B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62
L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 L2 Q 18 61.6 58.2 2.0 2.0 29 29.1 44.5 14.5 1 27 22 16.5 26 41 29.1 16.5 3.5 11 1.2 26 23 11 30 54 51 11 M5 M5 M5 VHK-B1A VHKm-01S-M5 VHKm-M5-M5 1 8 18 41 32.6 16.5 3.5 11 44.5 14.5 1 27 22 16.5 26 8.6 1.2 13 57 13 VHK-B1A VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5
B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62
M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.
Stroke: S MXP16-20B 4 x M5 x 0.8, depth 7 A H Width across flats 12 40.8 MA 10.5 24.3 17.1 14.4 11 5 M8 x 1 11 27.3 35 34 8.5 4H9 0 +0.030, depth 4 4H9 0 +0.030 , depth 4 19 6.5 A Piping port 2 x M5 x 0.8 (Plug: M-5P) 4 x M6 x 1 Pilot hole diameter 5.1 320.05 30 D B 2 x M5 x 0.8 Piping port 80.05 W 13 47 4H9 0 +0.030, depth 2 J 8 5 16.5 14.5 Section AA Mounting datum level D B 4H9 0 +0.030
11 10 10 14 14 13 14 11 11 11 12 5.5 7 7 9 38 41 41 41 86 96 97 105.5 20 24 24 24 5 6 6 8 19.5 24 24 24 141 151 154 169 33 38 39 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 Up to 200 Up to 300 Up to 300 Up to 300 0.25 stroke Long Stroke/Refer to pages 9-2-30 to 9-2-32 for mounting dimensions except the table below.
11 15 17 10 14 18 18 22 26 27 36 5 7 8 8 10 10 13 16 23 27 30 31 37 40 45 55 11 11 14 14 19 19 42 52 74 84 90 98 116 126 160 180 17 19 24 24 30 30 41 55 136 153,5 173 184,5 215 231 287 340 36 40,5 45 48,5 52 57 65 80 6 6 10 10 16 20 15 15 7 10 11 11 11 12 20 25 10 10 10 10 14 14 26 31 32 40 50 63 80 100 125 160 C92S B-Stroke W Bore (mm) AM D EE G H J KK K KW M N S SW VD WH ZZ B 22 24 32
level gauge B B AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 81.5 122 142 177 177 254 268 162 197 197 274 288 Model Port size A B C D LL M P E F G H J K Bracket mounting dimensions N 324(374) 334(384) 334(384) 336(386) 336(386) 38 41 39 45 45 106 106 106 106 106 53 70 75 90 95 70 70 70 70 70 66 66 66 66 66 25 18 16 35 35 11 11 11 11 11 3.2 3.2 3.2 3.2 3.2 13 13 13 13 13 90 90 90 90
136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178 170 16 188.5 180.5 17 199 191 18 209.5 201.5 19 220 212 SS5YJ3-32, S32Stations -C4 Station n L1 L2 Station 2 42.5 33.5 Station 20 231.5 222.5 3 53 44 4 63.5 54.5 5 74 65 6 84.5 75.5 7 95 86 8 105.5 96.5 9 116 107 10 126.5 117.5 11 137 128 12 147.5 138.5 13 158 149 14 168.5 159.5 15 179 170 16 189.5 180.5 17 200 191 18 210.5 201.5 19
Functions p. 13 Internal Circuits and Wiring Examples p. 13 Dimensions p. 15 How to Order p. 9 Specifications p. 10 Set Pressure Range and Rated Pressure Range p. 13 Functions p. 13 Internal Circuits and Wiring Examples p. 14 Dimensions p. 15 5 High-Precision Digital Pressure Switch ZSE20m(F)/ISE20m Series 3-Screen Display IP65 2 outputs ZSE/ISE20B p. 11 IP65 2 outputs ZSE/ISE20C p. 19 Air
O.D. 4 6 2.5 4 5 6 6.5 7.5 8 9 KFE04-00 KFE06-00 KFE08U-00 KFE08N-00 KFE10U-00 KFE10N-00 KFE12U-00 KFE12N-00 12 14 50.9 15.5 15.2 1.5 3 1.6 9 37.6 10 12 13 17 23 34 47 46 67 66 87 85 MS 51.3 11 6 11 17 21 30 35 45 38 4 5 5.5 6.5 7 8 52.3 16.2 13 17 39 14 19 8 T 10 56.6 18.8 16 19 42 17 22 VMG 59.5 19.3 18 22 46 19 24 12 2-applicable tubing Mounting plate thickness 4 mm or less Male Run Tee
228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 4-13-10
Location where vacuum pressure is measured Piping length (m) Vacuum source Adjust the measured vacuum pressure using a regulator to be the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031
) 27-28 11-3 External feet back lever (Type IP8000) 28 11-4 Resin Cable cramp unit ( Type non-explosion protection) 28 11-4 Scale plate unit 29 13.How to order 30 14.Attached Drawing 31-37 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.
