10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

CNS

40 90 63 43 14 19 20 236 118 275 215 Up to 1200 Bore size (mm) VA GB GL GR K KA M N P Q R S T V H ZZ J MA MM 125 140 160 87.5 23 25 30 15 31 19 35 1/2 25 303 20 23 110 427 M14 x 1.5 M12 x 1.75 M30 x 1.5 85.5 95 28 30 30 15 31 19 35 1/2 25 343 20 28 110 473 M14 x 1.5 M12 x 1.75 M30 x 1.5 93.5 109 35 35 35 17 36 22 39 3/4 25 396 25 35 120 536 M16 x 1.5 M12 x 1.75 M36 x 1.5 104 With Rod Boot

MB

) Stroke range Width across flats Effective thread length 32 40 50 63 80 100 B C A E F G H MA MB J MM N V W M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 4 4 5 5 5 5 12.2 14.2 19 19 23 27 47 51 58 58 72 72 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 27 31.5 31.5 38 38 135 139 156 156 190 190 30 35 40 45 45 55 22 30 35 35 40 40 19.5 27 32 32 37 37 32.5 38 46.5

Cylinder with Lock Series CNS

144 20 40 40 90 63 43 14 18.5 215 35 35 to 1200 + 0.100 0 0.1 0.3 (mm) Bore size (mm) GR J K KA L M MA MM N P Q R RR S T U V VA H Z ZZ 125 140 160 30 M14 x 1.5 15 31 65 19 M12 x 1.75 M30 x 1.5 35 1/2 85.5 25 29 303 87.5 35 20 23 110 478 507 30 M14 x 1.5 15 31 75 19 M12 x 1.75 M30 x 1.5 35 1/2 93.5 25 32 343 95 40 20 28 110 528 560 35 M16 x 1.5 17 36 80 22 M12 x 1.75 M36 x 1.5 39 3/4 104

CLS

BD BE BG BZ BW BP C D EA GB GC H J K MM MA MB BY BV AL E F KA FA N GA M 145 75 18 110 136 115 90 90 90 115 115 140 16 107 58 110 M14 x 1.5 27 M30 x 1.5 50 50 56 63 63 71 1/4 1/4 1/4 3/8 3/8 1/2 36 36 40 45 50 60 59 59 59 70 74 86 15 15 17 20 20 25 47 47 53 60 60 67 43 43 43 48 48 60 31 31 36 41 46 56 14 14 14 17 17 20 35 35 39 39 39 49 Up to 1000 3 5 30 46 M14 x 1.5 M30 x 1.5 161 78 18

LEC-OM07605CN

PF25 SEMI-F47 (Tough Drive)] [AL.10.1] 0h x _ _ _ 0h PA21 *AOP3 A-3 _ _ _ x 0 1 0(MR Configurator2) 1h _ _ x _ 0h _ x _ _ 0h x _ _ _ 0h PA22 **PCS _ _ _ x 0h _ _ x _ 0h _ x _ _ 0h x _ _ _ 0 1 2 [AL.37 ] 0h 5 19 5. [] PA23 DRAT _ _ x x 0 0 00h x x _ _ 0 0 00h [AL.50 1]5000 [AL.50.3 4]5003 PA24 AOP4 A-4 _ _ _ x 0 1: 3 2 23(_ _ _ 1) (_ _ _ 2)) 2 3 3 0h _ _ x _ 0h _ x _ _ 0h x

Lightweight and Compact

HRZ x V x C x iT it m x C x (T0 Tt) it Q = = HRZD 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 HRW Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = HECR 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = HEC Q x t: Heat capacity [kJ] Thermo-chiller Water bath 6977 [W] = 7.0 [kW] 20C HEB Cooling

Modular Type Lubricators Series AL

Note 3) Bowl assembly for the AL30 to AL60 models comes with a bowl guard (steel band material). 511 Series AL10 to AL60 Dimensions AL10 AL20 J M U T N S D Bracket (Option) A B C R B C Q IN OUT IN OUT OUT 2 x P (Port size) OUT 2 x P (Port size) Clearance for maintenance G Clearance for maintenance A G AL30, AL40 AL50, AL60 Bracket (Option) T N S T M U M U D J D J N S Bracket (Option) R B

