VVXA21/22

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Refer to pages 2-5-40 to 2-5-43 for control unit.

Refrigerated Air Dryer

Symbol Nil 10 mm AM Coating color White 1 Weight lbs (kg) 40 (18) 55 (25) 57 (26) 64 (29) 73 (33) 110 (50) AMD Compliant standards UL, CSA Note 1) ANR is under the conditions of 68F (20C) at atmospheric pressure and relative humidity of 65%. Note 2) Air flow capacity for each outlet air pressure dew point is indicated.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

-07 34.4 55.7 46.9 22 25.6 44.9 38.7 12 20.9 1/4" 13.2 69 17 60 20.6 12.9 NPT 1/4 AS331FG-03-06 AS331FG-N02-09 48.3 43.3 37.8 42.8 25.2 45 49.5 17 28.2 38.5 39.7 6 12.8 5/16" 15.2 56 18.5 63 23 19 20.6 12.9 AS331FG-03-08 AS331FG-N02-11 28.2 48 53.9 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 23 59 21 69 16.2 23 40.4 45.4 19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-07 32.6 52.4 45 21 25.6 43.7 38.7

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

36 40 58 22 20 82 65 102 11-/22-MXP16-30 28 70 119 50 42 56 70 29 30 108 75 128 837 Air Slide Table MXP/MXPJ6 1122Made to Order Specific Product Precautions Anti-corrosive guide unit -X42 Be sure to read this before handling.

5 Port Solenoid Valve

Bore size CJ2 series Pressure 0.5 MPa Load ratio 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load ratio 50% Stroke 300 mm CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] 6 10 16 125 140 160 180 200 250 20 25 32 40 40 50 63 80 100 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward

AMD

4B flange 40 4B flange 60 6B flange Type Type 00 With manual drain cock 10 With auto-drain 01 With manual drain cock 11 With auto-drain Max.

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

VZS

Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series Average speed (mm/s) 800 700 600 500 400 300 200 100 0 It is when the cylinder is extending that is meter-out controlled by speed controller which

VCB

Port size VCB2 VCW20-12-01A 34 40 25 30 12.8 12.8 5 4.5 6 13 1/8, 1/4 VCW30-12-02A 42 52 30 40 19 19 6 5.5 7 19 1/4, 3/8 VCB3 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-02A 42 52 30 40 23 23 6 5.5 7 19 1/4, 3/8 VCB4 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-06A 56 65 44 53 28.2 28.2 6 5.5 7 26 3/4 2 mounting screws (for mounting bracket) are included

VCB

Valve model Port size L J H G F E D C A B VCW20-12-01A VCB2 1/8, 1/4 13 6 4.5 5 12.8 12.8 30 25 40 34 VCW30-12-02A 1/4, 3/8 19 7 5.5 6 19 19 40 30 52 42 VCB3 VCW30-12-04A 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-02A 1/4, 3/8 19 7 5.5 6 23 23 40 30 52 42 VCW30-12-04A VCB4 1/2 23 7 5.5 6 23 23 44 36 56 48 VCW40-12-06A 3/4 26 7 5.5 6 28.2 28.2 53 44 65 56 Two mounting screws (for mounting

E,R.L.

:llv thn alphabtic:lly (Ex.: 27N.40(40/,m), 2N R Body g Port orl.d.--64, r NNFT Construction./Parts List Main Parts Parts List 1 1074-58 1 1 1 1r 1 636 NC4otr r 1185 l t l Series NAF Air Filter Float Type Flow Characteristics NAF5OOO N.O tvpe/ NAD44 With no pressure inside the bo!

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

mm MPa kPa Connection OUT1 OUT2 CH 1 2 3 4 P R E S S U R E SET connector 165 mm Power supply/ Output connection cable 40 mm kPa kPa kPa kPa OUT2 OUT1 OUT2 OUT1 OUT2 OUT1 OUT2 OUT1 SET SET SET SET Panel mounted A single controller monitors various applications.

OMU0023

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

No more element replacement!

Low Maintenance Filter Low Maintenance Filter Series FN1/FN4 Series FN1/FN4 New Series FN4 FN4 Series FN1 FN1 Series FN4 Series FN1 Series FN4 FN4 Series FN1 FN1 Flow rate max. 250 l/min max. 80 l/min max. 40 l/min Series FN4 with four elements is added!

Thermoelectric Bath

5 40 Water 0 GALDEN HT200 35 5 20 90 30 HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 10 Fluorinert FC-3283 25 15 0 70 20 20 0 10 20 30 40 50 60 70 80 0 20 40 60 80 100 120 140 160 180 Time (minute) Time (minute) Pressure Loss in FacilityWater Circuit The values shown on the performance chart are not guaranteed, but typical.

AS-FPQ/AS-FPG

Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard