SI Unit for Vacuum Manifold

Pressure P2 (Index 66) Table 3-11. Pressure P2 Sub Size Acc ess Default (dec) Content Description index [byte] 1 2 R/W 0x02EE Energy saving operation threshold (P2) of CH0 Set energy saving operation threshold (P2) for each CH. Refer to Section 5.

ZQ-OM01401

No.ZQ-OM01401-B 8.6 1 2 32 4 5kPa ( ) 5 6) 7 31 - No.ZQ-OM01401-B 9. 9.1 ZQA [] 5 to 50 () 2] 1) 20 [m/s 2] 2) 100 [m/s CE / UKCA (EMC RoHS ) 1) 10~150Hz X,Y,Z 2 () 2) X,Y,Z 3 () ZQ05A ZQ07A ZQ10A [mm] 0.5 0.7 1.0 [MPa] 0.35 0.43 1) -80 [kPa] 1) 5 10 22 [L/min (ANR) ] 1) 15 25 47 [L/min (ANR) ] (P) 0.3 to 0.5 2) 0 to 0.45 3) [MPa] (PD) [MPa] 0.75 8 6 4 65 68 70 4) () 64 66

IDX-OM-N030

point oC 10 Exhaust heat amount of unit kW 7.5 9.0 11.5 Power supply voltage (frequency) 3 phase AC380V (50Hz) specifications Electric Power consumption Note 4) kW 2.8 3.4 3.4 Running current A 5.1 6.3 6.3 Applicable ground fault circuit interrupter capacity (Sensitivity current: 30mA) Note 5) A 15 Refrigerant R407C (HFC) Refrigerant Charge Quantity g 125010 136010 200010 Sound level dB(A) 66

Line Filter

P A B C D G J M N Q R S T U V B AFF50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AFF60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.

Mist Separator

P A B C D G J M N Q R S T U V B AM50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AM60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.

Micro Mist Separator

P A B C D G J M N Q R S T U V B AMD50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AMD60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.

Activated Carbon Filter

P A B C D G J M N Q R S T U V AMK50 3/41 90 222 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 AMK60 1 90 299.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 -16- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of

Profi-E

S. or l ess Am bi ent t em perat ure 0 t o 50( N o f reezi ng) St andards CE m arki ng, U L( CSA) Prot ect i ve st ruct ure I P65 I P65 equi val ent M odel I TV10 0 I TV20 0 I TV30 0 Si ze ( m m m m m m ) 50 50 124 50 50 146 66 66 167 W ei ght ( N o opt i on) 350 450 750 9 Com m uni cat i on speci f i cat i on ( Com m on) I t em Speci f i cat i ons Rem arks Com m uni cat i on prot ocol

CC-Link-E

S. or l ess O perat i ng t em perat ure 0 t o 50( N o dew condensat i on) St andards CE m arki ng, U L( CSA) Encl osure I P65 I P65 equi val ent M odel I TV10 0 I TV20 0 I TV30 0 Si ze ( m m m m m m ) ( W i t h adapt or) 50 50 161 50 50 183 66 66 204 W ei ght ( N o opt i on) 330 430 730 9 Com m uni cat i on speci f i cat i on ( Com m on) I t em Speci f i cat i ons Rem arks Fi el d bus CCLi

DeviceNet-E

S. or l ess O perat i ng t em perat ure 0 t o 50( N o dew condensat i on) St andards CE m arki ng, U L( CSA) Encl osure I P65 I P65 equi val ent M odel I TV10 0 I TV20 0 I TV30 0 Si ze ( m m m m m m ) 50 50 109 50 50 131 66 66 152 W ei ght ( N o opt i on) 320 420 720 9 Com m uni cat i on speci f i cat i on ( Com m on) I t em Speci f i cat i ons Rem arks Fi el d bus D evi ceN et Rel ease2

PSxx-OMU0005CN

No.PS-OMU0005CN-C // ZSE20B(F) ISE20B 2 8 10 11 15 15 17 20 [] 23 24 3 25 27 29 29 29 F0 31 F1 OUT1 32 F1 OUT2 35 F3 37 F4 38 F5 FUNC 40 F6 42 F10 43 F11 49 F80 50 F81 51 F82 53 F90 54 F96 56 F97 57 F98 59 F99 61 62 66 66 67 76 76 79 -1No.PS-OMU0005CN-C (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

EX500-GPR1A.eng

SI unit for SV series valves ( EX500-S 01 ) ( EX500-Q 02 ) PWR PWR COM COM 64.4 80.3 64.4 28 66 84.8 79.4 68.5 80.3 series 54.5 60 60 43.2 43 43.2 22.2 22 22.2 13 10.5 28.6 44 0 1 36 10.5 1 0 22 23 The mounting and removing methods of SI unit are as shown below.

