CNG

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing December, 1998 D-SMC.L.A. P-86.5 (JT)

Electric Actuators

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

HAA

HAl Accessories (Options) HAA7 AT Auto drain Applicable Model HAA7 HAA15 HAA22 HAA37 HAA7-F AD402-03 HAA7-S HAA15-F AD402-03 HAA15-S HAA22-F AD402-03 HAA22-S HAA37-F AD402-04 IDl Dust protecting filter Mounting bench HAA37-S AMG How to Select (Flow Capacity l/min (ANR)) Operation Principle AFF Model HAA7 HAA15 HAA22 HAA37 AMl 50C 70C 100C 1000 1500 700 2200 4000 1500 3300 6000 2200 5700 13000

MB1

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing January, 1998 D-SMC.L.A. P-83.5(YG)

Table of Contents

-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200

Air Cylinder Series MB

Bore size (mm) Part No. l Dd9 L m d H B C D Applicable cotter pin 3 X 18 l 4 X 25 l 4 X 35 l 4 X 40 l 0.040 0.076 0.050 0.093 0.065 0.117 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 NT-12M CD-M03 CD-M05 CD-M08 IY-12 32 40 50, 63 80 100 125 32, 40 50, 63 80, 100 125 10 14 22 25 36 51 72 44 60 82 4 4.5 5 5 3 4 4 4 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 M27 X 2.0 6 8 11 13 16 16 17

α PneuAlpha HARDWARE MANUAL

Input number 03 ashing on the display. Pressing the + key will move the screen to Input number 04. Inputs, Outputs, Keys, and Memory bits can be accessed in this manner.

ITV

Connection Rc 1/4 02 Connection Rc 3/8 03 AV eL-bracket Connection Rc 1/2 04 Bracket B Accessories AU 178 Bracket C Connection NPT1/4 N02 qAF30 wAFM30 AF Connection NPT3/8 N03 Connection NPT1/2 N04 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connection G 1/

VCB

Nil N F Rc NPT G OUT 1 IN Port size Symbol 01 02 03 04 06 Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Voltage 1 2 3 4 36 100VAC 200VAC 110VAC 220VAC 230VAC Orifice size Consult SMC regarding other voltages.

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: W (w/Flow Adj.

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Series LVH is a manually operated valve, available in a threaded or integral fitting type.Manually operated, integral fitting valve, Body class: 2 (ø4 orifice dia.), 3 (ø8 orifice dia.), 4 (ø10 orifice dia.), Normally closed (N.C.), Applicable tubing size: 03 (ø3), 04 (ø4), 06 (ø6), 08 (ø8), 10 (ø10), 12 (ø12), 03 (1/8"), 05 (3/16"), 07 (1/4"), 11 (3/8"), 13 (1/2") HIGH PURITY CHEMICAL VALVE

Stations: 03 (3 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

Stations: 03 (3 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: Flow Adj.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

AMD

B 1 4 B 3 8 04 B 1 2 1 B 1 2 20 2B 1 4 B IN-OUT reversal direction T Element service indicator Option AMD800 to AMD1000 Self-standing type AMD801/901 Piping support type 20 01 AMD 8 20 00 AMD 8 Port size Body size Port size Body size 8 8 20 2B flange 30 3B flange 20 2B flange 30 3B flange 9 9 10 40 4B flange 40 4B flange 60 6B flange Type Type 00 With manual drain cock 10 With auto-drain

AME

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.