Valve; w/Stop Valve), Return Port Size: 03 (3/8), Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector), Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated Flow

Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 04 (0.5~4L/min), Return Unit: P (Stop Valve), Thread: N (NPT), Port Size: 03 (3/8), Flow Switch Output: L2T (Integrated Display IO-Link Compatible; Out 1: IO-Link/Switch Output (N/P); Out 2: Switch Output (N/P) ; Temperature Sensor: Yes), Lead Wire: N (without Lead Wire), Flow Switch Unit: M (Integrated Display, IO-Link Campatible

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link

MQQ

W Mounting orientation: Horizontal Operating pressure: 0.5 MPa Allowable Lateral Load at Rod End Standard Type: MQQTB Anti-lateral Load Type: MQQLB/Built-in Ball Bushing Type 60 5 50 4 Maximum allowable lateral load W (N) Maximum allowable lateral load W (N) 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The allowable lateral load

MQQ

Selection Series MQQ Caution Operating Speed Allowable Kinetic Energy Anti-lateral Load Type: MQQ Load Weight and Maximum Speed: MQQT/MQQL Bore size (mm) Allowable kinetic energy (J) 10 16 20 25 28 1000 Example) Driving a load of 15 (N) using MQQ20 with a muximum speed of 167 (mm/s) 0.006 500 0.010 0.022 0.044 100 0.080 50 Load weight W (N) Cover range of MQQL (15) 10 MQQ28 5 MQQ25 MQQ20

Process Pump Series PA3000/5000/PAX1000 Series PB1000

attenuator Automatically operated type T, F, N are order made specifications.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

pulsation attenuator Automatically operated type T, F, N are order made specifications.

CDQ2BP series

Both Ends Tapped: CDQ2APN-IDM-trN a63, sBO Nole: Olher dlrensions ars same as rhirugh hoLe type 4w rhhrrrasrutuFirrilMshrmm $enieS Cl|l|ZBP Foot Mount: COOZT-P E -EOU-trf Rod Side Ftange: cDQ2FP n-trDM-!

SMC Pneumatic Clean Series

Bore size NTJ-010A NTJ-006A 8 6 M3 x 0.5 2.4 5.5 6.4 5.5 6.5 M3 x 0.5 6 12.5 M4 x 0.7 3.2 7 8.1 7 8.5 M4 x 0.7 8 14.5 NTJ-015A 10 M5 x 0.8 4 8 9.2 10.5 M5 x 0.8 16.5 10 9 (mm) Standard C D E F B A J K L M N O P G H I Bore size 8 6 M2.5 x 0.45 13 7 7 10 9 19 3 5 4 9 3.5 8 7 5.3 24 M3 x 0.5 13 7 8 11 10 21 3 6 5 11 4.5 10 8 5.3 25 10 13.5 M3 x 0.5 7 8.5 11.5 10.5 22 3.2 6 6 12 5 11 8.5 5.6

180

Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 25 Gripping force (N) External grip Gripping force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20 0.1 0.1 5 L L 0 20

VXP21/22/23

M N M N M M N Q L K J H F E D C B A P Applicable thread Pc Normally open Normally closed VXP2270 VXP2380 VXP2390 VXP2272 1 43.5 46.5 52 51.5 54.5 59 53 60 71 67.5 72 81 48 50 50 95 97 97 62 64 64 125 132 150 128 (145) 144 (159) 160 (175) 26.5 30 35.5 57.5 60 69 23 25.5 25.5 35 40 40 92 (102) 103 (113) 114 (124) 25.5 28 28 84 (94 ) 95 (105) 106 (117 ) 41.5 84 (94) 95(105) 106(117) 60 62 62

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

HRX-OM-R016

Plug (Prepared by customer) L N E [Accessory] Power supply connector N Earth leakage breaker (Secondary side) E L Cable Crimped terminal (Prepared by customer) N E (Earth) L Cable size : 14AWG Wire tightening torque : 0.5Nm Fig. 3-5 Power supply cable 3.3 Installation HRS Series 3-10 HRX-OM-R016 Chapter 3 Transport and Setting Up Wiring 1.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 Gripping force (N) Gripping force (N) 25 External grip 0.4 0.4

ML1C

Holding force 25 320 N 32 500 N 40 800 N CNG MNB CNA2 CNS Brake construction is designed not to allow loads on guide. CLS Spring force works directly on the brake-shoe and the brake plate is caught between brake shoes from top and bottom so that the slide table can stop without compromising guide performance.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa 0.5 40 8 0.5 Gripping force (N) Gripping force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Gripping point L (mm) 40 0 30 40 60 70 Gripping point L (mm) 50 80 MHY2-16D MHY2-25D F F F F 35 100 Pressure 0.6 MPa Pressure 0.6 MPa 30 0.5 0.5 80 Gripping force (N) Gripping force (N) 25 External grip 0.4 0.4

AR Series Modular Type Regulator

E P.450 to 457 AV AF Made to Order 0.4 MPa Setting (-X406) The maximum set pressure is 0.4 MPa. When a pressure gauge is included, the display will show a range from 0 to 0.7 MPa. q P.456, 457 0.85 MPa Setting (-X2068) The maximum set pressure is 0.85 MPa.

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Lead screw type Ground ball screw Rolled ball screw Slide screw P N S Motor output 100W 2 Power supply voltage 100/110VAC (50/60Hz) 100/115VAC (50/60Hz) 200/220VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor 1 The tables above show the definition for each symbol only and cannot be used for actual model selection. 2 0

MTS

(N) 32 12 0.3 0.5 Deflection (mm) Deflection (mm) MTS32-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st 0.2 MTS12-100 st 75 st 0.1 50 st 25 st 0 50 100 0 5 10 Lateral load (N) Lateral load (N) 40 16 0.3 0.3 MTS40-200 st 175 st 150 st 125 st 100 st 75 st 50 st 25 st Deflection (mm) Deflection (mm) 0.2 0.2 MTS16-100 st 75 st 50 st 25 st 0.1 0.1 0 50 100 150 0 10 Lateral load (N) Lateral