Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

+ Stroke 114.5 + Stroke 16 + Stroke 21 + Stroke 26.5 + Stroke 42 + Stroke 51 + Stroke 60.5 + Stroke 78 + Stroke 91 + Stroke 104.5 + Stroke 63 80 100 126 101 152 127 188 163 126 101 152 127 188 5 to 50, 75,100 163 20131 106 161 136 201 176 131 106 161 136 201 5 to 50, 75,100 176 136.5 111.5 170.5 145.5 214.5 189.5 136.5 111.5 170.5 145.5 214.5 10 to 50, 75,100 189.5 Data Foot bracket material

3 Port Solenoid Valve Rubber Seal Series SY100 1

Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SS3Y1 31 05 Stations 02 2 stations P R 20 20 stations R port M5 x 0.8 P port M5 x 0.8 Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.

Series SY100 3 Port Solenoid Valve Rubber Seal

List part numbers of the installed valve and option in required station location separately under manifold part number. 2.1-10 Series SY100 Common SUP/Common EXH 30 Type How to Order Applicable solenoid valve (1) SS3Y1 30 05 F SY113-l-M3 SY113A-l-M3 Stations 02 Applicable blank plate assembly 2 stations ... ...

Vacuum

:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

Vacuum

Pad Type , ]>:]TYpr I '101 t6, 25 40 50 a a o o a a o a a a o a ) a o a o a o a a O a a a 86llaws o a a o a a a a o a Uentical True Uacuum InFy tllit[ Bufle Specif ications Butfer type 360" Rotating type (J), Non-rotation type (K) Pad size o2-s8: Std. 6mm Pad size s10-s50: Std. 10mm 20,25,32,40,50 NBB (50"), Silicone rubber (40"), Urethane rubber .

3 Port Solenoid Valve Rubber Seal Series SY100

Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SYJ SS3Y1 31 05 VK Stations VZ 02 2 stations P R 20 VT 20 stations R port VP M5 x 0.8 P port M5 x 0.8 VG Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.

ZQ-OM01401

ZQ 05 1U A-K15LO B-VA M W-3 3-N (1) (2) (3) (4) (5) (6) (7)(8) (9) (1) (6) 05 0.5 07 0.7 W (2m) 10 1.0 (7) (V ) (8) (P ) (2) 1U 0 (M5x0.8) 3M 1 3.2 () 0 (M5x0.8) 2 4 () 2 4 () (3) 3 6 () 3 6 () 4 3.2 () 5 4 () B 5 4 () 1) (9) (4) ( [kPa] VA -100 to 100 NPN1 + VB PNP1 + N 1) ZFC (5) 2) M SI (kPa) 2) (99 10 ) ZZQ108A-B S C-A (1) (2) (3) (4) 1 (1) 2) 01 1 S () 02

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

3.6 (0.2) 5.4 (0.3) 5.4 (0.3) 12.6 (0.7) 14.4 (0.8) 14.4 (0.8) 16.2 (0.9) 62 Series VQ1000/2000 How to Order Manifolds VV5Q 1 08 C6 GU0 2 Options Series Stations Symbol Nil VQ2000 specifications None Back pressure check valve on all stations Note 2) VQ1000 specifications None Back pressure check valve on all stations Note 2) Symbol Nil Symbol Stations 1 2 VQ1000 VQ2000 Symbol Stations 02

Multi-channel Digital Sensor Monitor ( compatible)

0 MPa 20 MPa 25.0 0 MPa 25 MPa Additional range USEr Input value (setting) Input value (setting) Available display unit and minimum set value Pressure range Rated pressure Display MPa kPa Pa kgf/cm2 bar mbar psi inHg mmHg mmH2O Fine differential pressure 2 kPa 0.002 0.001 1 0.01 0.001 0.1 Vacuum pressure -101 kPa -0.1 0.001 0.1 0.001 0.001 0.01 0.1 1 Compound pressure 100 kPa F0.1 0.001

Electric Actuator/Slider Type

mm or more 17 Wear ring POM Stroke 101 mm or more 18 Screw shaft pulley Aluminum alloy No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

mm or more 17 Wear ring POM Stroke 101 mm or more 18 Screw shaft pulley Aluminum alloy No.

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 10 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 03 (Rc3/8)

Base Mounted Wiring: 40 (Non Plug-in Individual Lead Wire Entry), Stations: 10 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 02 (Rc1/4), Thread: T (NPTF)

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 10 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc3/8, Thread: -, Control Unit: -, Voltage of Air Release Valve: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 10 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc1/4, Thread: NPTF, Control Unit: -, Voltage of Air Release Valve: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 10 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: Rc1/4, Thread: NPT, Control Unit: -, Voltage of Air Release Valve: -

Precautions 1

NT-02 NT-03 NT-04 Part no.

Base Mounted Wiring: Plug-in w/Terminal Block, Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: Rc, Control Unit: Air Release Valve, Voltage of Air Release Valve: 24VDC, Q: -

Digital Pressure Switch

[April 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008-2022 SMC Corporation All Rights Reserved No.PS-OMM0003-J

CG1

Bore size (mm) Auto switch model 20 25 32 40 50 63 80 100 D-C7/C8 BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 D-H7 D-B5/B6 BA-01 BA-02 BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 D-G5/K5 A set of following stainless steel mounting screws is attached. (A switch mounting band is not attached. Please order the band separately.)