16.5 20 24.5 22 34 43.5 58 73 28 37 54 71 80 14.5 19 28.5 35.5 44.5 -X M8 x 1.25 20M10 x 1.5 M12 x 1.25 Data RE 12.5 14 22.5 26 33 RF RG SA SB 4 6 12 15 20 SC 1.4 1.8 2.2 2.8 3.4 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 8.5 8 10.5 11 13 33 43 62 82 93 14.5 18.5 27 36 42 10-11-13 13 Series MIW/MIS Dimensions: Single Finger Type MIS-D GC GB GD PE FC LB FA B JA FB LC 2-GA EB JB Scraper
44.5 28 37 54 71 80 22 34 43.5 58 73 9 12.5 16.5 20 24.5 6 7 10 12 15 -X M8 x 1.25 20M10 x 1.5 M12 x 1.25 Data RE 12.5 14 22.5 26 33 RF RG SA SB 4 6 12 15 20 SC 1.4 1.8 2.2 2.8 3.4 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 8.5 8 10.5 11 13 33 43 62 82 93 14.5 18.5 27 36 42 10-11-13 13 Series MIW/MIS Dimensions: Single Finger Type MIS-D GC GB GD PE FC LB FA B JA FB LC 2-GA EB JB Scraper
Servo amp lifier Driver (Note 7) (Note 7) CN1 CN1 (Note 2) 24VDC RA1 (Note 4, 9) 2 OPC 9 ALM Trouble (Note 6) 1 DICOM Travel completion 10 MEND RA2 13 DOCOM (Note 9, 11) (Note 13) Ready EM1 SON MD0 8 4 3 (Note 3, 5) Forced stop 11 RD RA3 Servo-on Electromagnetic brake interlock 12 MBR RA4 Automatic/manual selection DOG (Note 9, 10, 12) 25 Proximity dog 10m max. Point table No.
11 11 11 V 124 144 169 194 219 W V A 34.5 34.5 59.5 34.5 34.5 34.5 B 235.5 260.5 135.5 160.5 185.5 210.5 MXW16 W 14.5 14.5 39.5 14.5 14.5 14.5 V 225.5 280.5 155.5 180.5 205.5 230.5 A 43.5 43.5 43.5 43.5 68.5 43.5 43.5 B 293.5 318.5 243.5 268.5 168.5 193.5 218.5 MXW20 W 23.5 23.5 23.5 23.5 48.5 23.5 23.5 V 313.5 338.5 263.5 288.5 188.5 213.5 238.5 A 44.5 44.5 44.5 44.5 44.5 44.5 86.5 74.5
11 14 Parts List Note Material No.
Description Qty. 4 Seal 1 4 Seal 1 4 Seal 1 4 Seal 1 Parts included 11 Gasket 1 11 Gasket 1 11 Gasket 1 11 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 12 Gasket 1 in seal kit 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 16 Wear ring 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 17 Piston seal 4 Please refer to P19 to 21 for the product construction.