3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

operated poppet type (NC) Fluid Air Inert gas 114 psi {8.2kgf/cm2} 100 psi {7.1kgf/cm2} Max.operating pressure Min.operating pressure 0 psi (0kgf/cm2) 0.14mm2 (Cv 0.008) 0.28mm2 (Cv 0.016) PA Valve specifications Solenoid specifications Effective orifice 0.36mm2 (Cv 0.02 ) 0.20mm2 (Cv 0.011) AR Response time Note 1) ON:3.5ms,OFF:1.5ms ON:3.5ms,OFF:2.5ms Ambient and fluid temperature 14 to 122

MU

CB 23 27 31 37 48 CA 53 67 85 103 122 Size 25 32 40 50 63 Size 25 32 40 50 63 Part No.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

VV 2-ZZ (Hexagon socket head taper plug) 2-ZZ (Hexagon socket head taper plug) VV Centralized piping type S 1.1 WX 11.4 Bottom ported (ZZ) (Applicable O-ring) 2-d Y J M6 x 1 M8 x 1.25 M10 x 1.5 MM M5 x 0.8 M6 x 1 M6 x 1 A 120 150 180 B C 5.5 6.5 8.5 CH 25.7 31.5 34.8 G 17 19 23 GB 24.5 30.0 36.5 H 66 82 98 K 9.5 16.0 15.0 L 142 172 202 LD 5.6 6.8 8.6 LH 38.7 44.2 47.2 LL 49 64 79 LW 100 122

MY1

M 10 13 13 MM MW 66 80 96 N 30 37 45 NC 21 26 32 NE 64 80 96 NH 28 37 48 Bore size (mm) 25 32 40 09 11 14 09.5 16.0 15.0 120 150 180 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 PA 060 080 100 NW 60 74 94 P PB 112 134 150 PG 7 8 9 PP1 12.7 15.5 17.5 PP2 12.7 18.5 20 Q 206 264 322 QQ 16 16 26 QW 46 60 72 RR1 18.9 22.0 RR2 17.9 24.0 SS 5.1 4.0 9.0 TT 15.5 21.0 26.0 UU 16 16 21 VV 16 19 23 W 122

Stations: 12 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPT

Stations: 12 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: N (NPT)

Thomas Oil-less Articulating Piston Compressor Flow Rate: 4.3 CFM / 122 LPM , 4.3 CFM / 122 LPM, Max Pressure: 100 PSIG / 6.9 bar , 100 PSIG / 6.9 bar, Horsepower (60 Hz): .75, Kilowatts (60 Hz): .56, Voltage (60 Hz): 208 - 230 / 460, Voltage (50 Hz): 190 / 380, Frequency (Hz): 50 / 60, Phase: 3-phase, Item Dimensions: Length: 15.3 in / 389 mm Width: 10.2 in

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

) 32 40 50 63 80 100 AB E1 TR AH AO AT SA XA TM TL UW L1 XV Z R TF FB E2 UF W MF ZF EW L MR XD EB 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 0.2 0.6 48 32 32 10 4.5 7 142 144 50 12 12 49 17 73 95 32 64 7 50 79 16 10 130 45 26 26 10 12 9.5 142 65 55 36 36 11 4.5 10 161 163 63 16 16 58 22 82.5 106.5 36 72 9 55 90 20 10 145 52 28 28 12 15 12 160 75 68 45 45 12 5.5 10 170 175 75 16 16 71 22 90 122

CHKD/CHKG

M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

2.5 (With stroke adjuster at retraction end) 12 32 31 18 24 9.5 3H9 ( ) depth 2.5 +0.025 0 F 10 N 1 x F 2 x M3 x 0.5 thread depth 5 2 27 3H9 ( ) depth 2.5 +0.025 0 21 M 20 Z ZZ (NN 1) x H G H 5.5 11 11 5.5 B A 3.2 6.5 7 7 12 1 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 2.5 +0.025 0 3H9 ( ) depth 2.5 +0.025 0 HA GA Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122

SMC Pneumatic Clean Series

10 20 264 100 40 37 41 60 30 50 3 20<17> 71 16 110 M12 x 1.75 depth 22 10 26 M26 x 1.5 100 1/2 10 122 10 20 264 50 35 32 63 35 32 11 11 58 72 10 10 23 20 M18 x 1.5 M18 x 1.5 55 69 1/4 1/4 10 10 102 102 7 7 18 18 M8 x 1.25 depth 16 M10 x 1.5 depth 16 Note) < >: Denotes the dimensions for G port.

