Exhaust Cleaner for Vacuum Pump AMV Series

AMV6-14 AMV15-20 AMV37-20 AMV75-30 AMV160-40 1.6 3.0 5.9 10 43 59 0.3 0.5 1.0 1.0 10 10 360 650 1,500 3,700 7,500 16,000 1 1 1/2 2 2 80 (3B) JIS 10K FF flange 360 650 1,500 3,700 7,500 16,000 100 (4B) JIS 10K FF flange Construction Gasket Cover Element Tension bolt No Description Material Component Parts 1 2 3 4 Holder Case Cover Tension bolt Aluminum alloy Carbon steel Carbon steel Carbon

ZSP1

ZS-10-5 A-50 1 pc. 0.6 m 30 3 m 50 5 m Specifications Model ZSP1-B ZSP1-S Fluid Air Operating pressure range 20 to 101 kPa Applicable adsorption nozzle dia. 0.3 to 0.7 (Refer to Graph (1) on page 16-7-3.) 0.5 to 1.2 (Refer to Graph (2) on page 16-7-3.)

IDX-OM-O004E

Specification for Option L 10 . 1 Safety instructions . 10 1 10 . 2 Specifications . 10 1 10 . 3 Installation of heavy duty auto drain . 10 2 10 . 4 Maintenance . 10 2 Chapter 11 Specification for Option M 11 . 1 Safety instructions . 11 1 11 . 2 Specifications . 11 1 11 . 3 Installation of motor type auto drain . 11 2 11 . 4 Electric wiring diagram . 11 2 Chapter 12 Specification for Option

CC

Conditions: Operating pressure 0.5MPa, Operating oil Turbine oil Class 1 (ISO VG32), Piping length 1m AS420-02, 03, 04 AS500-06 AS2000-01, 02 AS600-10 AS3000-02, 03 AS4000-02, 03, 04 Circuit 4.12-12

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 1.76369 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 3.66518 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 1.32277 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, .97003 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 2.20462 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 2.49122 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 1.50270 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, .86487 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 1.78317 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 2.20462 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 1.98415 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

6)2 to 10 stations: W = 22n + 11811 to 20 stations: W = 22n + 140, 1.05600 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X3-45SX3 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC8 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, .84791 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, .88000 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 2.53939 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?

8)2 to 10 stations: W = 47n + 15611 to 20 stations: W = 47n + 190, 1.10231 lb, ModelApplicable valveManifold typeP(SUP), R(EXH)Valve stations Note)A, B port specificationsPort sizeManifold base weight W (g) n: StationsLocationDirectionP, R portA, B portSS5X5-45SX5 40Stacking type/DIN rail mountedCommon SUP/Common EXH2 to 20 stationsBaseSideC10 (One-touch fitting for ?