BP1000

0.14 2.25'' (57.2) 18 0.12 16 0.11 0 20 40 60 80 100 Flow rate (slpm, N2) .69'' (17.5) 2.00'' (50.8) A A Connections in A mm FV4 MV4 FV6 MV6 1.85 01 47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.

Modular Type Air Filters Series AF

40 20 30 27 22 5.4 8.4 40 2.3 28 115 1/4, 3/8 53 129 14 26.5 30 50 26.5 41 40 23 6.5 8 53 2.3 30 170 AF 70 165 18 35 38 75 35 50 54 26 8.5 10.5 70 2.3 35 204 1/4, 3/8, 1/2 75 169 20 35 38 75 35 50 54 25 8.5 10.5 70 2.3 34 208 3/4 AR 90 245 24 45 20 45 70 66 35 11 13 90 3.2 47 284 3/4, 1 95 258 24 47.5 20 47.5 70 66 35 11 13 90 3.2 47 297 1 AL Semi-standard specifications AW With barb

90

[kPa] 80 Vacuum pressure 60 Suction flow (Silencer exhaust) 40 Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 Suction flow [L/min (ANR)] ZK210 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 0 10 20 30 40 50 60 70 80 90 100 100 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 Suction flow (

AMD

B 06 10 14 B 3 4 1B 1 8 N.C. auto-drain N.O. auto-drain Drain guide Accessory 02 03 B 1 4 B 3 8 04 B 1 2 1 B 1 2 20 2B 1 4 B IN-OUT reversal direction T Element service indicator Option AMD800 to AMD1000 Self-standing type AMD801/901 Piping support type 20 01 AMD 8 20 00 AMD 8 Port size Body size Port size Body size 8 8 20 2B flange 30 3B flange 20 2B flange 30 3B flange 9 9 10 40 4B flange

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

20-1-D to IS10M-60-1-D IS10E-20-D to IS10E-60-D Air flow Air flow 8.Type of scale -15- 9.

Fieldbus system PROFIBUS DP compatible SI unit

Enable Generates an error. 1 Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Sets the analogue input device range per channel. Analogue input range (Range) Selects the analogue input range. -10..10 V 2 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to PLC per unit.

HRX-OM-I051

Alarm Code.01 to 20, 22, 24, 25: Eliminate the error cause. Press the [RESET] key on the operation display panel or power cycle the main breaker to enable error recovery to take effect. Alarm Code.21, 28: Eliminate the error cause, and power cycle the main breaker to enable error recovery to take effect.

ZQ-OM01401

20 -20 10 0 0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] Pmax Qmax 10 Pmax 2 (P1 Q1 ) 3 Qmax 0 37 - No.ZQ-OM01401-B 11.2 () ZQ000A 11.3 -100 -80 [kPa] -60 -40 -20 0 (V 6 ) 0 5 10 15 20 [L/min (AMR) ] ZQA (PD)() ZQ000A (PD) 100 80 [L/min(ANR)] 70 [L/min(ANR)] 0.5MPa 0.5MPa 80 60 0.4MPa 50 0.35MPa 0.3MPa 60 0.3MPa 40 40 30 20 20 10 0 0 0 1 2 3 4 5 0 1 2 3 4 5 [] [

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

Lubrication Equipment

-l06 to 10 ALD900-l12 to 20 D.P.

AC Servo Motor Driver (SSCNET Type)

10 5 2.86 20 10 5 Parameter *1,*2 Para.

Title not found

Bar stock type 20 S Y E Valve Series Efsvsooo ] EI SYsOOO I -svzooo ] None Foot (Sinole solenoid onl Side Type of Actu.

Plug-in Unit

3 Rubber seal VQC1 01 0.70 0.70 0.20 0.16 0.20 0.16 25 or less 33 or less 2 position double (metal) 2.0 Single VQC2100 2.6 0.15 0.46 0.15 0.60 Metal seal 22 or less 29 or less (A) 4 (B) 2 90 2 position 3 position 2.2 VQC2101 3.2 0.28 0.55 0.30 0.80 Rubber seal 24 or less 31 or less 2.0 VQC2200 2.6 0.15 0.46 0.15 0.60 Metal seal 15 or less 20 or less Double 1 (P) 5 (R1) 3 (R2) 2.2 VQC2201

VZM400

-01-06 VZM550-01-06S Toggle lever VZM550-01-08 PAT.

Prevents Micro-Bubbles

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

Title not found

@numoer ,Inn|i''tral lo'd Double acllng Singte rcd o32 to s4clls lo 1O0 a50 to s1OU10 to 100 Axial piping (c.nri.liEd FiFine) Double acling Single rod o12, o 16/5 to g azo, a25/5 to 50 a32, o4O/5 lo 1N o50 to 01 0C/1 0 to 1 00 Single acting Spdng rctum/er.lend 612lo o4O/5, 10 z5U1O,20 ,.option" 12 to 1m 12 to 10O ,,r,${*i**#{rt$**F_\r;,;tl:r,r. : ..

Vacuum Gripper

ZXP 7 A 01 20 X1 Vacuum Gripper 1 Suction Cup Part Numbers and Weight 2) Cup mounting flange shape 1) Body size 4) Cup series 5) Cup diameter 6) Cup form 7) Cup material 8) Attachment *3 3 ) Compatible robot manufacturer Symbol Flange Shape Symbol Robot manufacturer Symbol Size Symbol Cup Series Symbol Cup diameter Symbol Attachment Symbol Cup form Symbol Material 7 75 A 01 UR: 3(e), 5(e

,,: ,.

Consult factory for avaitability. fttnlfibftilmm'solM 1/8', 5t32 311d' 114" 5/16' o o o c o o o 1 5 milbFffiHFmW 22 4 1 9 1 9 20 20 1 8 Plpe Reduclng Thrad Sizo Plp ThFad SEe 20 20 21 18 17 't7 | ."

ZQ-OM01301

60 -60 40 Air consumption -40 30 -40 Suction flow rate 20 -20 -20 10 0 0 0 0 5 10 15 20 25 0.2 0.3 0.4 0.5 Supply pressure [MPa] Suction flow rate [L/min (AMR) ] The flow characteristics curve shows the relationship between the vacuum pressure and the suction flow of the ejector.

High Purity Chemical Valve

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Symbol 01 02 01 02 02 03 03 04 04 06 10 Body class LQ3 Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.