For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Series P port/Thread VV2Q22-05 1 set Manifold part No. 2 3 VQ20 VQ30 Rc3/8 NPT3/8 NPTF3/8 G3/8 VQ21M1-5G-C6 00N 00T 00F 4 sets Valve part No. (Stations 1 to 4) Stations VQ21M1-5G-C8 1 set Valve part No.

Fitting Type: B (Branch Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female)

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female)

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male)

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male)

Fitting Type: B (Branch Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)

Fitting Type: B (Branch Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female)

0.5

in 1 m increments from 1 m to 20 m.

High performance type Step Motor Controller (Servo/24 VDC)

0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1 0 55 1 1 0 1 1 1 55 1 1 0 1 1 1 56 1 1 1 0 0 0 56 1 1 1 0 0 0 57 1 1 1 0 0 1 57 1 1 1 0 0 1 58 1 1 1 0 1 0 58 1 1 1 0 1 0 59 1 1 1 0 1 1 59 1 1 1 0 1 1 60 1 1 1 1 0 0 60 1 1 1 1 0 0 61 1 1 1

Step Motor Controller (Servo / 24 VDC)

44 1 0 1 1 0 0 45 1 0 1 1 0 1 45 1 0 1 1 0 1 46 1 0 1 1 1 0 46 1 0 1 1 1 0 47 1 0 1 1 1 1 47 1 0 1 1 1 1 48 1 1 0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1 0 55 1 1 0 1 1 1 55 1 1 0 1 1 1 56 1 1 1 0 0 0 56 1 1 1 0 0 0 57 1 1 1 0 0 1 57

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

1 42 1 0 1 0 1 0 42 1 0 1 0 1 0 43 1 0 1 0 1 1 43 1 0 1 0 1 1 44 1 0 1 1 0 0 44 1 0 1 1 0 0 45 1 0 1 1 0 1 45 1 0 1 1 0 1 46 1 0 1 1 1 0 46 1 0 1 1 1 0 47 1 0 1 1 1 1 47 1 0 1 1 1 1 48 1 1 0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1

JXCx-OMY0004

Caution 1.

JXCx-OMY0008

Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.

JXCx-OMY0006

Alarm was generated in order of (1) (5) 0-7 Alarm 1 8 8-15 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) Alarm 2 0 (1) (2) (3) (4) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) 9 (1) to (5) in the table indicates the alarm codes which are generated. Refer to "15.2. Alarm and countermeasures (P.64)" for detailed alarm information. 8-15 Alarm 4 5 Please refer to 20.

Servo Motor Controller (24 VDC)

Cable color Tarminal no. 1 1.5m U 1 Red 1 V 2 White 2 3 3m W 3 Black 3 5 5m Shield signal Tarminal no.