%silltr

Tube Dia, (mm) Material Lenqth Fittinss Total 0.5 m tube + 2 stn. fittinss l m 0.5 m Inserrype One'louch straisbt elbow sraight elbow 4 x 2 . 5 N,U 1.86 3.87 1.6 1.6 5.6 4.2 1.48 3.r8 6 x 4 N,U 6.12 7.78 6 6 l 3 . l t.4 3.72 5.96 8 x 5 U 10.65 13.41 l l (9.5) l l l 8 t4.9 6.73 9.23 8 x 6 N t6.& 20.28 l 7 (t2)l6 26.1 2t.6 10.00 r3.65 l0 x 6.5 U 20.19 24.50 35 (24r 30 29.5 25 r2.70 15.88 l0

IDX-OM-W019

Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical maintenance . 4 1 Chapter 5 Troubleshooting . 5 1 Chapter 6 References 6 1 Specifications . 6 1 6 2 Specifications . 6 1 6 3 Dimensions . 6 2 6 4 Electric wining diagram . 6 4 IDFB Series Table of Contents 1 IDX-OM-W019 Air dryer Table of Contents 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 6 Chapter 7 Specification

SMC Basic Pneumatics

Tube Dia, (mm) Material Lenqth Fittinss Total 0.5 m tube + 2 stn. fittinss l m 0.5 m Inserrype One'louch straisbt elbow sraight elbow 4 x 2 . 5 N,U 1.86 3.87 1.6 1.6 5.6 4.2 1.48 3.r8 6 x 4 N,U 6.12 7.78 6 6 l 3 . l t.4 3.72 5.96 8 x 5 U 10.65 13.41 l l (9.5) l l l 8 t4.9 6.73 9.23 8 x 6 N t6.& 20.28 l 7 (t2)l6 26.1 2t.6 10.00 r3.65 l0 x 6.5 U 20.19 24.50 35 (24r 30 29.5 25 r2.70 15.88 l0

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

32 24 15 17 9 1/8 (P, R port) 42 L plug connector (L): 10-SYJ54M-L-01 M plug connector (M): 10-SYJ54M-M-01 DIN terminal (D, Y): 10-SYJ54MD Y-01 M8 connector (WO): 10-SYJ54M-WO-01 Approx. 300 (Lead wire length) 65.5 [67.7] Applicable cable O.D. 3.5 to 7 82.4 74.9 49.6 [56.6] Max. 10 63.6 34.2 M8 x 1 48.5 54.1 36.6 Approx. 300 (Lead wire length) 60.7 [67.7] Pg7 6 6 6 6 75.5 74.6 55.7 [57.9]

Fieldbus system EtherCAT compatible SI Unit

Input 8 to 15 Byte 6 Total 7 bytes Total 6 bytes 1: Refer to "Parameter Setting" (page 54) for setting the byte order of analogue value.

EXxx-OMW0014CN

) 4M*(() . 3-1 6 (VQC4000 5 ) 14 No.EX-OMW0014CN-A 3.1.1.

SFOD-OMT0005CN

2 (L) A A-1 1 B B-2 6 8 8m * B A-2 5 COM-A/COM B-3 3 A 10m * COM-B/ A-3 4 B 15m * (3) Shield C 20m * Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (14.2) (2) 1 2 (5.5) (14) (1) B1 A1 5 6 (17.7) (3) 2 1 (18) A6 B6 (6.3) 15 16 (11) (30.7) -58- 14.3 ()[5m ] (1) (2) LE CP B A B-1 2 A A-1 1 (L) B (B-2) 6 B (A-2) 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (3) 5 5m

HRX-OM-R039

Alarm indication and trouble shooting . 6-1 6.1 Alarm Display . 6-1 HRS Series HRX-OM-R039 Contents 6.2 Alarm buzzer stop . 6-2 6.3 Troubleshooting . 6-3 6.4 Other Errors . 6-4 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Control of Circulating Fluid Quality . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily check . 7-2 7.2.2 Monthly check . 7-3 7.2.3 Inspection every 3 months .

Fieldbus system PROFINET compatible SI Unit

Fig. 6-5 Block diagram of the EX245-SPN1A 43 No.EX-OMW0011-B Fig. 6-6 Block diagram of the EX245-SPN2A 44 No.EX-OMW0011-B Fig. 6-7 Block diagram of the EX245-SPN3A 45 No.EX-OMW0011-B 7. Digital Input Module EX245-DX1 7.1. Parts and description Fig. 7-1 Allocation of parts on the EX245-DX1 46 No.EX-OMW0011-B 7.2.

