Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

24.5 55 175 20 8 Front flange type: MQMLF 6 20 2.3 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke 10, 16, 20, 25 FY FT FX FZ H 2-FC S + Stroke ZZ + Stroke (mm) Bore size (mm) FC FT FX FY FZ H S ZZ 10 5.5 2.3 33 20 42 28 65 101 16 5.5 2.3 42 24 54 30 74 114 20 7 4 60 34 75 40.5 97.5 151 25 7 4 60 40 75 44.5 102.5 160 14 Series MQM Refer to the basic type on page 13 for other dimensions.

Air Cylinder Series MB

42 53 53 73 73 90 9 9 10.5 10.5 12.5 12.5 13 MB-B03 MB-B05 MB-B08 MB-B12 Rotating angle Mounting plate Model without air cushion is designed to include rubber bumpers.

OMR0032

Controller Set Up . 42 9.1 Communication Speed and Controller IDs . 42 9.2 Selection of the input type . 42 9.3 Basic parameter setup . 43 9.4 Movement Profile Recommended for Pulse Input Type . 48 (1) Positioning time . 48 (2) Recommended movement profile . 48 9.5 I/O setup . 49 9.6 Step Data setup . 50 10. Monitor and Test Mode of the Controller . 51 11.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

60<61> Indicator light VS7 54<59> 49<52.5> R1 R2 R1 R2 P P 81<82> 75<76> Cover diameter 1.5 Cross section 0.23mm2 < >: AC < >: AC 1.12-37 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ1000 Grommet(G): VQZ125 (R)lGl01 2 position double 0 1 23.4Mounting holes 300 95 (Lead wire length) 47.5 18 7.2 7.2 3 R3 4 2 22 10 SMC SMC B A 3 1 5 Cover diameter 1.6 Cross section 0.34mm2 Manual override 42

Speed Controller with Indicator

19.2 47 (48) AS321FS-02-08 (S) 8 13.2 22.7 33 14.2 AS321FS-02-10 (S) 10 15.9 26.7 37 35.7 15.6 38 (39) AS321FS-02-12 (S) 12 18.5 29.7 40 34.5 17 50 (51) AS321FS-03-06 (S) 6 1/4 19 16.6 13.3 10.4 21.8 32.1 28.7 55.4 54 50.2 48.8 24.5 28.5 9.3 19.2 38 (39) AS321FS-03-08 (S) 8 13.2 22.7 33 14.2 AS321FS-03-10 (S) 10 15.9 26.7 37 28 15.6 29 (40) AS321FS-03-12 (S) 12 18.5 29.7 40 26.8 17 41 (42

CXS

MTS Smaller and lightweight MY CY Dimensions/Weight Note) Bore size (mm) Dimensions (mm) Weight (kg) Series Height Width Overall length MG Overall length 0.057 CXSJ6 42 + Stroke 32 13.4 CX Basic type 6 Additional dimension for each bore size compared to the basic type 2 mm (20) 3 mm (25) 5 mm (32) CXS6 0.095 58.5 + Stroke 37 16 Series CXS 6, 10, 15, 20, 25, 32 D0.114 CXSJ10 56 + Stroke 42

ARM10/11

B C D E F G H I J K L M N O P Symbol Model A ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Dimensions by the Number of Stations Manifold stations 10 Model Symbol 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294 252 210 168 126 84 L1 592

CXS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.057 CXSJ6 42 + Stroke 32 13.4 CX Basic type 6 Additional dimension for each bore size compared to the basic type 2 mm (20) 3 mm (25) 5 mm (32) CXS6 0.095 58.5 + Stroke 37 16 Series CXS 6, 10, 15, 20, 25, 32 D0.114 CXSJ10 56 + Stroke 42 CXS basic type

MNB

Bore size (mm) A B A + B + 90 B DA DB DL DU DC DX DE DO DR DT DS DH Z DDH10(Hole) 32 40 50 63 80 100 6.6 54 42 32 22 44 14 62 9 15 7 33 224 10 +0.058 0 10 32, 40 160 25 45 MB-B03 6.6 63 42 32 22 44 14 62 9 15 7 33 235 10 +0.058 0 10 9 75 53 43 30 60 20 81 10.5 18 8 45 271 11.5 +0.070 0 14 50, 63 190 40 60 MB-B05 9 90 53 43 30 60 20 81 10.5 18 8 45 285 +0.070 0 11.5 14 +0.084 0 11 102 73 64

HRX-OM-W032

PV SV 5.21 Communication Function HRS Series 5-78 HRX-OM-W032 Chapter 5 Display and Setting of Various Functions 42. Set time delay for the contact input signal 2 delay timer for reading with [] key or [] key, and press [SEL] key to enter.

