flexible tubing, Barbs for 1/16" or 1/8" I.D. flexible tubing Size Part Number Color .004 F-2815-041 Purple .005 F-2815-050 Lime .006 F-2815-051 Red .007 F-2815-071 Aqua .010 F-2815-101 Yellow .012 F-2815-121 Black .016 F-2815-161

IDX-OM-V022

Emission Control Law, please visit our website below. https://www.smcworld.com/products/ja/freon/ 7.2 Refrigerant and GWP value IDF60/70/80/90 Series 7-2 J N M L O K H IDX-OM-V022 Chapter 7 Documents 7.3 Dimensions Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J Unit: mm M N O L K H Unit: mm Model Port Size A B C D E F G H J K L M N O P IDF60 R1 307 745 605 161

IDX-OM-W093

7.2 GWP (GWP) GWP Regulation (EU) No 517/2014 Regulation EU No 517/2014 (IPCC AR4 ) IPCC AR4 R410A 2,088 2,090 R410A 2,088 2,090 1 2 []: https://www.smcworld.com/products/ja/freon/ IDF60/70/80/90 Series 7-2 N M L O K H IDX-OM-W093 7.3 Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J M N O L K H mm A B C D E F G H J K L M N O P IDF60 R1 307 745 605 161

IDX-OM-U010

R410A 2,088 2,090 Note 1: This product is hermetically sealed and contains fluorinated greenhouse gases (HFC). 7.2 Refrigerant and GWP value IDFC60/70/80/90 Series 7-2 IDX-OM-U010 Chapter 7 Documents 7.3 Dimensions Port size Compressed air inlet Compressed air outlet Port size B A E D G F C P J Unit: mm M N H K O L Unit: mm Model Port Size A B C D E F G H J K L M N O P IDFC60 R1 307 745 605 161

IDX-OM-W095

IDFC6010 450.8MPa30 2.8 m 3/min 1.09 1.02 1.06 3.3 m 3/min 7.2 GWP 1 (GWP) GWP Regulation EU No 517/2014 Regulation (EU) No 517/2014 (IPCC AR4 ) IPCC AR4 R410A 2,088 2,090 R410A 2,088 2,090 IDFC60/70/80/90 Series 7-2 IDX-OM-W095 7.3 Port size Compressed air inlet Compressed air outlet Port size B A E D G F C P J M N H K O L mm A B C D E F G H J K L M N O P IDFC60 R1 307 745 605 161

IDX-OM-V020

Note 1: This product is hermetically sealed and contains fluorinated greenhouse gases (HFC). 7.2 Refrigerant and GWP value IDFA60/70/80/90 Series 7-2 N M L O K H IDX-OM-V020 Chapter 7 Documents 7.3 Dimensions Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J Unit: mm M N O L K H Unit: mm Model Port Size A B C D E F G H J K L M [N] O P IDFA60 R1 307 745 605 161

IDX-OM-W089

Description Maintenance/Service Work Description Date IDFA6E-20 161 16-1 Service Record Revision Revision AJan.2022 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Tel: +81 3 5207 8249 Fax: +81 3 5298 5362 URL: https://www.smcworld.com Specifications are subject to change without prior notice and any obligation the part of the manufacturer. 2019 SMC Corporation All

CC-Link-E

S. or l ess O perat i ng t em perat ure 0 t o 50( N o dew condensat i on) St andards CE m arki ng, U L( CSA) Encl osure I P65 I P65 equi val ent M odel I TV10 0 I TV20 0 I TV30 0 Si ze ( m m m m m m ) ( W i t h adapt or) 50 50 161 50 50 183 66 66 204 W ei ght ( N o opt i on) 330 430 730 9 Com m uni cat i on speci f i cat i on ( Com m on) I t em Speci f i cat i ons Rem arks Fi el d bus CCLi

Air Slide Table Series MXS

mm2) Operating direction Operating pressure (MPa) For clean room specifications, refer to Pneumatic Clean Series catalog. 0.7 0.6 0.5 0.4 0.3 0.2 40 34 29 23 17 11 OUT IN 57 6 3 29 25 21 17 13 8 42 Standard Stroke 71 61 51 40 30 20 OUT IN 101 8 4 53 45 38 30 23 15 75 Model Standard stroke (mm) 158 136 113 90 68 45 OUT IN 226 12 6 10, 20, 30, 40, 50 MXS6 119 102 85 68 51 34 170 281 241 201 161

