Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM01301 Manifold ZZK2 04 A A 1 L 00 00 (1) (2) (3) (4) (5) (6) Remains blank when no option is selected. (1) Number of stations Note 1) Symbol Stations 01 1 station 02 2 stations 10 10 stations Note 1) In the case of an ejector, for an adequate performance, the number of stations when operated simultaneously depends on the nozzle diameter.

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 Manifold ZZK2 04 A 1 L 00 00 (1) (2) (3) (4) (5) (6) Remains blank when no potion is selected. (1) Number of stations Note 1) Symbol Stations 01 1 station 02 2 stations 10 10 stations Note 1) In the case of an ejector, for an adequate performance, the number of stations when operated simultaneously depends on the nozzle diameter.

ZSE1/ISE1

Connector Socket Lead wire Hook 16-6-4 5 Compact Pressure Switch Series ZSE1/ISE1 Dimensions Grommet type: ZSE1-00-14/-15/-18/-19 Connector type: ZSE1-00-14C/-15C/-18C/-19C 23.4 Indicator light (Red) Indicator light (Red) 23 23 15 15 H HYS SET L H L H HYS SET L H Hysteresis setting trimmer Pressure setting trimmer Pressure setting trimmer Hysteresis setting trimmer ZSE ISE 23.4 23.4 Indicator

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350

NAR Series

Secondary pressure (psig) 87 Secondary pressure (psig) 72.5 58 29 15 43.5 30 15 27.6 0 0 141.3 282.5 424 565 Flow (SCFM) 00 141.3 282.5 424 565 Flow (SCFM) 0 30 43.5 58 72.5 87 101.5 116130.5 145 Supply pressure (psig) 152 Return to Menu Specialty Regulators NAR Series Pressure Regulator NAR425, 435, 625, 635, 825, 835, 925, 935 Construction No.

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

Connector Socket Lead wire Hook 776 Compact Pressure Switch Series ZSE1/ISE1 Dimensions Grommet type: ZSE1-00-14/-15/-18/-19 Connector type: ZSE1-00-14C/-15C/-18C/-19C 4 . 23 4 . 23 Indicator light (Red) Indicator light (Red) 23 23 15 15 H HYS SET L H L H HYS SET L H Pressure setting trimmer Hysteresis setting trimmer Hysteresis setting trimmer Pressure setting trimmer 4 . 23 4 . 23 Indicator

LC-OM089xx

64 76 10 00 Spain (34) 945-18 41 00 Belgium (32) 3-355 14 64 Netherlands (31) 20-531 8 Germany (49) 6103 4020 Sweden (46) 8-603 12 00 (420) 5-414 24611 Norway (47) 67 12 90 20 Austria (43) 2262-62 280 Italy (39) 02-927 11 Fig.2-1 P-clip Fig.2-2 U-clip Fig.2-3 Soldering Country Telephone Country Telephone *Websites Kingdom Ireland (351) 1-403 9000 United SMC Corporation www.smcworld.com SMC

ø2 One-touch Fittings Series KJ

(mm) Applicable fitting size Model KJY02-M3 KJY02-M5 2 M3 x 0.5 M5 x 0.8 KJR02-04 4 2 KJU02-00 2 KJU02-23 KJU02-04 2 Bulkhead union KJE Plug KJP Applicable tubing O.D. (mm) Model Applicable fitting size Model KJE02-00 2 KJP-02 2 2 Polyurethane tubing Series TU 2 Miniature fittings Series M

LZ-OM003xx

Spain (34) 945-18 41 00 Denmark (45) 70 25 29 00 Poland (48) 22-548 50 85 Greece (30) 1-342 60 76 Switzerland (41) 52-396 31 31 Belgium (32) 3-355 14 64 Netherlands (31) 20-531 8 Germany (49) 6103 4020 Sweden (46) 8-603 12 00 Protection ground terminal (420) 5-414 24611 Norway (47) 67 12 90 20 Austria (43) 2262-62 280 Italy (39) 02-927 11 terminal on the end of motor, using a metal P-clip

LZ-OM004xx

B C D 44 Mounting J ig to the piston 43 Mounting to workpiece Fem ale thread type Male thread type D o No.LZ-OM00401 B (3/3) (44) 1908-56 38 88 Hungary (36) 1-371 1343 Turkey (90) 212 221 15 12 Finland (358) 9-859 580 Portugal (351) 22 610 89 22 Denmark (45) 70 25 29 00 Poland (48) 22-548 50 85 Greece (30) 1-342 60 76 Switzerland (41) 52-396 31 31 France (33) 1-64 76 10 00 Spain (34) 945-

HRX-OM-R026

13c, Granfoss Nringspark, N-1366 Lysaker Poland SMC Industrial Automation Polska Sp. zo.o (48) 22 211 96 00 ul.