SMC

0.45 thread depth 3 Vacuum suction port M5 x 0.8 6.5 3 3 5.5 3 5.5 5.5 7 J I 5 Max. 10.5 (With stroke adjuster at retraction end) 4 2 2-M2.5 x 0.45 thread depth 3 Operating port 2-M3 x 0.5 6 3H9 depth 2.5 +0.025 0 HA GA 3H9 depth 2.5 +0.025 0 B A NN-M4 x 0.7 thread depth 8 4 6.5 1 7 7 12 3.2 B A 11 5.5 5.5 11 H (NN1) x H G Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122

7

P. 121, 122 VXB How to Order . P. 123 For Oil VXE Model/Valve Specifications, Fluid and Ambient Temperature, Valve Leakage Rate ...P. 124, 125 VXP How to Order . P. 126 VXR For Heated water VXH Model/Valve Specifications, Fluid and Ambient Temperature, Valve Leakage Rate ...P. 127, 128 How to Order .

Stability of suction position,

ZP3EA-F4-AL12 [Weight: 122 g] 24.3 24.3 M12 x 1.25 4 Width across flats 19 4 M12 x 1.25 Width across flats 19 Seal washer 25 7 2 2 Seal washer 20 45 7 20 Width across flats 4 Width across flats 4 25 45 32 32 19 19 11.11) 11.11) 30 30 Applicable pad part no. ZP3E-63UM ZP3E-80UM ZP3E-63BM (Rotating angle) (Rotating angle) Applicable pad part no.

70astamb1

Besides, the overall length is longer than the cylinder with air cushion as follows, because the bumpers are attached to the both sides of the piston: 32, 40: +6 mm, 50, 63: +8 mm, 80, 100: +10 mm 148 70 190 72.5 Up to 1000 148 80 193 82.5 Up to 1000 102.5 174 100 230 Up to 1000 122 178 120 234 Up to 1000 6-7-8 9 Series MB1 Square Tube Type Air Cylinder: Standard Type Double Acting, Single

CQM

Unit: N Theoretical Output Weight Bore size (mm) Operating direction Operating pressure (MPa) Unit: g Without Auto Switch 0.3 0.5 0.7 Bore size (mm) Cylinder stroke (mm) IN 25 42 59 12 5 10 100 40 45 50 75 15 20 25 30 35 OUT 34 57 79 12 44 52 60 69 77 86 IN 45 75 106 16 16 56 67 77 87 97 108 OUT 60 101 141 20 183 198 213 227 92 107 122 137 152 167 IN 71 118 165 20 25 234 252 270 288

CXT

17 2 117 29.5 9 5.5 25 M6 x 1 M14 x 1.5 10 12 50 60 100 130 105 50 RB1411 22 122 17 2 127 32.5 11 5.5 PA dimension is the center sorted factor of the L dimension.

CLQ

46 136 14 8 136 46 122 152.5 43.5 134.5 80 144.5 53.5 162.5 18 10 162.5 53.5 144.5 182 53 160 100 170 63 192 22 13 192 63 170 0.1 0.3 A + Stroke CL+ Stroke L CW RR CU CZ CX +0.4 +0.2 B + Stroke G Bore size (mm) CU CW CX CZ G L L1 N RR 63 20 30 22 44 38 8 33.5 M8 x 1.25 14 80 27 38 28 56 43 10 43.5 M10 x 1.5 18 Rod end nut L1 100 31 45 32 64 50 12 43.5 M10 x 1.5 22 9-10-23 Single Knuckle

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Weight reduced by 53% at the maximum Overall length (Z + Stroke) Overall Length (Z) Weight (mm) (kg) Series MY3A MY3B MY1B Series MY3A MY3B MY1B 63 63 40 40 25 25 16 16 320 8.26 240 2.95 150 0.99 110 0.34 356 8.99 276 3.08 178 1.09 122 0.35 460 14.5 340 4.41 220 1.57 160 0.73 At a 100 mm stroke Series Variations Positioning cushion mechanism The uniquely designed piston shape enables reduction

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Dimensions [mm] Model L A B n D E F G H Without lock With lock LEKFS25Em-100m 335.5 380.5 106 210 4 100 45 LEKFS25Em-200m 435.5 480.5 206 310 6 2 240 220 LEKFS25Em-300m 535.5 580.5 306 410 8 3 360 340 LEKFS25Em-400m 635.5 680.5 406 510 8 3 360 340 LEKFS25Em-500m 735.5 780.5 506 610 10 4 480 460 35 14 LEKFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor LEKFS32E (122