EX510

Sumitomo 3M Limited Manufacturer's part no. 1-1473562-4 1-1473562-4 1473562-4 1-1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 1473562-4 2-1473562-4 2-1473562-4 2-1473562-4 D-A9 D-M9 D-Y D-Z73 D-Z76 D-Z80 Z/ISE1 Note 1) ZS-28-C ZS-28-C ZS-28-C ZS-28-C ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-C-1 ZS-28-

Common Supply Regulator

How to Order 30 M BE 02 03 K AR D Common supply Symbol Description Body size 20 30 40 Nil With backflow function Without backflow function With backflow function Nil c Thread type 01 Port size (IN) 02 03 04 01 Port size (OUT) 02 Note 1) 03 Nil Without mounting option B With bracket a Mounting H With set nut (for panel mount) Nil Without pressure gauge Note 2) Note 2) Square embedded type

5 Port Solenoid Valve Series SQ1000/2000

D Note 1) C Note 2) Note 1) Except double (latching) Note 1) The function symbol is D for double solenoid specifications.

Direct Operated Solenoid Valve Metal Seal Series VS4
10

Electrical entry q Description 01 02 03 01 02 03 01 02 03 Mounting bolt and gasket are not included. Platinum silver Body C: Conduit VS4010-CSSub-plate Platinum silver Aluminum die-casted w T: Conduit terminal VS4010-TSSpool/Sleeve Stainless steel e U: Grommet, D: DIN terminal VS4010-SReplacement Parts Part no. No.

Gun Type Ionizer

Twists or crushing of connected tubes d. Hardness and deterioration of connected tubes e. Air leakage 192

Water-cooledThermo-chiller

SG Connector location P3: Not used for the maintenance purpose port D-sub 9 (Male receptacle) P2: Serial RS-485 D-sub 9 (Female receptacle) P1: Contact input/output D-sub 25 (Female receptacle) Power cable entry Rear side 116 Common Specifications Series HRW Operation Display Panel q Description No.

PSxx-OMS0004CN

0.2F.S.(25 IP65 AC500V 1 100M(DC500 V) -1060 -2070 () 3585RH() CERoHS 01 02 R1/8M50.8 R1/4M50.8 C3604+ Al2O3(96) OFKM+ M12 88 g 95 g M12 175 g 182 g AWG23 0.72 mm 1.14 mm 4 3 m -15No.PS-OMS0004CN-D [mA] [V] A B 01MPa 0 1MPa -100100 kPa -100 kPa 100 kPa 0500 kPa 0 500 kPa -16No.PS-OMS0004CN-D A B PSE57-01 8 R1/8 PSE57-02 12 R1/4 M12 ZS-37-A 1 2 4 3 M12 ZS-37-B 3 4 2 1

Pressure Sensor for General Fluids

D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5 ZS-31-X189 20 9 NPT1/8 NPT1/8 14 1.5 ZS-31-X175 29 13 R1/4 R1/4 17 1.6 ZS-31-X186 29 13 NPT1/4 NPT1/4 17 1.6 -14No.PS-OMG0006-D Revision history A: For B: Complete revision C: Contents revised in several places. D: Contents revised in several places.

PSxx-OMG0005CN

[V] A B C 0-101 kPa 0 -101 kPa 10.1 kPa -100100 kPa -100 kPa 100 kPa 01 MPa 0 1 MPa -0.1 MPa 0500 kPa 0 500 kPa -50 kPa -13No.PS-OMG0005CN-E PSE5601 PSE56N01 02 N02 PSE56-C01 A B PSE56-01 8.2 R1/8 PSE56-02 12 R1/4 PSE56-N01 9.2 NPT1/8 PSE56-N02 12.2 NPT1/4 PSE56-A2 PSE56-C01 Rc1/8 PSE56-A2 15.5 URJ1/4 PSE56-B2 9.5 TSJ1/4 PSE56-B2 ZS-31-X D E F G H I ZS-31-X188 20 9 R1/8 R1/8 14 1.5

MONOSASHI-KUN WITH BRAKE CONTROLLER

NO YES Use With No Problem. 11 2-2 System Configuration 12 2-3 Recommended Circuit Design Horizontal Mounting Downward Mounting Upward Mounting Recommended Pneumatic Equipment Bore Directional Brake valve Regulator Tubing Silencer Speed valve Controller 40 VFS240R VFS210 AR425 Nylon 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 Nylon 10/7.5 AN200-02 AS4000-02 63 VFS340R

Quick Exhaust Valve Series AQ 1

Applicable tubing O.D. d Weight (g) D1 39.2 M1 L3 12.9 M2 M1 12.9 L2 14.3 L4 12.9 L1 5.2 D2 39.2 L3 23.5 Weight (g) D1 10.0 L2 13.7 L1 5.2 Model Tubing O.D. d AQ240F-04-00 Model Tubing O.D. d AQ240F-04-04 6 4 9.3 5 4 9.3 AQ240F-06-00 AQ240F-06-06 13.7 13.7 15.4 6.2 13.7 26.7 40.7 8 10.0 14.7 6 11.6 6 6 11.6 6.2 40.7 AQ340F-06-00 AQ340F-06-06 13.7 19.5 13.7 13.7 6.3 44.8 31.7 13 19.6 11.8

VT325

DIN terminal With surge voltage suppressor VP 200 VAC, 50/60 Hz Port size 110 VAC, 50/60 Hz 02 1 4 4 AC: Can be attached to Grommet, Conduit, Conduit terminal.

q"s

I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

S070

Stations 02 03 2 stations 3 stations Station 3 2 1 D side U side 20 20 stations Note) Maximum of 20 stations Electrical entry Grommet/Plug lead C How to Order Valves S070 A 5 B G Electrical entry Body type Body type Base mounted with clips G C Grommet Plug lead with light/surge voltage suppressor Symbol A Coil voltage Power consumption Pressure specification Flow rate 5 6 V S R 24

VZ3000

) (Mounting hole pitch) MAX. 11 VZ3540 (Mounting hole pitch) (Lead wire length) G: 300 mm H: 600 mm 2-M5 x 0.8 (PE port) 4-Rc 1/8 (Piping port) L plug connector (L) VZ3 40-L-01 M plug connector (M) VZ3 40-M-01 3 4 5 3 4 5 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor Built-in speed controllers VZ3 50DIN terminal (D) VZ3 40-D-01 3 4 5 3 4 5 Applicable

Digital Flow Switch (Integrated display type)

(example: If the flow switch with output impedance of 1 k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5(V) x1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V).

REGULATOR

AR-OMT0015 PRODUCT NAME REGULATOR MODEL/ Series AR20K-(F,N)01 (F,N)02(B,E,G,H,M)(-1,N,R,Y,Z)-B AR25K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR30K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)02 (F,N)04(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)06(B,E,G,H,M)(-1,N,R,Y,Z)-B AR50K-(F,N)06 (F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B AR60K-(F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B Contents PAGE 1.

Filter Regulator AW30, 40

Round Square embedded type Round Square embedded type G46-10-02 G36-10-01 1.0MPa Note 3) GC3-10AS Note 2) GC3-10AS GC3-10AS 1 4 1 8 1 4 Note 1) Pressure gauge G46-2-02 G36-2-01 G46-2-02 Set pressure + 0.05MPa (at relief flow rate of 0.1l/min(ANR)) 5 to 60C (With no condensation) 5m 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS Note 4) AD48 N.O.

3 Port Solenoid Valve Series SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

Title not found

Parenlneses CPA1 BN do Boot with Boot' BORE D E G'GB J K M MM N P H z.