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

62.8 47.1 31.4 157 OUT 15.7 M L 6 CXS 10 70.0 60.0 50.0 40.0 30.0 20.0 100 IN 10.0 247 212 177 141 106 70.6 353 OUT 35.3 M L 8 CXS 15 176 151 126 101 75.6 50.4 252 IN 25.2 440 377 314 251 188 126 628 OUT 62.8 M L 10 CXS 20 330 283 236 188 141 94.2 471 IN 47.1 687 589 491 393 295 196 982 OUT 98.2 M L 12 CXS 25 529 454 378 302 227 151 756 IN 75.6 1126 965 804 643 482 322 1608 OUT 161

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Refer to the Made to Order specifications on page 21 for details. 2 Series MY1W Theoretical Output Unit: N Operating pressure (MPa) Bore size (mm) Piston area (mm) 0.3 0.4 0.5 0.6 0.2 0.7 0.8 16 200 40 60 80 100 120 140 160 20 314 62 94 125 157 188 219 251 25 490 98 147 196 245 294 343 392 32 804 161 241 322 402 483 563 643 40 1256 251 377 502 628 754 879 1005 50 1962 392 588 784 981 1177

Guide Cylinder Series MGG

the energy absorption. 2 Series MGG Theoretical Output OUT IN (Unit: N) Operating pressure (MPa) Rod size (mm) Operating direction Bore size (mm) Piston area (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 62.8 94.2 126 157 188 220 251 283 314 314 OUT 20 8 52.8 79.2 106 132 158 185 211 238 264 264 IN 98.2 147 196 246 295 344 393 442 491 491 OUT 25 10 82.4 124 165 206 247 288 330 371 412 412 IN 161

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

18 37 67.5 59 Max .10 71.5 Pg.7 Manual override (non-locking) 4Rc(PT) 1/8 (ports P, R) 18 25 31 53.5 Approx. 300 (lead wire length) Light (DZ type only) 4Rc(PT) 1/8 (ports P, R) 75.5 83 Manual override (non-locking) nRc(PT) 1/8 (port A) Applicable cord O.D. 4 to 6.5 A A P = 19 20 L: Dimension table n: Stations n L L1 L2 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161

PRESSURE CONTROL VALVE, VALVE, RELIEVING AP, NAP, 161, 157.50000 lb

LG1H

Model Note 15 20 25 30 1000 1000 930 740 600 500 LG1H202PC-500-F LG1H202PC-600-F LG1H202PC-700-F LG1H202PC-800-F LG1H202PC-900-F LG1H202PC-1000-F 700 700 600 600 500 500 500 500 500 500 500 500 500 500 500 500 500 500 Power supply: 100/110(V)AC 10% Compatible controller: LC1-12HC1Power supply: 200/220(V)AC 10% Compatible controller: LC1-12HC2Consult SMC if outside of the above conditions. 161

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Port size A B C D E F 28 3/4 31 34 22 143 107 IF320 104 1 37 62 89 28 194 IF321 IF323 104 1 29 39 56 28 161 16-12-9 Series IF3 Flow Rate vs.

Digital Gap Checker

ISA-161 e Threaded plug with seal ISA-12*1: Spacers are included for 4 and 6 stations. Bracket ISA-14 DIN rail ISA-5-m L Stations Part no.

Filter Regulator IW Series

(Made-to-Order products of the AW series on page 161) How to Order 1301 002 Accessories Filter regulator Nil None B With bracket G With pressure gauge Set pressure 002 0.02 to 0.2 MPa 1202 0.02 to 0.29 MPa 2502 0.02 to 0.49 MPa 902* 0.02 to 0.2 MPa * External main parts are made of stainless steel. For details, refer to page 159.

energy saving effect

Resistance welding machine (Spot welding) High frequency induction heating equipment Cooling tower Cooling of the welding head electrodes, transformers and transistors (thyristors) Cooling of the heating coils, high frequency power source and around inverters 161 Thermo-chiller Inverter Type HRSH Series Circulating Fluid Temperature Controller Global Supply Network SMC has a comprehensive

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302