CEx-OMB0060

Contents Chapter 1: Read Before Use 1 Chapter 2: Product Summary 4 2-1. How to Order 4 2-2. Outside Dimensions 4 Chapter 3: Functions and Terminology 5 Chapter 4: Specifications 8 Chapter 5: Description of Each Part 10 Chapter 6: Wiring 6-1. Terminal block arrangement 11 6-2. Wiring of sensor input part 11 6-3. Wiring of control signal input part 12 6-4. Wiring of output part 12 6-5.

HRX-OM-W069

B contact (normally closed) By default HRL Series 2.4 Contact output signal 2-11 HRX-OM-W069 Chapter 2 Contact input/output communication /Analog output communication Table 2.4-3 Signal type for contact output signal 4 to 6 No.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

2 <= & & '7 ! 2 0= 0 >8 -& & =&& ! & 8: $ $! 2 & -& & -& , "#? 2 &1 -& & , )* & 82 & 5 )* 1 & 2 , 2 & @ B 2 , 2 '7 & , , How to order & 55 & & & ! 3 5 7 9 SY & &1 && -& & : 0@! * 2 2 0 & 89: Caution -& & '7 &-22 1 89: ! "#$ %$ & @ A , & , , ! )* 6 4 + , += , 4 . +4 / L! ' 0 ! & 1 & -& 2 & "'3& ($$!

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer

EX510

N P B 1 connector, 2-input type NPN output Replaceable fuse (EX9-FU10) 1 connector, 1 input type PNP output 2-wire type Note) B (2-wire type) is available with 1 connector, 2-input type only.

CNS

4636 + 2 point angle socket 22 JIS B 1181 Class 2 M14 x 1.5 22 DJIS B 4636 + 2 point angle socket 24 24 JIS B 1181 Class 2 M16 x 1.5 160 -X 20Adjustment 1) [Horizontal] Caution Forward Data W SOL.A SOL.B SOL.C Action 1.

Compact Cylinder with Air Cushion

Note 3) Clevis pins and snap rings are included with the double clevis type. 63 80 100 2 Series RQ Weights Basic weights Additional weights Unit: g Unit: g Bore size (mm) Magnet Double end tapped Bore size (mm) Standard stroke (mm) 25 6 12 8 181 180 171 127 32 11 6 26 17 143 180 165 151 100 35 45 175 116 40 13 6 27 17 155 214 198 196 20 5 6 4 159 143 137 92 50 14 6 53 32 243 373 348 393

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

MRHQ MA D625 Series MHC2-6/MHCA2-6 Dimensions MHCA2-6 (Short body type) 2 x M2 x 0.4 thread depth 4 (Mounting thread) 4 x M2 x 0.4 through Thread for attachment mounting 5 10 Attachment mounting limiting range 16 11 2 x M3 x 0.5 through Prepared hole dia. 2.6 through 5 2.5 2 x M2 x 0.4 depth 6 (Mounting thread) 4 2 2 When closed 10 When open 30 13.6 14 20 12 0.05 10 4 6 +0.022 0 7H8 depth

IDG

(Because barrel nipples are used for equipment connections.) 100 Standard dew point temperature and air flow rate Outlet air flow rate Purge air flow rate (l/min(ANR)) Flow rate by size Symbol Standard dew point (C) 5 50/12 50/6 3 25/6 25/3 10 100/2 20 200/5 30 300/7 50 60 75 100 Nil H 20 15 500/12 600/12 750/15 1000/19 Drain discharge method 500/6 600/6 750/8 100/1 200/2 300/3 1000/11

CLQ

1 y @2 @3 w !9 r e !7 @1 !2 !6 !8 q !1 A B A' B' Without magnet Extension locking u t @5 @0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com When shipped Section A-A' Retraction locking !0 !5 Section B-B' !3 !

Series VS

Return spring A VF4000-18-2-1 VF4000-18-2-1 VF4000-18-1 VS8060-17-2 VF4000-18-1 VFS3000-17-1 5. Return spring A 6. Return spring B 7. Detent assembly 8. Pilot valve assembly SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 6. Return spring B VF4000-18-2-2 VF4000-18-2-2 7.

