3 Port Air Operated Valve Series SYJA300 1

VV3PA5-42Station 3-03 28.5 3(R) 3(R) (R port) Rc 3/8 PA NO NC 87 (PA port) Rc 1/8 (Mounting hole) 2-7.2 30 PA 41.5 91.4 84.4 91.4 60 16.5 1(P) 41.5 PA (P port) Rc 3/8 (Pitch) 88 31 33 7.5 L2 L1 (PA port) Rc 1/8 PA 61.5 66 2(A) 2(A) 47.5 13.5 (A port) Rc 3/8 n: Station n L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 6 227 212 7 260 245 8 293 278 9 326 311 10 359 344 2 95 80 3 128 113 4 161

PA300/500/700

VV3PA5-42Station 3-03 28.5 3(R) 3(R) (R port) Rc 3/8 PA NO NC 87 (PA port) Rc 1/8 (Mounting hole) 2-7.2 30 PA 41.5 91.4 84.4 91.4 60 16.5 1(P) 41.5 PA (P port) Rc 3/8 (Pitch) 88 31 33 7.5 L2 L1 (PA port) Rc 1/8 PA 61.5 66 2(A) 2(A) 47.5 13.5 (A port) Rc 3/8 n: Station n L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 6 227 212 7 260 245 8 293 278 9 326 311 10 359 344 2 95 80 3 128 113 4 161

VK300

Refer to the above drawing for other dimensions. n L 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 L1 L2 4-5-9 10 Series VK300 Precautions Be sure to read before handling.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

11.5 18 37 67.5 59 MAX.10 71.5 Pg.7 Manual override (Non-locking) 4-Rc 1/8 1(P), 3(R) port 18 25 31 53.5 300 (lead wire length) mPm Indicator light (Type DZ only) 4-Rc 1/8 1(P), 3(R) port 75.5 83 Manual override (Non-locking) n-Rc 1/8 2(A) port Applicable cable O.D. 4 to 6.5 A A P = 19 20 L Dimension n: Stations n L L1 L2 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161

3 Port Solenoid Valve Series VQ100 1

Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161

SX

Light/Surge voltage suppressor (5.5) 75.3 67.6 (Both sides) Rc 1/4 EXH port Rc 1/4 SUP port 67.6 50.5 P E 18.5 18.5 9.5 9.5 58.2 60 1 1 26 L plug connector (L) M plug connector (M) 115.6 (Single, Double) 128.1 (Single, Double) 128.6 (3 position) 141.1 (3 position) 16.7 (Lead wire length) 300 300 (Lead wire length) 33.4 Stations n n: Stations (n1 + n2) 3 85 65 4 104 84 5 123 103 6 142 122 7 161

VFR

Stations n: Station VFN Formula L1 = 33 x n + 63 L2 = 33 x n + 75 2 129 141 3 162 174 4 195 207 5 228 240 6 261 273 7 294 306 8 327 339 L L1 L2 Non plug-in type Manifold VV5FR3-10Station 1Port size U side 2n-Rc 3/8, 1/4 C8, C10 (A, B port) 2n-Rc 1/4, 3/8 (A, B port) Applicable cable O.D. 8 to 10 P = 33 (Pitch) Stations Manual override (Non-locking) Max. 3 D side (With direct manual override: 161

KJ

KFW08U-02 KFW08U-03 KFW08N-01 KFW08N-02 KFW08N-03 KFW10U-02 KFW10U-03 KFW10U-04 KFW10N-02 KFW10N-03 KFW10N-04 KFW12U-02 KFW12U-03 KFW12U-04 KFW12N-02 KFW12N-03 KFW12N-04 14 10 14 10 14 17 12 14 17 12 14 17 19.3 53.7 55.5 63.5 56.5 58.5 59.2 58.6 60.6 61.3 58.6 60.6 61.3 63.8 64.5 65.6 63.8 64.5 65.6 68.7 69.4 70.5 68.7 69.4 70.5 58 63 61 66 77 81 83 90 81 83 88 100 106 128 99 104 126 146 146 161

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Station 20 372 359 353 340 3 83 70 81 68 6 134 121 129 116 8 168 155 161 148 10 202 189 193 180 Station 2 66 53 65 52 4 100 87 97 84 5 117 104 113 100 7 151 138 145 132 9 185 172 177 164 11 219 206 209 196 12 236 223 225 212 13 253 240 241 228 14 270 257 257 244 15 287 274 273 260 16 304 291 289 276 17 321 308 305 292 18 338 325 321 308 19 355 342 337 324 Station n L1 L2 L1 L2 A, B port size

