Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Applicable Auto Switch Model

resistance Diagnosis output Water resistance Water resistance Water resistance Water resistance Water resistance Diagnosis output With timer Diagnosis output Diagnosis output With timer With timer Function 2 color 2 color 2 color 2 color 2 color 2 color 2 color 2 color 2 color 2 color 5.3-9 5.3-11 5.3-10 5.3-25 5.3-12 5.3-13 5.3-18 5.3-14 5.3-15 5.3-16 5.3-26 5.3-17 5.3-27 5.3-19/5.3-20 5.3-21

Booster Regulator Series VBA1110 to 4200 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. 1. Transporting When transporting this product, hold it lengthwise with both hands. Never hold it by the black handle that protrudes from the center because the handle could become detached from the body, causing the body to fall and lead to injury. 2.

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

For pipe fitting 4B through 6B Applicable fittings For pipe fitting 3/4B through 3B Welding Welding Piping B Reducing tees B 1 1 x 1 x 1 24 or more 11/4 11/2 11/4 x 11/4 x 1 1B socket 11/2 x 11/2 x 1 cut in half 2 x 2 x 1 2 21/2 x 21/2 x 1 21/2 3 x 3 x 1 3 Pipe 4B through 6B Reducing tees B Socket Pipe : JIS B 2301 : JIS B 2302 : JIS B 3452 Without flash 16-12-8 4 Paddle Style Flow Switch

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 93 48 14.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 114 65 17.5 8 32 64 7 52 6 38.5 25 M5 x 0.8 17-5-48 7 Series LVD Integral Fitting Type (Hyper Fittings) With flow rate adjustment (Max.

VDW

2 3 4 5 n U side VDW23-GVDW23-GVDW23-GVDW23-G70 31.5 21 18.5 (OUT port) n-1/8 n-M5 x 0.8 11 P = 22 11 4.5 1.5 54 6 32 6 (19.5) 9.5 11 9.5 11 4-M4 x 0.7 46 10 24 10 When w/o bracket, M3 threads at both ends (4 positions) can be used for other purposes.

VQ7-6/7-8

P.7 Manifold Dimensions (DIN Connector Type) P.8 Manifold Dimensions (Prewired Connector Type) Manifold Options P.9 to 12 Manifold with Control Unit P.13, 14 Option Dimensions P.15, 16 Series VQ7-8: Single Unit How to Order Valves P.17 Models, Standard Specifications P.18 P.19 Single Unit Valve Dimensions (DIN Connector Type) P.20 Single Unit Valve Dimensions (Prewired Connector Type) P.21

ZPT/ZPX

11 Hexagon width across flats 21 11 Width across flats 37 4-M4 x 0.7 45 Width across flats 24 3-M3 x 0.5 28 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B D B D Dimensions Dimensions (mm) (mm) A B C D E G H I Y A B C

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t41x1.5 M 1 8 X 1 . 5 M 1 8 X l . 5 M22X1.5 t\r26x1.5 27 v4 42 20 45 1 5 3 8 60 I 80 42 100 2t5 52 43 59 v. 30 ls 46 1 0 21 50 168 0 70 I 90 50 1 1 0 58 237 58 52 1 5 66 n 6 ?

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Basic Type/Direct Mount Type

CY36 Consult with SMC in case a bracket with weight exceeding the above value is to be mounted. 28 27 26 25 24 23 22 21 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1000 2000 3000 4000 5000 6000 CY315 Note 1) According to the dead weight deflection in the figure on the right, provide clearance so that the cylinder does not touch the mounting surface or the load, etc., and is able

CE

7 -X NBR Valve retainer seal #7 Since there is a possibility of improper operation, please contact SMC regarding the replacement of seals. 20Data 10-12-21 21 Series CE1 Dimensions: 12, 20 Both ends tapped style: CE1B Bore size Stroke 2-P (Port size) 2-N through 4-O thread depth R Metal connector 500 or 3000 M14 x 1 B + Stroke A + Stroke A B C D E G H I K L M Bore size (mm) 12 20 Standard

Compact Hydraulic Cylinder

Bore size (mm) NT-02 NT-04 NT-04 NT-05 NT-05 NT-08 NT-10 B C d D H 12.5 21 21 26 26 31 39 5 8 8 11 11 13 16 15 25.4 25.4 31.2 31.2 37 47.3 M8 x 1.25 M14 x 1.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 32 40 50 63 80 100 13 22 22 27 27 32 41 256 Auto Switch Mounting CHQB/CHQWB Series Refer to pages 431 to 490 for detailed specifications.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

For more information, please refer to page 8-16-21. Note 2) With 25, piping screws can be selected by the customer. (Refer to How to Order.)

15

Mounting orientation and static moment Mounting orientation Static load Horizontal mounting Ceiling mounting Wall mounting Vertical mounting Bore size (mm) A [mm] 6 10 15 20 25 32 40 m m x g x x m x g x y 19 21 25 27 33 40 49 m x g x x m x g x y m x g x (z + A) m x g x x m x g x (z + A) m x g x y M1 M2 M3 Static moment A: Distance between the center of the guide shaft and the upper surface

VK3000

port body ported: VK3120 5 port base mounted: VK3140 Blanking plate assembly: VK3000-7-1A M3 x 26 Round head combination screw DXT199-23-4 M3 x 26 Round head combination screw M3 x 8 Round head combination screw VK300-33-3 Blanking plate VK3000-7-1 Manifold gasket VK3000-6-1 Manifold gasket VK3000-6-2 Manifold gasket for blanking plate VK3000-6-3 Applicable base Type VV5K3-20 Type VV5K3-21

100

Weightp. 21 Internal Circuits and Wiring Examplesp. 22 Exhaust Characteristics/Flow Rate Characteristicsp. 23 Time to Reach Vacuum/Break Flow Rate Characteristics/Vacuum Breaking Time p. 24 Constructionp. 25 How to Order Replacement Partsp. 26 Dimensionsp. 27 Specific Product Precautionsp. 31 Safety Instructions Back cover 6 Multistage Ejector Max. suction flow rate: 100 L/min (ANR) Only

CRQ2

3 Steel wire Round head Phillips screw Nickel plated 20, 30, 40 Replacement Parts Part no. 10 15 20 30 40 Description Description Seal kit P473010-1 P473020-1 P473030-1 P473040-1 P473050-1 19, 20, 21, 23 11-8-4 5 Series CRQ2 Compact Rotary Actuator Rack & Pinion Style Construction With auto switch Size 10/15 With auto switch Size 20/30/40 !3 !0 !3 !0 CRB2 CRBU2 CRB1 MSU !4 !7 !1 !9 !