Short Stroke Electric Actuator Series LX

234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction _ 296 Mounting _ 299

energy saving effect

Recommended External Piping Flow External piping circuit is recommended as shown below. 1 Thermo-chiller automatic fluid fill port Fluid supply 2 2 6 Circulating fluid outlet 1 Users equipment 2 2 Circulating fluid return port 3 4 Overflow port To wastewater collection pit Tank drain port 5 2 8 7 Water-cooled refrigeration Facility water inlet 1 Facility water equipment 7 2 Facility water

Lubrication Equipment

Distributor Series VA, VB How to Order V A 4 6 Applicable tube O.D. 6 6 Oil Distributor Number of distribution ports (VA) (VB) VB6-6 Distribution 4 ports 6 ports 8 ports 4 ports 6 ports 10 ports 16 ports 4 6 8 4 6 10 16 Both sides exhaust One side exhaust A B VA4-6 Dimensions VAl-6 VBl-6 A B C Model # Ports Applicable tubing 4 6 10 16 36.5 60 88 130 VA4-6 VA6-6 VA10-6 VA16-6 Model # Ports

Round Type Hydraulic Cylinder

3, 4, 5) 20 + 35 D-M9V 5 20 35 CHS (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9V 5 15 25 CH2 (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 10 20 35 CHA (n = 2, 4, 6) Note 3) (n = 2, 4, 6) Note 3) 15 + 45 (n 2) 2 D-H7/H7W D-H7NF/H7BA 60 + 45 (n 2) (n = 2, 3, 4, 5) 10 15 60 Related Products (n = 2, 4, 6) Note 3) 15 + 45

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators FT F 4 x FD 0 E0.05 FX0.15 B B FX0.15 (mm) FT 6 7 7 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 80 104 40 3 82 11 11 100 128 50 3 100 14 14 FD 5.5 5.5 6.6 6.6 FX 28 32 38 46 F 2 2 2 2 E 12 14 18 25 B 40 44 53 61 Bore size 20 25 32 40 Note) End boss is machined on the flange for E. Other dimensions are the same as basic type.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Content 10 MXP10-PS No. 19 above (2 sets) 12 MXP12-PS 16 MXP16-PS 6 Series MXP Dimensions MXPJ6 4-M3 x 0.5 depth 3 7 5 H 3 D B 18 1 0.05 3.5 16.5 14 13 20 6 F 6 6 5 2-M4 x 0.7 Piping port 13.5 Prepared hole dia. 3.3 2-M3 x 0.5 (Plug: M-3P) 17 0.05 Mounting reference planes B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) MXPJ65 MXPJ6-10 SMXPJ6, #1 SMXPJ6, #2 F H J M S Z Model 25 38

Floating Joint

6 6 7.5 7.5 9.5 11.5 11.5 13 16 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 30 35 38 42 17.5 19.5 19.5 20 20 20 22 22 27 32 35 34 38 0.05 0.07 0.07 0.16 0.16 0.16 0.3 0.3 0.6 1.05 1.08 1.5 4.5 44 49.5 49.5 60 60 60 71.5 71.5 90.5 110 110 123 165 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3 1.5 2 2 8 9 9 13 13 13 15 15 18 24 24 24 42 8 10 10 12 12 12 16 16

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

16.5 Rc1/8 pilot (12) port G1/4, Rc1/4 IN(1) port 15 2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 48 6 22 22 6 25 25 43 15 15 M5 leakage detection port 23 30 22 Part number for sub-base VCC12-S02 02F [Rc1/4] [G1/4] 60 0.5 to 2 Sub-base material is aluminum + hard anodized containing PTFE.

HRX-OM-W004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 AL01 : Low level in tank abnormal 1 AL02 : Low level in tank 2 AL03 : Phase loss / phase reverse error 7 3 AL04 : Water leakage 1 4 AL05 : Pump inverter error 2 5 AL06 : Internal fan stop 3 Alarm flag 1 6 AL07 : Fan Inverter error 8 7 Unused 8 AL09