Rotary Table/Rack & Pinion Style Series MSQ

FU) UV 63 73 76 87 HA 24 30 30 34 DG 45h8 60h8 65h8 75h8 FE 9.5 13.5 13.5 15.5 DH 46h8 61h8 67h8 77h8 DI 20H8 28H8 32H8 35H8 DJ 35h8 40h8 48h8 54h8 FD 15.5 19.5 19.5 21.5 Size 10 20 30 50 Size 10 20 30 50 31.5 34.7 34.7 51.7 DJ (mm) DD 45h9 60h9 65h9 75h9 D 27 34 37 50 BE 60 76 84 100 BD 27.8 30 32 37.5 BC 34.5 46 50 63 BB 9.5 12 12 15.5 BA 4 5 5 6 AY 12 14 14 19 AX 15.5 16 18.5 22 AW 20

Modular F.R.L. Units

Note 2) When the compressor oil mist discharge concentration is 30 mg/m3 (ANR).

Vacuum Ejector Series ZM

30 30 Suction flow rate 20 20 20 Suction flow rate 10 10 10 Flow characteristics are expressed in ejector vacuum pressure and suction flow.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

For detailed specifications, refer to page 8-30-1.

C95

50 (n 2) 75+ 50 (n 2) 75+ 50 (n 2) 80 + 50 (n 2) 80 + 50 (n 2) 85 + 50 (n 2) n (Same side) n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 35 + 30 (n 2) 35 + 30 (n 2) 70 + 30 (n 2) 75 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 80 + 30 (n 2) 85 + 30 (n 2) n (Different sides) n = 2, 4, 6, 8 n = 2,

Rotary Table/

Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !

1.1

8 8 6 6 4 4 2 2 0 0 0 10 20 30 40 40 0 10 20 30 Circulating fluid temperature (C) Circulating fluid temperature (C) 16 Series HRG Thermo-cooler Pump Capacity HRG001-A, HRG001-W HRG002-A, HRG002-W 0.3 0.3 30 30 Outlet port [60 Hz] Outlet port [60 Hz] Outlet port [50 Hz] Outlet port [50 Hz] 0.2 0.2 20 20 HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products 0.1 0.1 10 10 Return port

HRX-OM-X010

Table 3-5 Facility water temperature range Installation conditions Facility water temperature range(deg C) Ambient Relative temperature(deg C) humidity(%) 70 29 to 30 60 27 to 30 35 50 24 to 30 40 20 to 30 30 15 to 30 70 24 to 30 60 22 to 30 30 50 19 to 30 40 15 to 30 30 11 to 30 70 20 to 30 60 17 to 30 25 50 14 to 30 40 11 to 30 30 10 to 30 70 15 to 30 60 13 to 30 20 50 10 to 30 40 30 70

MHZ

Required gripping force = 0.1 kg x 20 x 9.8 m/s2 () 19.6 N or more 0 10 20 30 40 50 60 Gripping point L (mm) Selecting MHZ2-16D. A gripping force of 24 N is obtained from the intersection point of gripping point distance L = 30 mm and pressure of 0.4 MPa.

MHZ

Gripping point L (mm) DMHZJ2-16D/11-MHZ2-16D 2050 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) 40 0.6 MPa 0.5 MPa 0.6 MPa 0.5 MPa 0.4 MPa 30 0.4 MPa 0.3 MPa 0.2 MPa 0.3 MPa 20 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 20

Parallel Style Air Gripper Series MHZ

Required gripping force = 0.1 kg x 20 x 9.8 m/s2 19.6 N or more 0 10 20 30 40 50 60 Gripping point L (mm) Gripping point distance: L = 30 mm Selecting MHZ2-16D. A gripping force of 24 N is obtained from the intersection point of gripping point distance L = 30 mm and pressure of 0.4 MPa.

Modular Type Air Filters Series AF

Information SMC Corporation of America 10100 SMC Boulevard Noblesville, IN 46060 Epoxy Coated F.R.L.Units www.smcusa.com AC21/31/41-***-*-X2217 AF20/30/40-***-*-X480 AR20/30/40-***-*-X48 AL20/30/40-***-*-X480 AW20/30/40-***-*-X48 VHS20/30/40-***-*-X513 Y20/30/40*-T4 Application: Air preparation in an environment that requires enhanced corrosion protection.

REA/REB

Cushion Stroke Allowable load weight Wv (kg) Maximum operating pressure Pv (MPa) Stroke (mm) Model Model 2.7 7.0 11.0 18.5 18.5 30.0 0.55 0.65 0.65 0.65 0.65 0.65 REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 20 25 30 30 30 30 REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 10-2-54 54 Sine Rodless Cylinder High Precision Guide Type Series REAH Stroke Adjustment The adjusting bolt is adjusted to

IDG

Construction Refer to pages 14-19-30 to 31.

REA/REB

Cushion Stroke Allowable load weight Wv (kg) Maximum operating pressure Pv (MPa) Stroke (mm) Model Model 2.7 7.0 11.0 18.5 18.5 30.0 0.55 0.65 0.65 0.65 0.65 0.65 REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 20 25 30 30 30 30 REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 10-2-54 54 Sine Rodless Cylinder High Precision Guide Type Series REAH Stroke Adjustment The adjusting bolt is adjusted to

Mechanically Jointed Rodless Cylinders

MY316 300 400 500 500 400 300 950 N Collision deceleration (m/s2) Collision deceleration (m/s2) 200 200 240 N 100 100 30 40 50 50 40 30 20 20 10 10 1 2 3 4 5 10 20 30 10 5 4 3 2 1 0.2 0.4 0.3 m1max m3max m1max m2max m3max m2max Weight (kg) Weight (kg) MY320 MY340 500 400 300 300 400 500 370 N Collision deceleration (m/s2) Collision deceleration (m/s2) 200 200 1500 N 100 100 50 40 30 30 40

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Because sizes 10, 20, 30 and 50 have the table press fit into an angular type bearing, they cannot be disassembled. 50 11-9-30

HRX-OM-X037

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 31 Circulating fluid display temperature 30 Heat radiation Circulating fluid set 1 temperature 30 Offset temperature 30 1 HRL Series 5.4 Description of the Screen 5-31 HRX-OM-X037 Chapter 5 Display and Setting of Various Functions Pump operation mode 4.

HRX-OM-W002

40 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] Circulating fluid temperature[] Circula Circulating fluid temperature[] 50Hz 60Hz 60Hz 50Hz 50Hz 60Hz

Series IDG

= 0.7MPa 30 30 40 50 0 40 100 200 300 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG50 IDG60 0 P1 = 0.3MPa P1= 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 50 50 0 200 400 600 800 0 200 400 600 800 Outlet air flow rate l/