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Copy Function, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

CNG

4-LD LX LZ Y X M K A X Y LS + Stroke 2-LC (knock pin position) ZZ + Stroke e ZZ + l + Stroke h + l f 8 l With rod boot (mm) Stroke range with rod boot Standard Long stroke Stroke range without rod boot Standard Long stroke 20 25 32 40 Bore size (mm) A AL B1 BC BN BP BZ C D GA GB GC GK GL GR GQ H1 I J 10 (12) 5.5 M4 x 0.7 to 200 20 to 200 85 18 15.5 13 38 93 1/8 50.5 14 8 18 6 4 8 5 26 201

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

19 1.5 4-M5 x 0.8 Prepared hole dia. 4.2 4-M4 x 0.7 depth 4.5 Piping port 2-M5 x 0.8 (Plug: M-5P) 22 0.05 W 8 0.05 33 D B Operating port 2-M5 x 0.8 10 J 5 Mounting reference planes B D 12 9.5 Section AA MXP12-25B Without magnet and switch rail 2-M2 x 0.4 depth 3 For magnet mounting 8 2-M3 x 0.5 depth 3.5 For rail mounting 5.7 3.5 6-M4 x 0.7 depth 4.5 20 20 L (mm) L K MA V J S Z H M W Model

Cylinder with Lock Series CNG

4-LD LX LZ Y X M K A X Y LS + Stroke 2-LC (knock pin position) ZZ + Stroke e ZZ + l + Stroke h + l f 8 l With rod boot (mm) Stroke range with rod boot Standard Long stroke Stroke range without rod boot Standard Long stroke 20 25 32 40 Bore size (mm) A AL B1 BC BN BP BZ C D GA GB GC GK GL GR GQ H1 I J 10 (12) 5.5 M4 x 0.7 20 to 200 to 200 85 18 15.5 13 38 93 1/8 50.5 14 8 18 6 4 8 5 26 201

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

M 2-J, thread depth K 2-J, thread depth K DIN terminal: D Conduit terminal: T D S F Q Cable 6 to 12 Q 2 F 34 G1/2 D 25 T C C R R Width across flats H Width across flats H E E S 2 2-P Port size A B 2-P Port size A B M M 2-J, thread depth K 2-J, thread depth K G1/2 Specifications with bracket Orifice 2, 3, 4.5, 6 Orifice 8, 10 7.5 2.3 Bracket Y 29 Mounting hole 2-5.3 Bracket 22 5.5 52 28

CNG

TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20 M10 x 1.25 M6 x 1 depth 12 6 14 M14

Slider Type/Ball Bushing Bearing

J 2 x M5 x 0.8 Hollow shaft for piping Auto switch mountable 4 x MM Depth M Depth JK 4 x LD 4 x Counterbore dia.

CM2

1.25 M20 x 1.5 9 14 15.5 13 25 5 28 5 15 24 1/8 133 142 20 -X 0 0.033 25 45 8 13 10 30 22 19 62 9 10 30 M10 x 1.25 M26 x 1.5 9 14 19.5 17 25 6 33.5 5.5 15 30 137 146 1/8 26 0 0.033 32 45 8 13 12 30 22 19 64 9 10 30 M10 x 1.25 M26 x 1.5 9 14 19.5 17 25 6 37.5 5.5 15 34.5 139 148 1/8 26 200 0.039 40 50 11 16 14 38 24 30 88 10 15 39 M14 x 1.5 M32 x 2 11 18 21 22 41.2 8 46.5 7 21.5 42.5 177 188

Cylinder with Lock Series CLS

59 D 30 W 14 AL 5 N N A K 43 C B S + Stroke BY H M ZZ + Stroke With rod boot 75 l 15 40 h + l ZZ1 + l + Stroke (mm) Bore size (mm) Stroke range (mm) 125 140 160 K KA M MM A AL B BA BB BC BY BZ C D GA GB GC J 15 31 27 M30 x 1.5 50 47 145 75 18 110 136 115 36 16 107 58 M14 x 1.5 to 1000 15 31 27 M30 x 1.5 50 47 161 78 18 2 110 146 128 36 16 114 64 M14 x 1.5 to 1000 17 36 30.5 M36 x 1.5 56