3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

175 185.5 6 92 141 161 187.5 198 7 102 151 171 200 210.5 8 112 161 181 212.5 223 10 132 181 201 225 235.5 13 162 211 231 262.5 273 14 172 221 241 275 285.5 11 142 191 211 237.5 248 16 192 241 261 287.5 298 12 152 201 221 250 260.5 15 182 231 251 275 285.5 L1 L2 (L3) (L4) (L5) *SG Type: L2=10n+68 (L3)=L3(Std.)+25 (L4)=L4(Std.)+25 (L5)=L5(Std.)+25 11 Series VQ100 Non Plug-in Unit Manifold

Blue F-2815-151-B80-NORYL F-2815-151-B85-NORYL .016 Grey F-2815-161-B80-NORYL F-2815-161-B85-NORYL .017 Brown F-2815-171-B80-NORYL F-2815-171-B85-NORYL .018 Black / Lavender F-2815

HRS100/150

/Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump Weight (dry state) kg 151 154 Note 1) Use a 15% ethylene glycol aqueous solution if operating in a place where the ambient temperature and/or circulating fluid temperature is 10C or less.

39

J Hexagon socket head plug 2 x 2 x NPT 1/4 G Rc GA E B RD (mm) Bore size (mm) B C D E GA GC J L LA LB MM N P GB 50 63 92 48 12 13.7 95 166 95.5 12 376.6 155.5 78.4 M8 x 1.25 19 8 110 54 15 16.6 99 171.5 100.5 12 391.6 161 78 M10 x 1.5 22 10 Bore size (mm) PA PB PC PD R RB RC RD RR W XA XB XC RA 104.5 50 63 45 45 5 40 46 88 20 20 46 48 78.4 138.5 134 92 55 45 10 55 52 104 25 25 52 54 78 151

CXS

126 101 75.6 50.4 25.2 252 IN 440 377 314 251 188 126 62.8 628 OUT CXS20 10 330 283 236 188 141 94.2 47.1 471 IN 687 589 491 393 295 196 98.2 982 OUT CXS25 12 529 454 378 302 227 151 75.6 756 IN 1126 965 804 643 482 322 161 1608 OUT CXS32 16 844 724 603 482 362 241 121 1206 IN Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Weight (kg) Standard stroke (mm) Model 75

CC

70 122 151 48 374 836 52 402 1000 Slide screw + Slider guide: 47 dB (LJ1S) Slide screw + Linear guide: 53 dB (LJ1H) RZQ MI W S CEP1 Low profile, non-coupling type with reduced height and length CE1 Compact Electric Actuator Series LG1 CE2 Series with coupling available Mounting of a non-standard motor is possible.

CXS

126 101 75.6 50.4 25.2 252 IN 440 377 314 251 188 126 62.8 628 OUT CXS20 10 330 283 236 188 141 94.2 47.1 471 IN 687 589 491 393 295 196 98.2 982 OUT CXS25 12 529 454 378 302 227 151 75.6 756 IN 1126 965 804 643 482 322 161 1608 OUT CXS32 16 844 724 603 482 362 241 121 1206 IN Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Weight (kg) Standard stroke (mm) Model 75

Actuation Type: 1 (2 Position Single), Sealant: 1 (Rubber Seal), Function: Standard (1W), Voltage: 4 (220VAC 50/60HZ), Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 03 (3/8), Thread: N (NPT)

Actuation Type: 2 Position Single, Sealant: Rubber Seal, Function: Standard (1W), Voltage: 220VAC 50/60HZ, Light & Surge Suppressor: w/Light and Surge Suppressor, Manual Override: Non-locking Push Style, Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 3/8, Thread: NPT, Composite Symbol: -

Model: 5 (VPA500), Exhaust Type: 41 (Common Exhaust), Stations: 4 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: N (NPT)

Model: 5 (VPA500), Exhaust Type: 41 (Common Exhaust), Stations: 6 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: N (NPT)

Model: 5 (VPA500), Exhaust Type: 41 (Common Exhaust), Stations: 3 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: N (NPT)

Model: VPA500, Exhaust Type: Common Exhaust, Stations: 4 Stations, Symbol: 1, Port Size: 3/8, Thread Type: NPT

Model: VPA500, Exhaust Type: Common Exhaust, Stations: 6 Stations, Symbol: 1, Port Size: 3/8, Thread Type: NPT

Model: VPA500, Exhaust Type: Common Exhaust, Stations: 3 Stations, Symbol: 1, Port Size: 3/8, Thread Type: NPT

JXCx-OMU0026

(Position error Alarm) Position error counter overflow (151) RESET and SVON is ON D Check if the actuator travel has been interrupted.Also, make sure that the load, speed, acceleration and deceleration are within the range of the actuator. Turn off the control and motor drive power supplies. < Details > An abnormality occurred in communication with the encoder.

10

mm] Mounting side Model A B C D E F Weight [g] MHL2-10DZ-X85 8 67 88 108 132 112 350 MHL2-10D1Z-X85 8 83 104 144 168 131 420 MHL2-10D2Z-X85 8 101 122 182 206 169 495 MHL2-16DZ-X85 9.5 79 96 126 156 126 650 MHL2-16D1Z-X85 9.5 109 126 186 216 179 840 MHL2-16D2Z-X85 9.5 129 146 226 256 219 965 MHL2-20DZ-X85 9 89 108 148 186 146 1115 MHL2-20D1Z-X85 9 131 150 230 268 221 1490 MHL2-20D2Z-X85 9 151

3

Rotary Angle Port side During unclamping (Extension end) 80 to 100 (9010) L type (Counterclockwise) During unclamping (Extension end) 80 to 100 (9010) R type (Clockwise) Theoretical Output Operating pressure (MPa) Unit: N Bore size (mm) Rod size (mm) Operating direction Piston area (cm2) 0.8 1.1 1.5 2.0 2.0 3.1 3.8 4.9 6.0 8.0 10.6 12.6 16.5 19.6 28.0 31.2 1.0 85 113 151 201 201 314 378 491

,

FG-S-M0 117.5 75.5 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 14 4 2 12 12 26 35 45 14 Indicator light 5 1 3 Manual override 39 36.5 41.5 2-5.5 mounting holes 44 M12 connector 20 (12, 14 port) 10.5 (2, 4 port) 85.5 72.5 10.5 PE port 29 14 SMC M5-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151

LG1H

20 25 30 1000 1000 930 740 600 500 Model Note LG1H202PC-500-F LG1H202PC-600-F LG1H202PC-700-F LG1H202PC-800-F LG1H202PC-900-F LG1H202PC-1000-F 700 700 600 600 500 500 500 500 500 500 500 500 500 500 500 500 500 500 Power supply: 100/110(V)AC 10% Compatible controller: LC1-12HC1Power supply: 200/220(V)AC 10% Compatible controller: LC1-12HC2Consult SMC if outside of the above conditions. 151