 2 3 4 +Tx +Rx -Tx -Rx Communicated at full duplex 1 1 2 1 2 3 1 2 4 SW1 CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: 5 Cable color: Signal name Pin No.

Digital Flow Switch (Remote type sensor unit)

The warranty period of the product is 1 year in service or 1.5 years after the product is delivered, whichever is first.2) Also, the product may have specified durability, running distance or replacement parts. Please consult your nearest sales branch. 2.

Jxx-OMT0084

J-OMT0084 P r o d u c t N a m e Lightweight and Compact Type Floating Joint Model / Series / Product Number JT series Contents 1. Safety Instructions-P. 3-7 2. Specifications -P. 8 3. Construction -P. 8 4. How to Order -P. 9 5. Dimensions -P. 9 2 Floating Joint Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

RS-232C-E

Vcc Brown 4 3 2. No Connect White Power supply connector 3. GND Blue 2 4. FG Black 1. No Connect Brown 4 2. TxD White 3 Communication connector 5 3. RxD Blue 1 2 4. GND Black 5. No Connect Gray Note1) Wire color is when the option cable is used.

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

Heavy Duty Stopper Cylinder ø 50, ø 63, ø 80 RS2H Series

Note 2) For details of the lever detection switch alone, refer to page 595. Transfer direction Transfer direction P R Applicable Auto Switches/Refer to pages 941 to 1067 for further information on auto switches.

IP Address Setting Tool (Interactive Type)

Note: EX600-SEN1/2 does not have L/A (LINK ACT) installed.