SMC Corporation of America
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34 Reading alarm status 2 01 32 05 34 36 3B 0D 01 32 02 34 30 38 30 03 30 30 0D Answer ERR11 Answer -1.52 deg.C Reading offset 01 32 05 36 36 3D 0D 01 32 02 36 2D 31 35 32 03 32 3F 0D 2 36 Offset setting (without writing EEPROM) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set

ZH05DA06 06 06 One-touch One-touch One-touch 06 01 06 One-touch Screw-in One-touch 01 01 01 Screw-in Screw-in Screw-in ZH05DA07 07 07 One-touch One-touch One-touch 07 N01 07 One-touch Screw-in One-touch N01 N01 N01 Screw-in Screw-in Screw-in ZH07DA06 06 06 One-touch One-touch One-touch 06 01 06 One-touch Screw-in One-touch 01 01 01 Screw-in Screw-in Screw-in ZH07DA07 07

Note 3) 52-SY series are not available with resin type manifold (45 type). 4 B ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position single L plug connector (L) 52-SY5120-L-01 (-F2) In case with foot bracket 52-SY5120-L-01-F1 22.6 21 47 16.7 4.5 38 16.6 1.2 22 29 2 x M3 x 0.5 Threads depth 3.5 (For bracket mounting) 65 2 x 3.2 (Mounting holes) 14.7 Insulation: Black () 11.6

N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

VH*-OMQ0023-C PRODUCT NAME Pressure Relief 3 Port Valve With Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS30-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS40-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS40-(F,N)06A,B(-B,S)(-K,R,Z) VHS50-(F,N)06~10A,B(-B,S)(-K,R,Z) VHS2510-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS3510-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS4510-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS4510-(

VFR2000 series manifold, metric, Plug-in and non plug-in styles, Wiring types (non plug-in): grommet, grommet terminal, Conduit terminal, DIN connector, L plug connector M plug connector, Wiring types (plug-in): terminal block, multi-connector, D-sub connector, Maximum stations: 17 (depending on style), MFLD, VFR2*10 SERIES, VALVE, VV*FR* MANIFOLD VFR SERIES, UM, VV*FR* BUILT IN FITTINGS

Options: Count (N,n; Inputs: U> (Up) D> (Down) C> (Clear) P> (Preset) Outputs: ON/OFF and Word Comparison 6 7 PneuAlpha Function Blocks 6 6.11 The COMPARE Block Compare two values and when the equation is true the Output will come ON.

Digital Flow Switch For Air Series PF2A How to Order ZSE ISE Integrated display type PF2A7 10 01 27 PSE Flow rate range Z I SE3 Thread type Unit specifications 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Nil N F Rc NPT G Nil M Wiring specifications With unit switching function Fixed SI unit Note) PS 3 m lead wire with connector Without lead wire

Flow Rate Characteristics Relief Characteristics IR1220-01-A Supply pressure: 0.7 MPa IR1220-01-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate:

Note 3) M5R Piping port R1/8/Side ported 01 DIN rail adapter Note 5) R1/8 Piping adapter R Note 4) NPT1/8/Side ported N01 Note 3) Not available for piping specifications of 01 and N01.

2) Not conforming to ISO1179-1. 24 V 2 4 to 20 mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Mounting Port 1(P), 2(A) Port 3(R) Applicable pilot valve (4) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5

VFR2000 series manifold, metric, Plug-in and non plug-in styles, Wiring types (non plug-in): grommet, grommet terminal, Conduit terminal, DIN connector, L plug connector M plug connector, Wiring types (plug-in): terminal block, multi-connector, D-sub connector, Maximum stations: 17 (depending on style), MFLD, VFR2*00 SERIES, VALVE, VV*FR* MANIFOLD VFR SERIES, UM, VV*FR* BUILT IN FITTINGS

CM01-8DP4S DDK Ltd. 10 Series PF2A Dimensions PF2A703H, 706H, 712H D E Internal circuits and wiring examples to are terminal numbers.

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

Fluid velocity detection element Application examples Flow control of cooling water for welding gun Flow control of high frequency electric power supply cooling water, for wafer temperature regulation Flow control of N2 gas to prevent detection camera shimmering and lead frame oxidation Features 2 For Air For Air Digital Flow Switch Series PFA How to order Integrated display type PFA7 10 01

/4" 5/8" to 3/4" Weight, lbs (kg) 46.3 (21) 49.6 (22.5) 81.6 (37) Dimensions, LxWxH, in (mm) 18.2x6.1x9.1 (463x157x230) 18.2x6.1x9.1 (463x157x230) 22.4x8.1x11.4 (569x206x289) Pump with Explosion Proof Motor, 115V/208-230V, 60 Hz, 1 Phase, cUL Listed. 3046E-01 3086E-01 3166E-01

370 440 100 120 130 160 180 210 246 290 ITVX 1 4, 3 8, 1 2 1 4, 3 8, 1 2 1 2, 3 4 1 2, 3 4 PVQ 3 4, 1 3 4, 1 VY1 Adapter Assembly Installation Procedure Accessory/Compact Pressure Switch: IS10-01 For details, refer to Best Pneumatics No. 8.

Recommended speed controlling restrictor/ dual speed controller for CYP cylinder Model Series Restrictor CYP15 CYP32 Elbow type 10-AS1200-M5-X216 10-AS2200-01-X214 Metal body piping type In-line type 10-AS1000-M5-X214 10-AS2000-01-X209 10-AS1201F-M5-04-X214 10-AS2201F-01-04-X214 Elbow type 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 (Restrictor) 10-AS2201F-01-06-X214 10-AS1301F-M5-04-X214

D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/K39 D-G39A/K39A D-F7/J7 D-J79C D-F79F D-F7BAL D-F7BAVL D-F7V D-F7NTL D-F7W (V) D-F5/J5 D-F5BAL D-F5W/J59W D-F59F D-F5NTL D-G39C/K39C D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-Y5/Y6/Y7/Y7V D-Y7BAL D-Y7W/Y7WV D-M5 D-M5W D-M5TL D-P3DW D-P4DWL D-F9G/H D-Y7G/H D-G5NBL D-F7NJL D-F6 D-F8 Solid state auto switches Reed auto

Hs 11 Auto switch D-B7, B8 D-G7, K7 Auto switch mounting position Auto switch mounting height (mm) (mm) Auto switch model D-G5, K5 D-G5W D-K59W D-G5NTL D-B5, B6 D-B59W D-G5BAL D-G59F D-B7, B8 D-B73C D-B80C D-G7, K7 D-K79C D-H7C D-B7, B8 D-B73C D-B80C D-G7, K7 D-K79C D-B5, B6 D-G5W D-K59W D-G5BAL D-G59F D-C7, C8 D-C73C D-C80C D-C7, C8 D-C73C D-C80C D-H7W D-H7F D-H7BAL D-G5 D-K5 D-G5NTL D-H7