Air Cylinder Short Type Standard: Double Acting, Single Rod Series CM3 ø20, ø25, ø32, ø40 How to Order CM3 L 40 150 With auto switch CDM3 M9BW L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil Mounting 2 pcs. Bo

Standard Strokes JIS Symbol Double acting, Single rod Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 25, 50, 75, 100, 125, 150, 200, 250, 300 Other intermediate strokes can be manufactured upon receipt of order. Manufacture of intermediate strokes in 1 mm intervals is possible. (Spacers are not used.) Refer to pages 13 to 16 for cylinders with auto switches.

Compact Cylinder: Plate Type Double Acting, Single Rod Series CQU Size: 20, 25, 32, 40

Size Rod end thread 20 25 32 40 Piston area equivalent to 20 mm Piston area equivalent to 25 mm Piston area equivalent to 32 mm Piston area equivalent to 40 mm Rod end female thread Rod end male thread Nil M Cylinder stroke (mm) Size Stroke 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 20, 25 32, 40 Applicable Auto Switches/Refer to pages 13 through

Platform Cylinder Series CXT ø12, ø16, ø20, ø25, ø32, ø40

Nil S n Bore size/Stroke (mm) Stroke (mm) Bore size (mm) 15 25 50 75 100 125 150 175 200 250 300 Auto switch Nil Without auto switch (Built-in magnet) 12 16 20 25 32 40 For the applicable auto switch model, refer to the table below. Option Adjusting bolt with bumper only (Standard) Nil With 2 shock absorbers (Set on the driving cylinder side only when packed.)

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

3-phase 380 to 415 VAC (50/60 Hz) Allowable voltage range 10% (No continuous voltage uctuation) Electrical system Applicable earth leakage breaker (Standard) Rated current A 30 20 Sensitivity of leak current mA 30 Rated operating current 50/60 Hz5 A 16/18 8.4/9.1 Rated power consumption 50/60 Hz5 kW (kVA) 4.3/5.4 (5.5/6.0) 4.4/5.6 (5.8/6.3) Noise level (Front 1 m/Height 1 m)5 dB (A) 73 75

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

adjustment bolt RB 2015 + with adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt With adjustment bolt Configuration Shock absorber model MY1 W MY1 W 0 to 6 6 to 12 12 to 18 0 to 11.5 11.5 to 23 23 to 34.5 0 to 12 12 to 24 24 to 36 0 to 16 16 to 32 32 to 48 0 to 20 20 to 40 40 to 60 0 to 25 25 to 50 50 to 75

Air Cylinder Double Acting, Single Rod JCM Series ø 20, ø 25, ø 32, ø 40

Standard Strokes Bore size [mm] Standard stroke [mm] 1 20 25, 50, 75, 100, 125, 150, 200, 250, 300 25 32 40 1 Intermediate strokes not listed above are produced upon receipt of order. The minimum stroke is 25 mm. Mounting Brackets/Part No.

Thermo-chiller

, Bronze Resin PTFE, PU, FKM, EPDM, PVC, NBR, POM, PE, NR Power supply 3-phase 460 VAC (60 Hz) Allowable voltage range 10% (No continuous voltage uctuation) Electrical system Applicable earth leakage breaker (Standard) Rated current A 30 Sensitivity of leak current mA 30 Rated operating current5 A 14.2 Rated power consumption5 kW(kVA) 9.1 (11.4) Noise level (Front 1 m/Height 1 m)5 dB(A) 75

Series IDK Moisture Control Tube

Moisture Control Tube Series IDK Specifications IDK02 Model IDK04 Compressed air 0.7 MPa 0 to 40 (No freezing) IDK06 Fluid Max. operating pressure Operating temperature (C) Operating environment 1 Indoors, where product is not exposed to water (0 to 40C, Relative humidity 0 to 75%RH) 20 4 2.5 Min. bending radius 2 (mm) O.D. (mm) I.D.