Series AP3100

Manually operated type (For high pressure and high flow) Diaphragm Valve for Ultra High Purity Series AP3100 Suitable for UHP gas supply line Body material: 316L SS secondary remelt High pressure type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating

CEx-OMG0106

ML2B / W1 ML2B / M1 0 0 0 0 Momentum Nm 0 0 Load N 0 Piston Speed m/s Piston Speed m/s ML2B / W2 ML2B / M2 Momentum Nm Load N Piston Speed m/s Piston Speed m/s ML2B / W3 ML2B / M3 20 10 Momentum Nm 5 Load N 3 2 1 Piston Speed m/s Piston Speed m/s ML2B / W4 Allowable Kinetic Energy 00 H or izontal M ounting 100 5 00 Ver tical M ounting 50 Load N 0 0 1 00 Load N 0 50 5 Piston Speed

LEY-OM007

/ / INC()/ / b c 2mm d e f / P.41 7.2 / P.43 7.2 g INP ON INP INP ON / P.41 7.2 h / P.41 7.2 / P.42 7.2 i 100 % 150 % LEY16A 200 % LEY25A / P.42 7.2 j 12AREA ON 12 INC ABS() No.1 148 250 AREA k INP No.0 50+20 = 70 -24- 1 -IN INPAREA a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 100.00 3000 3000 0 0 0 100 80.00 90.00 0.50 No.00

JXCx-OMU0026

When the controller is turned ON next time, the default value (January 1st, 2000. 00:00:00) will be set. Therefore, set the date and time again. -13No. JXC-OMU0026 (a) Change to remote mode Change the mode to remote mode in the main window. When the mode is changed to the remote mode, the motors of the connected actuators will turn ON.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

DB MVGQ L S Q K J C " #$% B " #$% A " #$% G % 6 %, , %( **%' -.7 MVGQM, MVGQL Common Dimensions 55 : *; % , %(' )* )% 8% ,9% 55 #*('*' ,$% 55 B C DA G GA H J K L MM ML NN PW Q R S T V W X YY YL Z VW / / #%%, 80 0 00 0 / 00 0 1 / 1 & / 1 & / -. 100 0 0 1 1 & 1 & / 0 % < , ,,; % 5*( 6* % % (%5%'*% ,$%, % *( % ,*('*' ,$%, ;= 5%*(, 6 (,* ( * , *% % . % % %* %(= %&% % 55%

ALB900

Description Material Aluminum casted Aluminum casted Top cover Bottom cover q w VOA301-M V0307E-D-X56 3 port switching valve (for operation control) e 1 VR4152-00-0 GA46-10-01 12702A 12705A NLP-100A PNY-25 SW-100 x 6 x 2 JIS B 2401P3 r t y u i o !0 !

VNB

PB 101 to 47.9 kPa Pilot Solenoid Valve Specifications JIS Symbol (Vacuum pilot type) Valve type Type 6A to 25A 32A to 50A, 32F to 50F V0301-00 Port size Pilot solenoid valve SF4--23 N.C. Normally closed N.O.

Multistage Ejector Series ZL112/212 1

(Full span) Class 3 0 to 50C Housing: Polycarbonate/ABS resin Operating temperature range Material Port exhaust JIS Symbol Standard P V 13-7-5 6 Series ZL Option Specifications With digital vacuum pressure switch (ZSE4) Digital Vacuum Pressure Switch Specifications ZSE4-00---X105 ZSE4B-00---X105 ZSE4E-00---X105 Part no.

%silltr

l 250 225.5 305 256.7 428 323.5 21775 1089 100 340.2 390.5 390.8 352 476.2 669.2 505.s 34020 l70l Table. 6.17 Mass in kg tor cylinders trom 25 to |00 mm Dia. for a Load Ratto ot 85olo wilh 5 bar working pressure. P E E D C O N T R O L The speed of a cylinder is delined by the extra force behind the piston, above the torce opposed by the load.