C95

72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 6.6 7 8 11 10 38 51 10 21 18 26 31 32 10 40 9 10 11 12 41 54 10 24 22 28 35 36 11 6.6 50 9 11 12 15 12 50 65 12 33 30 32 45 45 12 63 11 12 15 16 52 67 14 37 35 40 50 50 15 9 80 11 12.5 14 18 16 66

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

With Rod Boot Bore size (mm) e f h ZZ Stroke range (mm) l 40 50 63 80 100 20 to 500 43 11.2 59 1/4 stroke 154 20 to 600 52 11.2 66 1/4 stroke 167 20 to 600 52 11.2 66 1/4 stroke 178 Dimensions of the mounting brackets are the same as those of the standard double acting single rod type.

Compact Slide ø 6, ø 10, ø 16, ø 20 MXH Series

141 101 OUT 60 201 6 16 121 86 IN 51 172 220 157 OUT 94 314 8 20 185 132 IN 79 264 Weight (g) Stroke (mm) Model 5 10 15 20 25 30 40 50 60 134 216 343 610 120 195 316 562 107 174 288 514 93 153 260 466 88 146 250 448 80 133 232 417 75 125 222 400 66 112 204 369 61 104 194 352 MXH6 MXH10 MXH16 MXH20 20

Exhaust Cleaner for Clean Rooms AMP Series

80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 Station 2 50 41 Station 20 338 329 3 66 57 4 82 73 5 98 89 6 114 105 7 130 121 8 146 137 9 162 153 10 178 169 11 194 185 12 210 201 13 226 217 14 242 233 15 258 249 16 274 265 17 290 281 18 306 297 19 322 313 Port size One-touch fitting 26 Series SYJ500 Type 41 Manifold: Side Ported/SS3YJ5-41Stations -M5, 01 [ ] for AC For 1/8 Grommet (G) For M5 (Pitch) P=16 18 (Pitch) P

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

19 4-LD X X LG LS + Stroke Y Y LT 16 10 to 60 51.2 34 10 6.6 4 24 LX LZ 20 10 to 60 54.7 37.5 10 6.6 4 26 A + Stroke 25 10 to 50,75,100 61.2 42 12 6.6 4 30 30 10 to 50,75,100 67.7 48.5 12 6.6 4 33 25, 30, 40 L B + Stroke 40 10 to 50,75,100 70.2 50 12 9 5 39 Bore size (mm) LS LT LX LY LZ X Y M LY 10 19.5 2 38 33.5 48 8 5 LH 16 22 3.2 48 42 62 9.2 5.8 X X LG Y Y 4-LD LT 20 22.5 3.2 52 46 66

Compact Cylinder with Lock Series CLQ

Dimensions/20, 25 Foot type: CLQL/CDLQL Special cap bolt L G B + Stroke Foot type (mm) LY LH S Stroke range Without auto switch With auto switch Bore size (mm) B 78.2 85.7 19.5 22.5 68.2 75.7 A LS A B 34.5 38.5 LS X 5.8 5.8 X 4 3.2 29.5 32.5 44.5 48.5 5 to 50 5 to 50 20 25 4-6.6 LZ LX LS + Stroke A + Stroke Bore size (mm) G LH L L1 LX LY LZ X S 14.5 15 27 31 28.5 32.5 24 26 48 52 42 46 62 66

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

M10 x 1.5 9 32 32 46 22 8.6 14 1/4 47 40 130 60 146 110 130 50 M10 x 1.5 14 28 39 39 58 22 8.6 14 1/4 55 50 130 70 158 124 142 63 M10 x 1.5 9 M10 x 1.5 WA WB Bore size (mm) VB X XA XB XC XL YY YL Z st25 2566