Series 10-MGF Guide table ø40, ø63, ø100

Relief type Nil S Bore size (mm) Reed switch Type of auto switch Port type Z73 Solid state switch Y59A,Y59B Type Rc NPT G Bore size Symbol Nil TN TF 40, 63, 100 Cylinder stroke (mm) Model Cushion Bore size (mm) 40 63 100 Standard stroke (mm) Auto switch mounting Action Port size Lubrication Model Rubber Air 1/8 10-MGF40 10-MGF63 10-MGF100 (Both sides) Relief type Double acting 30, 50, 75

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

Fluid Air Proof pressure 1.5 MPa 1.0 MPa Maximum operating pressure 0.1 MPa Minimum operating pressure 10 to 60C (No freezing) Ambient and fluid temperature Piston speed Note) 50 to 500 mm/s Cushion Rubber bumper on both ends Lubrication Not required (Non-lube) +1.5 0 Stroke length tolerance mm Note) Speed with no load Standard Strokes Bore size (mm) Standard stroke (mm) 20 to 63 25, 50, 75

Plate Cylinder: Double Acting, Single Rod ø25, ø32, ø40, ø50, ø63 Series MU

tolerance Cushion Rubber bumper Mounting Foot, Rod flange, Head flange, Single clevis, Double clevis Rod end configuration Rod end male thread, Rod end female thread Allowable rotational torque 0.25 Nm 0.55 Nm 1.25 Nm 2.0 Nm Rod non-rotating accuracy 0.5 1 0.8 Standard Stroke (mm) Size Standard stroke (mm) Maximum manufacturable stroke 25, 32, 40 50, 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 75

MLU

locking, retraction locking, each type) 0.7MPa Symbol Maximum operating pressure Extension locking Retraction locking 245 403 629 982 M5 x 0.8 Rc, NPT, 1/8 Unlocking port connection size W Holding force N (maximum static load) Non-rotating Rod Accuracy W 25 1 32 0.8 40 0.5 50 0.5 Size Non-rotating rod accuracy Standard Strokes Size Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 75

Low Differential Pressure Sensor Series PSE550 ®

of 25C) Linearity Repeatability Indication light Enclosure Operating temperature range Operating humidity range Withstand voltage Insulation resistance Environmental resistance Vibration resistance Impact resistance Temperature characteristics Port size Material of wetted parts Sensor cable With sensor cable Without sensor cable 3-wire oval cable (0.15 mm2) 2-wire oval cable (0.15 mm2) 75

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3 S1 T1 U1 4079 SS592 SS630 SSE38 1232-70 3310-75

inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal 72.0 (4.0); 2 position rubber seal 79.2 (4.4) 3 position metal seal 41.4 (2.3) - 72.0 (4.0); 3 position rubber seal 45.0 (2.5) - 79.2 (4.4), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W: metal seal 20 or less to 62 or less; rubber seal 25 or less to 75

inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal 72.0 (4.0); 2 position rubber seal 79.2 (4.4) 3 position metal seal 41.4 (2.3) - 72.0 (4.0); 3 position rubber seal 45.0 (2.5) - 79.2 (4.4), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W: metal seal 20 or less to 62 or less; rubber seal 25 or less to 75

inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal 72.0 (4.0); 2 position rubber seal 79.2 (4.4) 3 position metal seal 41.4 (2.3) - 72.0 (4.0); 3 position rubber seal 45.0 (2.5) - 79.2 (4.4), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W: metal seal 20 or less to 62 or less; rubber seal 25 or less to 75

Series ZCUK is available in 5 bore diameters., CYL, FREE MOUNT, W/VACCUM *LQA, ACTUATOR, ZCU COMPACT CYLINDER, EE, 10MM ZCU DBL-ACT AUTO-SW, .29394 lb, ModelBore size (mm)Cylinder stroke (mm) 510152025304050ZC(D)UKQ1049(54)53(63)57(67)61(71)65(75)69(79)??

40, 50, 63, Standard stroke (mm): 50, 75, 100, 125, 150, 200, 250, 300, 350, 400, 450, 500, Rc, NPT or G port threads, Clean series, AME NO SIZE RAPART, AIRLINE EQUIPMENT, AME SUPER MIST SEPARATOR, 21, AME NO SIZE RAPART, 2.40722 lb