Profile Design ISO/VDMA Air Cylinder Series CP95

Operating Piston area Working pressure [MPa] [mm] [mm] direction [mm2] 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 10 32 12 OUT 804 161 241 322 402 482 563 643 724 804 IN 691 138 207 276 346 415 484 553 622 691 40 16 OUT 1257 251 377 503 629 754 880 1006 1131 1257 IN 1056 211 317 422 528 634 739 845 950 1056 50 20 OUT 1963 393 589 785 982 1178 1374 1570 1767 1963 IN 1649 330 495 660 825 989 1154 1319

Compact Type Dual-Rod Cylinder Series CXSJ

9.3 6.2 31 IN 110 94.2 78.5 62.8 47.1 31.4 15.7 157 OUT CXS10 6 70.0 60.0 50.0 40.0 30.0 20.0 10.0 100 IN 247 212 177 141 106 70.6 35.3 353 OUT CXS15 8 176 151 126 101 75.6 50.4 25.2 252 IN 440 377 314 251 188 126 62.8 628 OUT CXS20 10 330 283 236 188 141 94.2 47.1 471 IN 687 589 491 393 295 196 98.2 982 OUT CXS25 12 529 454 378 302 227 151 75.6 756 IN 1126 965 804 643 482 322 161

Rodless Cylinder for Vacuum Series CYV ø15, ø32

tube Lubrication Weights (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYV15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYV32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnet Holding Force Theoretical Output (N) Magnet holding force (N) Operating pressure (MPa) Bore size (mm) Bore size (mm) Piston area (mm) 0.1 0.2 0.3 15 59 15 32 18 35 53 176 268 32 80 161

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

62.8 47.1 31.4 157 OUT 15.7 M L 6 CXS 10 70.0 60.0 50.0 40.0 30.0 20.0 100 IN 10.0 247 212 177 141 106 70.6 353 OUT 35.3 M L 8 CXS 15 176 151 126 101 75.6 50.4 252 IN 25.2 440 377 314 251 188 126 628 OUT 62.8 M L 10 CXS 20 330 283 236 188 141 94.2 471 IN 47.1 687 589 491 393 295 196 982 OUT 98.2 M L 12 CXS 25 529 454 378 302 227 151 756 IN 75.6 1126 965 804 643 482 322 1608 OUT 161

Rotary Table Series MSU

Basic weight Size 22.5 Single vane 162 90 1 Positioning pin hole 25 161 180 261.5 90 Adjustment bolt (A) Adjustment bolt (B) 3 30 259.5 180 For 90 rotation Single vane (S): 80 to 100 adjustable 440 90 7 50 436 180 675 90 20 Adjustment bolt (A) adjustment range Adjustment bolt (B) adjustment range 60 670.5 180 180 Allowable Loads Do not permit the load and moment applied to the table to exceed

Precision Cylinder Series MTS

N Backlash Manual unlocking Theoretical Output 12 16 20 40 Rear end only 125 211 29 53 82 329 1mm Non-locking type only Standard Strokes (N) Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm) Bore size (mm) Standard stroke (mm) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107

Modular Type Lubricator Series AL

2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level gauge B 162 196 196 270 288 Metal bowl with drain cock & level gauge B 186 220 220 294 312 With drain cock B 85 123 153 187 187 261 279 With barb fitting B 161

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

TY TZ e f Q 1 1 2 32 M10 x 1.25 58 38 16 32 15 11 37 31 3/8 39 141 11 2 113 20 28 58 20 98 52 21.5 15 25 to 1800 1/3.5 stroke 40 M10 x 1.25 65 45 12 32 15 11 36 30 3/8 42 141 11 2 113 20 28 69 20 109 52 12 15 25 to 1800 50 M10 x 1.25 76 52 15 40 19 11 43 35 1/2 46 155 13 2.5 121 25 33 85 25 135 55 15 15 25 to 1800 63 M12 x 1.5 90 63 15 42 19 14 43 35 1/2 52 163 15 2.5 132 31.5 43 98 31.5 161

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Refer to the Made to Order specifications on page 21 for details. 2 Series MY1W Theoretical Output Unit: N Operating pressure (MPa) Bore size (mm) Piston area (mm) 0.3 0.4 0.5 0.6 0.2 0.7 0.8 16 200 40 60 80 100 120 140 160 20 314 62 94 125 157 188 219 251 25 490 98 147 196 245 294 343 392 32 804 161 241 322 402 483 563 643 40 1256 251 377 502 628 754 879 1005 50 1962 392 588 784 981 1177

Air Slide Table Series MXQ

(Unit: N) Cylinder bore size (mm) Rod size (mm) Piston area (mm) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 Rc 1/8 Rc 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161