MHF2

42 42 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 MHZ MHF MHL 4-M6 x 1 thread depth 15 MHR Mounting thread MHK 6 159 6 MHS 62 174 2-M6 x 1 thread depth 6 MHC Mounting thread 33 144 MHT E MHY 13 25 25 30 MHW 41 MRHQ E 4-5.2 through (Mounting hole) 0 -0.1 Misc. 32 46 1.2 46 1.2 Finger opening port M5 x 0.8 Finger closing port M5 x 0.8 4-10 D+0.1 0 Close: 0 E-E 20Open: 801 8-M4 x 0.7 thread depth

MNB

Bore size (mm) A B A + B + 90 B DA DB DL DU DC DX DE DO DR DT DS DH Z DDH10(Hole) 32 40 50 63 80 100 6.6 54 42 32 22 44 14 62 9 15 7 33 224 10 +0.058 0 10 32, 40 25 45 160 MB-B03 6.6 63 42 32 22 44 14 62 9 15 7 33 235 10 +0.058 0 10 9 75 53 43 30 60 20 81 10.5 18 8 45 271 11.5 +0.070 0 14 50, 63 40 60 190 MB-B05 9 90 53 43 30 60 20 81 10.5 18 8 45 285 +0.070 0 11.5 14 +0.084 0 11 102 73 64

Compact Type

Dimensions/Weight Overall length Reverse mounting Width Symmetric mounting CXS standard CXSJ Height Note) Bore size (mm) Dimensions (mm) Weight (kg) Series Height Width Overall length 0.057 CXSJ6 42 + Stroke 32 13.4 6 CXS6 0.095 58.5 + Stroke 37 16 0.114 CXSJ10 56 + Stroke 42 15 10 CXS10 0.170 72 + Stroke 46 17 Reverse mounting mechanism 0.219 CXSJ15 70 + Stroke 54 19 Reverse mounting 15

MHF2

42 42 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 MHZ MHF MHL 4-M6 x 1 thread depth 15 MHR Mounting thread MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 159 6 MHS 62 174 2-M6 x 1 thread depth 6 MHC Mounting thread 33 144 MHT E MHY 13 25 25 30 MHW 41 MRHQ E

AC

End plate ass'y 1 pc. 1.5-26 ARM2500/3000 Dimensions Dimensions B C D E F G H I J K L M N O P Symbol Model A ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 Manifold stations Dimensions by Number of Stations 10 Model Symbol 9 8 7 6 5 4 3 2 454 412 370 328 286 244 202 160 118 L1 ARM2500 442 400 358 316 274 232

MHF2

42 42 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 4-M6 x 1 thread depth 15 Mounting thread 6 159 6 62 174 2-M6 x 1 thread depth 6 Mounting thread 33 144 E 13 25 25 30 41 E 4-5.2 through (mounting hole) 0 -0.1 32 46 1.2 46 1.2 Finger opening port M5 x 0.8 Finger closing port M5 x 0.8 4-10 +0.1 0 Close: 0 E-E Open: 801 8-M4 x 0.7 thread depth 4 Attachment mounting thread 128 Mounting thread

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

10, 16, 20 (mm) Bore size (mm) Stroke range (mm) A B FD FT FV FX FV 10 10 to 40 49.5 31.5 4.5 5.5 30 45 FX FT L B + Stroke 16 10 to 60 54 34 6.6 8 39 48 FZ 20 10 to 60 57.5 37.5 6.6 8 42 52 A + Stroke 2-FD 25 10 to 50,75,100 64 42 5.5 8 48 56 30 10 to 50,75,100 70.5 48.5 5.5 8 54 62 25, 30, 40 40 10 to 50,75,100 72 50 6.6 9 67 76 Bore size (mm) FZ L M FV 10 55 18 FX FT L B + Stroke 16 60

Compact Type Dual-Rod Cylinder Series CXSJ

Dimensions/Weight Overall length Reverse mounting Width Symmetric mounting CXS standard CXSJ Height Note) Bore size (mm) Dimensions (mm) Weight (kg) Series Height Width Overall length 0.057 CXSJ6 42 + Stroke 32 13.4 6 CXS6 0.095 58.5 + Stroke 37 16 0.114 CXSJ10 56 + Stroke 42 15 10 CXS10 0.170 72 + Stroke 46 17 Reverse mounting mechanism 0.219 CXSJ15 70 + Stroke 54 19 Reverse mounting 15

Cylinder with Lock Series MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0