CQS

13 14 5 5.5 9.5 11.5 19.5 21.5 25 27 Bore size (mm) Double acting: double rod 3.5[6] 3[5.5] 8[10.5] 10[12.5] 1.5 2 6 7 5.5 5 10 12 1.5 2 6 7 5.5 5 10 12 12 16 20 25 17 19 22.5 24.5 5.5 6 10 11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16 19.5 21.5 25 27 Bore size (mm) CU CQS Auto switch model No.

Series KP/KPQ/KPG

Plug: KPP L A Applicable fitting size d Weight g D Model L A D d 6 32 13.8 0.4 KPP-04 4 Applicable fitting size 8 35 15.7 0.7 KPP-06 6 d 10 39 17.3 1.1 KPP-08 8 12 43 19.2 1.7 KPP-10 10 14 45.5 20.7 2.5 KPP-12 12 7 Series KPQ/KPG For Drive System Air Piping Recommended Applicable Tubing Tubing material Polyurethane: 10-series 4, 6, 8, 10, 12 Tubing O.D.

Series KP/KPQ/KPG

Plug: KPP L A Applicable fitting size d Weight g D Model L A D d 6 32 13.8 0.4 KPP-04 4 Applicable fitting size 8 35 15.7 0.7 KPP-06 6 d 10 39 17.3 1.1 KPP-08 8 12 43 19.2 1.7 KPP-10 10 14 45.5 20.7 2.5 KPP-12 12 7 Series KPQ/KPG For Drive System Air Piping Recommended Applicable Tubing Tubing material Polyurethane: 10-series 4, 6, 8, 10, 12 Tubing O.D.

KP/KPQ/KPG

Plug: KPP Applicable fitting size d Weight g D Model L A L A KPP-04 4 6 32 13.8 0.4 D d KPP-06 6 8 35 15.7 0.7 KPP-08 8 10 39 17.3 1.1 Applicable fitting size d KPP-10 10 12 43 19.2 1.7 KPP-12 12 14 45.5 20.7 2.5 4 For Drive System Air Piping Series KPQ/KPG Clean One-touch Fittings Recommended Applicable Tubing Tubing material Polyurethane: 10-series 4, 6, 8, 10, 12 Tubing O.D.

0.

for 6) C8 (for 8) C10 (for 10) Rc 1/4 Side VV3QZ35-lll VQZ3l5 VQZ300 2 to 20 stations Note) Weight for threaded connection.

IDX-OM-W034

References 6 1 Specifications . 6 1 6 2 Refrigerant with GWP reference . 6 2 6 3 Dimensions . 6 2 6 4 Electrical Circuit . 6 4 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 5 Chapter 7 Specification for Option K 7 1 Safety instructions . 7 1 7 2 Specifications . 7 1 Chapter 8 Specification for Option L 8 1 Safety instructions . 8 1 8 2 Specifications . 8 1 8 3 Specification

CV/MVGQ

2, 4, 6, 8 100 + 50 (n 2) n = 2, 4, 6, 8 110 + 50 (n 2) n = 2, 4, 6, 8 Same side 15 90 100 110 35 100 100 110 100 1 Different sides 2 Same side 100 100 110 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n

44

Note 6) Union nut is shipped together. Construction e q r q q Principal Parts Material No.

HRX-OM-Z002

Option . 6-1 6.1 OPTION LIST . 6-1 6.2 OPTION C [WITH INVERTER FOR COMPRESSOR] . 6-1 6.3 OPTION M [DEIONIZED WATER (PURE WATER) PIPING] . 6-1 6.4 OPTION P [WITH INVERTER FOR PUMP] . 6-2 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 ALARM NOTIFICATION . 7-1 7.2 ALARM SOUND STOP . 7-3 7.3 TROUBLESHOOTING . 7-4 7.3.1 Alarm details, causes, and troubleshooting . 7-4 7.3.2 How to

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Example: In case of 6 stations of air suction filter ZFA (single) ZFA100-01 6 pcs. (Brackets for 6 stations) ZZFA1-06 1 pc.

IDX-OM-W029

. i-5 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 . i-8 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-2 6-