XMA/XYA Series

110 83 96 D G C XYA Series / Straight Valve C B Fd (K Flange) 45 H Fn (KF Flange) A E Unit: mm Model n Fd XYA-25 100.2 79.5 48 1 23.5 40 26 64 XYA-40 130 106 66 2 38 55 41 84 XYA-50 178 119 79 2 53 75 52 95 XYA-63 209 149 100 3 61 87 95 70 118 XYA-80 268 178 117 3 80 114 110 83 142 9 XM-OMP0001-A 5.

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MEM MEM 5/8 41/64 27/32 1 1/8 3/8 MEM 1/4 Typ. Slim line coupler not shown 5/8 27/32 1 1 C6 C2-SL C2 C4 C8 C6 C3 C1 C5 C2 1/2 C7 C3 1/2 Reducing Couplings not shown Note not shown not shown 1 1/8 7/16 Dia. 3/8 Dia. Typ. 3/8 Dia. 5/16 Dia. Typ. 1/4 Dia.

Pressure Relief 3 Port Valve With Locking Holes

Correct Silencer assembly P/N 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved

AIR SLIDE TABLE

Description Material Note Chromate treatment 40 Bushing Aluminum alloy (MXQ6,MXQ8(C),MXQ12(C) only) 41 O-ring NBR (MXQ6,MXQ8(C),MXQ12(C) only) 42 Parallel pin Stainless steel (MXQ6,MXQ8(C),MXQ12(C) only) 43 Steel ball High carbon chromium bearing steel 20 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

(g) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D When mounting Series CU, refer to the below table. Tightening Torque/ 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) Bore size (mm) Hexagon socket head cap screw dia.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Basic style Width across flats 3.5 23 9 4.5 4.5 MXH MXU 6.5 3.5 2 x M3 x 0.5 (Port size) MXS 2 x M3 x 0.5 MXQ (Port size for axial piping type MTS8-P) 0.2 2 x M3 x 0.5, effective length 5 9 5 MXF +0.035 +0.025 4 MXW 22 12 16 MXJ M2.5 x 0.45 12 41 + Stroke MXP 53 + Stroke 9 15 MXY MTS 0.2 9 4 x M3 x 0.5, effective length 5 10 15 Rod end male thread Width across flats 3.5 +0.035 +0.025 4 M3

ZSE2/ISE2

-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13 for Precautions on every series. 3 m 30 5 m 50 16-6-8 3 Compact Pressure Switch Series ZSE2/ISE2 ZSE2/ISE2 Specifications ZSE2 For vacuum ISE2L For low pressure ISE2 For high pressure Operating pressure range/ Regulating pressure range Proof pressure 0 to 101

VXA21/22

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 170 0.5 1.0 0.6 0.2 0.1 1.0 0.6 0.2 0.1 0.1 4.5 15 0.61 2.5 10.45 0.75 1 4 250 (8A) 26 41 46 15 26 41 58 58 1.1 1.7 1.9 0.61 1.1 1.7 2.4 2.4 3.3 6.4 8.8 2.5 3.3 6.4 11 11 0.50 0.40 0.40 0.45 0.50 0.40 0.38 0.38 1.1 1.8 2.3 0.75 1.1 1.8 2.8 2.8 6 8 1.5

Title not found

ISO 9002] SMC Taiwan [ISO 9002] SMC UK [ISO 9001/ISO14001] SMC US [ISO 9001] 15 Table of Contents Page Page Actuators Valves Pin Cylinder/Series CJ1 38 Gas and Chemical Liquid Valve/Series LVM 17 Miniature Cylinder/Series CJP 39 High Purity Chemical Valve/Series LV 18 Mini Free-Mount Cylinder/Series CUJ 40 Ultra Compact Valve. 3 Port Solenoid Valve 19 Electric Actuator/Series LG, LJ, LX 41

2/3 Port Valve

Use 2 port valve VNH33. 4.2-33 VNH Dimensions Dimensions (mm) Model Main port 2 port 3 port Pilot port H I A C B D E F G 3 8 3 8 Rc(PT) 1 8 2-Rc(PT) 2-Rc 3-Rc(PT) 3-Rc 50 60 79 90 77 95.5 111 119 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

ZSE2-01-15CN1 pc. 30 3 m ZS-10-5 A-501 pc. 50 5 m 780 Compact Pressure Switch Series ZSE2/ISE2 Specifications ZSE2 For vacuum 0 to 101 kPa ISE2L For low pressure 0 to 100 kPa ISE2 For positive pressure 0 to 1 MPa Model Rated pressure range/Set pressure range Proof pressure Fluid Power supply voltage Current consumption Response time Repeatability Air/Non-corrosive, non-flammable gas 1.5 MPa

AWM20 to AWM40

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2006 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing JX printing KR 120DN Printed in Japan.

AWM20 to AWM40

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2006 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing JX printing KR 120DN Printed in Japan.

3 Port Solenoid Valve

Terminal no. 16 16 43 43 Length indication label Length indication label 10 11 19 10 9 2 1 2 1 20 SMC SMC 33.4 33.4 030 015 41 41 25 Approx. 10 Approx. 10 17 8 18 8 7 6 14 26 15 9 2 x M2.6 x 0.45 For N, 2 x No. 4-40 UNC For N, 2 x No. 4-40 UNC 2 x M2.6 x 0.45 Socket section Socket section D-sub Connector Cable Assembly D-sub Connector Cable Assembly Cable length L Assembly part no.

Digital Flow Switch (Integrated display type)

[July 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2022 SMC Corporation All Rights Reserved No.PF-OMJ0006-J

JXCx-OMU0024

JXC-OMU0024 First edition: July 2017 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved

SFOD-OMT0012

Change of controller and actuator settings . 31 (3) Change of the parameter protect setting . 32 4.3 Step data setting . 33 (1) Step data setting . 33 (2) Saving or Loading the Step data . 35 4.4 Monitor function . 36 4.5 Teaching . 36 4.6 Test Drive . 39 (1) Test Drive . 39 (2) JOG, Inching, and Return to origin in the Teaching window. 40 (3) Single step operation in Step Data window . 41

LA-OMT0056

by the user. . 7 (5) Software installation . 7 2. 2 Controller settings . 8 (1) Start the setup software . 8 (2) Basic Parameter Setup . 9 (3) Step data setting . 9 3Start up procedureTest operation using a computer . 11 3. 1 Test operation using a computer (Step data operation) . 11 3. 2 Test operation using a computer (Continuous operation) 13 4Start up procedureOperation by PLC . 15 41

ZK2-C

. <> [F 6] [FSC] 1 [F 6] -30NO.ZK2-OM00801-B [F11] <> [F11] 1000 100 [F11] [MPa]/[kPa]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm2]/[bar]/[psi]/[inHg] 22[F 0] -31NO.ZK2-OM00801-B [F80] 30 OFF <> [F80] 2 1 [F80] 1 OFF 1 2 30 () 2 ON OFF -32NO.ZK2-OM00801-B [F81] <> [F81] [F81] 000 41 -33NO.ZK2-OM00801-B [F90] <> [F90] [on] [oFF] 1 [oFF]() 2 [F90] 1 35 -34NO.ZK2

Digital pressure switch for energy-saving control ejector

ZQ-OM01501 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved